奈米壓痕技術(Nanoindentation)在近年來對於量測奈米材料之機械性質已成為一不可或缺的工具。在本文中除了利用圓錐形和圓球形探針對材料聚甲基丙烯酸甲酯(Polymethylmethacrylate，PMMA)楊氏模數約3~4GPa，作奈米壓痕相關測試；更進一步利用圓球形探針對楊氏模數僅達MPa等級之極軟材料聚二甲基矽氧烷(Polydimethylsiloxane，PDMS)作奈米壓痕測試，並發現若使用尖端半徑較大之探針如圓球形探針測試極軟材料對於奈米壓痕實驗是較適當的；同時，我們也測得兩種材料於不同載重下的潛變模數，分別探討載重與探針型態對結果之影響。

Nanoindentation has become an indispensable tool for probing mechanical properties at small length scales. In the thesis, we characterize the mechanical properties of Polymethylmethacrylate (PMMA) whose Young’s modulus is around 3~4Gpa by using conical tip and spherical tip in nanoindentation. Furthermore, we characterize the mechanical properties of Polydimethylsiloxane (PDMS) which has Young’s modulus around the order of Mpa using spherical tip in nanoindentation. We also found that the nanoindentation with larger tip radius such as spherical tip for such soft materials is more applicable. Moreover, we also characterize the creep compliance of these two materials using different load. The effects of load and types of indenter tip on the creep compliance were studied.

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