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研究生: 張翔瑜
Chang, Hsiang-Yu
論文名稱: 氨氣等離子體處理對氧化鉿鋯和二硫化鉬界面改善之研究
A Study on the Improvement of HfZrO2/MoS2 Interface by NH3-Plasma Treatment
指導教授: 高國興
Kao, Kuo-Hsing
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 奈米積體電路工程碩士博士學位學程
MS Degree/Ph.D. Program on Nano-Integrated-Circuit Engineering
論文出版年: 2024
畢業學年度: 113
語文別: 英文
論文頁數: 69
中文關鍵詞: 氨電漿處理殘留光阻二硫化鉬二維材料鐵電微波退火
外文關鍵詞: NH3 plasma treatment, Residual photoresist, Molybdenum Disulfide, Two-dimensional materials, Ferroelectricity, Microwave Annealing
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  • 口試審查結果 ii 中文摘要 iii Abstract iv Acknowledgment v Table of Contents vi List of Figures ix Chapter1 Introduction 1 1.1 Background 1 1.2 Device of 2D-Materials 5 1.3 Applications and Challenges of 2D Materials 8 1.4 Motivation 10 Chapter2 Experimental Methods and Principles 11 2.1 Introduction of fabrication equipment and method 11 2.1.1 Chemical Vapor Deposition (CVD) 11 2.1.2 I-line (365 nm) stepper 13 2.1.3 Atomic Layer Deposition (ALD) 14 2.1.4 Physical Vapor Deposition (PVD) 16 2.1.5 Lift-off Process 18 2.1.6 Dry Etching 19 2.1.7 Microwave Annealing 20 2.2 Introduction of measuring instruments 22 2.2.1 Raman Spectroscopy 22 2.2.2 X-ray Photoelectron Spectroscopy 23 2.2.3 X-ray Diffraction (XRD) 24 2.2.4 Transmission Electron Microscopy (TEM) 26 2.3 Electrical Parameter Extraction Method 27 2.3.1 Subthreshold Swing (SS) 27 2.3.2 Y-function Method 27 Chapter 3 Surface treatment on MoS2 channel devices 30 3.1 Motivation 30 3.2 Fabrication of the MoS2 FeFET 31 3.2.1 Device fabrication-2DM FeFET 31 3.2.2 Photoresist cleaning process steps 32 3.3 Materials Analysis 34 3.3.1 X-ray Photoelectron Spectroscopy (XPS) 34 3.3.2 Raman Spectroscopy 35 3.3.3 X-ray Diffraction (XRD) 36 3.3.4 Transmission Electron Microscopy (TEM) 37 3.4 Electrical Properties Discussion of 2DM FeFET Devices 38 3.4.1 Dielectric Capping Effect on MoS2 Field-Effect Transistor 38 3.4.2 The Impact of Residual Photoresist on the Electrical Properties of bottom-gate Devices 40 3.4.3 The Impact of Residual Photoresist on the Electrical Properties of top-gate Devices 42 3.4.4 The impact of surface treatment on the electrical properties of top-gate devices 43 3.4.5 Ferroelectric properties of MoS2 FeFET devices 45 Chapter 4 Conclusion and Future Works 51 4.1 Conclusion 51 4.2 Future Works 52 Reference 53

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