至今，有關於金屬氧化物的感測器已受到非常注目，相較於其他的氧化物半導體，氧化鋅具有許多優點，像是寬的能隙3.37eV、大的激子束縛能60 meV、高的熱穩定性與化學穩定性等等。因此，本論文主要利用化學浴沉積法來製備一系列的氧化鋅奈米結構，像是水熱法、水溶液與光化學沉積法。本文主要分為三部分，第一部分為鎂摻雜氧化鋅奈米柱之紫外光感測器；第二部分為鎵摻雜氧化鋅奈米片之紫外光感測器與場發射元件的應用；第三部分為銀奈米粒子依附於氧化鋅奈米片之乙醇氣體感測器之研究。
　　第一部分的研究中，主要利用水熱法合成鎂摻雜氧化鋅奈米柱於玻璃基板上，其中鎂摻雜氧化鋅奈米柱的平均長度與柱徑為591 nm與43 nm，透過X-ray 繞射圖中顯示鎂摻雜氧化鋅奈米柱的結構是的六角形纖鋅礦結構，也可以發現奈米柱是單晶的結晶並以c軸的方向成長。在光電特性分析中，鎂摻雜氧化鋅奈米柱具有良好的穩定性、高的紫外－可見光拒斥比、快的響應速度與回復速度。當偏壓為1伏特時，其光電流與暗電流的比值約4000，在光響應量測中其紫外－可見光拒斥比約為400。緊接著進行雜訊等校功率與檢測度的量測與計算，當偏壓1伏特，頻率為100 赫茲時，其值為0.335 × 10-9 W and 1.49 × 108 cm•Hz0.5 •W-1。由上結果可知鎂摻雜氧化鋅奈米柱光感測器有著不錯的操作特性。
　　第二部分的研究中，主要利用水溶液法合成鎵摻雜氧化鋅奈米片於玻璃基板上，其中鎵摻雜氧化鋅奈米片的平均長度與厚度約為1.28 μm與19 nm，透過EDX光譜分析可知摻雜鎵原子的濃度約為1.35 %。當元件照射於365 nm的紫外光下，並偏壓於1伏特時，其光電流與暗電流的比值約14193，在動態響應分析中顯示出鎵摻雜氧化鋅奈米片光感測器具有快速的響應速度與回復速度。場發射元件特性分析中鎵摻雜氧化鋅奈米片的起始電場與場效增強因子分別為4.67 V/μm與4037；當照射紫外光時，其元件的起始電場與場效增強因子可以提升至2.83 V/μm與6166。由上結果可以鎵摻雜氧化鋅奈米片可以增強光感測器與場發射元件的性能。
　　第三部分的研究中，主要利用水溶液法與光化學合成銀奈米粒子依附於氧化鋅奈米片於玻璃基板上，並製備成氣體感測元件。與一維奈米結構相比，二維氧化鋅可以增加奈米結構的表面體積比，進而增強氣體感測器的性能，除此之外，貴重金屬粒子依附於奈米結構的表面時，也可以增強氣體感測器，主要的原因是可有效將奈米結構的電子聚集於金屬奈米粒子中，促使增強表面空間電荷層。因此，利用銀奈米粒子依附於氧化鋅奈米片之乙醇氣體感測器與純的氧化鋅奈米片氣體感測器相比顯示出高的靈敏性。同時，與其他的揮發性氣體相比，乙醇氣體也具有高的選擇性。

　Zinc oxide (ZnO) is one of the most attractive and highly promising key group of II–VI semiconductor materials in nanostructure (NS). Some advantages of ZnO are better than GaN, including a wide band gap of 3.37 eV, a direct band gap structure at room temperature, a large exciton binding energy of approximately 60 meV, thermal stability at room temperature, non-toxicity, manufacturing ease, and low cost. Therefore, the dissertation is divided into three parts, first part is the investigation of Mg doped ZnO nanorod based on photodetector, second part is the investigation of Ga doped ZnO nanosheets based on photodetector and field emission devices, third part is the investigation of Ag nanoparticles-decorated ZnO nanosheets based on ethanol gas sensor.
　The first part of the study, Mg-doped ZnO nanorods were synthesized successfully on a glass substrate at 80oC by hydrothermal method. The average length and diameter of the Mg-ZnO nanorods were 591 nm and approximately 43 nm, respectively. The X-ray diffraction spectrum showed the Mg-ZnO nanorods had a wurtzite hexagonal phase. The Mg-doped ZnO nanorods are found to be single crystals grown along the c-axis. The photosensors showed good stability properties in ultraviolet (UV) illumination. The resulting Mg-doped ZnO nanorods have excellent potential for application in a UV photodetector (PD) because of the Mg-doped ZnO nanorods UV PD has a high UV-to-visible ratio, fast rise/fall time. Further, the dynamic response of the Mg-doped ZnO nanorods PD with Au electrodes was stable and reproducible with an on/off current contrast ratio of approximately 4 × 103. The ultraviolet-to-visible rejection ratio of the sample is approximately 400 when biased at 1 V, and the fabricated UV PD is visible-blind with a sharp cutoff at 350 nm. The low-frequency noise spectra obtained from the UV PD were caused purely by the 1/f noise. The noise-equivalent power and normalized detectivity (D*) of the Mg-ZnO nanorod PD were 0.335 × 10-9 W and 1.49 × 108 cm•Hz0.5 •W-1, respectively.
　The second part of the study, the GZO nanosheets UV PD was fabricaterd on a glass substrate by using aqueous solution. The average length and diameter was 1.28 μm and approximately 19 nm, respectively. The doped Ga concentrations was 1.35 at.% by SEM–EDX analysis. Under UV (365 nm) illumination, the photocurrent-to-dark current contrast ratio of GZO nanosheets PD was approximately 14193 with 1V bias. In addition, the proposed GZO nanosheet UV PD has a high fast rise/fall time characteristics. Field emission characteristics can be found that the turn-on fields of GZO nanosheets were approximately 4.67 V/μm and 2.83 V/μm, and the field enhancement factors were approximately 4037 and 6166 in the dark and under UV illuminate. The results show that the field emission properties of this GZO nanosheets is better than ZnO nanosheets. The results indicate that GZO nanosheets exhibit enhanced field emission properties and are promising candidate in future field-emission-based device applications.
　The third part of the study, we demonstrate the fabrication of Ag-decorated ZnO nanosheets (NSs) on a glass substrate using an aqueous solution and the photochemical deposition method. The synthesis process is conducted at room temperature. These 2D ZnO NSs can increase the performance of gas sensors by increasing the surface-to-volume ratio. The absorption potion of the target gas can be improved by increasing the surface-to-volume ratio of the nanostructures. Noble metal nanoparticles (NPs) attached to the ZnO nanostructure can also increase the performance of the gas sensors because the Ag NPs act as strong electron acceptors, which can induce an enhanced surface space charge layer. Thus, the Ag-decorated ZnO NS gas sensors have high selectivity to ethanol and better gas sensing performance to ethanol compared with pure ZnO.

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