| 研究生: |
張翔瑜 Chang, Hsiang-Yu |
|---|---|
| 論文名稱: |
氨氣等離子體處理對氧化鉿鋯和二硫化鉬界面改善之研究 A Study on the Improvement of HfZrO2/MoS2 Interface by NH3-Plasma Treatment |
| 指導教授: |
高國興
Kao, Kuo-Hsing |
| 學位類別: |
碩士 Master |
| 系所名稱: |
電機資訊學院 - 奈米積體電路工程碩士博士學位學程 MS Degree/Ph.D. Program on Nano-Integrated-Circuit Engineering |
| 論文出版年: | 2024 |
| 畢業學年度: | 113 |
| 語文別: | 英文 |
| 論文頁數: | 69 |
| 中文關鍵詞: | 氨電漿處理 、殘留光阻 、二硫化鉬 、二維材料 、鐵電 、微波退火 |
| 外文關鍵詞: | NH3 plasma treatment, Residual photoresist, Molybdenum Disulfide, Two-dimensional materials, Ferroelectricity, Microwave Annealing |
| 相關次數: | 點閱:38 下載:0 |
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校內:2029-10-12公開