本論文之主要是利用共濺鍍系統成長複合型氧化鋅銦錫薄膜，透過調變氧化鋅及銦錫氧化物的比例以及氧氣濃度得到不同功能性的薄膜，根據其結晶性與光電特性將複合型氧化鋅銦錫薄膜分為透明導電薄膜及非晶薄膜，進而應用於不同光電元件 。在透明導電薄膜部分，為更進一步提升薄膜的電導特性，嵌入銦金屬層並在不同溫度(400℃ 和600℃)下進行熱處理。研究結果顯示，有嵌入銦金屬層的透明導電薄膜其電導特性明顯優於未嵌入銦金屬層的薄膜。由於熱處理造成的銦原子的熱擴散機制是提升薄膜的電導率的主要原因。另外，透過電漿離子轟擊可以在短時間(20分鐘以內)及較低的溫度(200 ℃以下)下改善薄膜電性與降低表面粗糙度，更有助於提升薄膜與基板間的介面穩定性。
另一向研究主題主要是針對非晶氧化鋅銦錫薄膜及將其應用於電晶體。透過不同氧氣濃度調變非晶氧化鋅銦錫電特性，並取其位於半導體區特性之樣本，運用於薄膜電晶體。實驗結果顯示，氧氣濃度在9 %下[氧氣/(氮氣+氧氣)]非晶氧化鋅銦錫薄膜具有較佳的半導體特性，且所製作的薄膜電晶體具有良好開關特性，可與液晶顯示器結合，應用於光電顯示元件領域等上。

In present study, the compound Zn-In-Sn-O (ZITO) thin films were deposited using the co-sputtering system. By adjusting the content ratio of ZnO and ITO, or by altering the oxygen partial pressure, the multifunctional thin films will be obtained. Through the analysis of the crystallization and electric properties, a transparent conductive ZITO (c-ZITO) films and an amorphous ZITO (a-ZITO) films were formed, and these films can be further used in the different optoelectronic devices.
For the transparent conductive oxide (TCO) thin films, the indium layer was embedded in the interface between the ZITO film and glass substrate, and then annealed at different temperature (400℃ and 600℃) to enhance the conductivity of ZITO films. The results showed that ZITO films had higher conductivity because the indium atoms diffused into the ZITO film by thermal diffusion mechanism. In addition, the ZITO films were treated by plasma ions bombarding to improve the electrical properties, decrease surface roughness and promote the stability of the film under lower temperature manufacture (< 200℃) for a short time (< 20 minutes).By varying the mix gas ratio of argon and oxygen, we changed the optoelectronic and structural properties of a-ZITO films. Then, a-ZITO was applied in thin film transistors (TFTs). The results showed that a-ZITO with oxygen gas ratio of 9% had better semiconductor properties, and its application in TFT had good switch characteristic. The a-ZITO TFT can be combined with liquid crystal displays and provided appropriate applications in optoelectronic display devices.

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