簡易檢索 / 詳目顯示

研究生: 黃冠達
Huang, Guan-Da
論文名稱: 矽光積體光路中寬頻穩健型彎曲式絕熱耦合器之最佳化設計
Optimization of a Broadband and Robust Bent-Waveguide Adiabatic Coupler for Silicon Photonic Integrated Circuits
指導教授: 曾碩彥
Tseng, Shuo-Yen
學位類別: 碩士
Master
系所名稱: 理學院 - 光電科學與工程學系
Department of Photonics
論文出版年: 2026
畢業學年度: 114
語文別: 中文
論文頁數: 101
中文關鍵詞: 矽光子3-dB 分光器彎曲式絕熱耦合器絕熱地圖粒子群演算法逆向設計
外文關鍵詞: silicon photonics, 3-dB power splitter, bent-waveguide adiabatic coupler, adiabatic map, particle swarm optimization, inverse design
相關次數: 點閱:8下載:0
分享至:
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報
  • 本研究設計一種應用於絕緣層覆矽(Silicon-on-Insulator, SOI)平台之寬頻彎曲式 2 × 2 3-dB 絕熱耦合器,並分別採用絕熱地圖(Adiabatic Map)與粒子群最佳化演算法(Particle Swarm Optimization, PSO)進行波導結構最佳化。絕熱地圖結合耦合局部模態理論(Coupled Local-Mode Theory, CLMT)與絕熱理論,藉由搜尋較低絕熱參數之演化路徑,決定彎曲波導的中心軌跡。而 PSO 逆向設計的核心為,基於移動材料邊界之擾動理論,將局部超模態間的耦合分解為各波導側壁位移所造成的貢獻,並固定耦合區長度,以波導局部傾斜角度作為粒子群最佳化演算法(PSO)的主要設計參數,根據元件的寬頻分光比與總傳輸功率進行最佳化。
    結果顯示,透過絕熱地圖所設計元件之耦合區長度為 29.1 𝜇m,在 1475 -1578.8 nm 範圍內可維持 50 ± 2% 的分光比,操作頻寬為 103.8 nm;當波導寬度誤差為 ±20 nm 時,分光比仍可維持於約 50 ± 4% ,顯示其具有高製程容忍度。PSO 逆向設計所設計元件的耦合區長度為 30 𝜇m。當權重函數 𝜂1 = 0.3、𝜂2 = 0.7時,在 C、L、S band (1460 - 1625 nm) 內的最大分光比偏差約為 1.3%,以 50 ± 2% 為標準之操作頻寬可達 216 nm。當波導寬度誤差為 +10 nm 時,分光比仍可維持於約50 ± 5%。
    研究實現了兼具寬頻、低損耗及製程容忍度之矽光子 3-dB 分光元件,並可作為光學開關、調製器與 Mach–Zehnder 干涉儀等積體光路之基礎元件。

    This study presents a broadband bent-waveguide 2×2 3-dB adiabatic coupler designed on a silicon-on-insulator (SOI) platform. Two optimization approaches, namely an adiabatic map and particle swarm optimization (PSO), are employed to determine the geometry of the coupling waveguides. The adiabatic-map approach combines coupled local-mode theory (CLMT) with the adiabatic theorem to construct a two-dimensional distribution of the adiabaticity parameter. A waveguide center trajectory with relatively low nonadiabatic coupling is then selected from the map. In the PSO-based inverse-design approach, CLMT is combined with perturbation theory for shifting material boundaries to decompose the coupling between local supermodes into the contributions induced by the displacement of individual waveguide sidewalls. With the coupling-region length fixed, the local sidewalltilt angles are treated as the principal optimization variables, while the broadband splittingratio and total transmitted power are incorporated into the objective function.
    The adiabatic-map-designed device has a coupling-region length of 29.1 μm and maintains a splitting ratio of 50±2% over the wavelength range from 1475 - 1578.8 nm, corresponding to an operating bandwidth of 103.8 nm. Under a waveguide-width deviation of ±20 nm, the splitting ratio remains approximately 50±4%, demonstrating good fabrication tolerance. The PSO-optimized device has a coupling-region length of 30 μm. Within the C, L, and S bands from 1460 to 1625 nm, the maximum splitting-ratio deviation is approximately 1.3%, while the bandwidth satisfying a 50±2% splitting-ratio criterion reaches 216 nm. Moreover, under a waveguide-width deviation of +10 nm, the splitting ratio remains withinapproximately 50±5%.
    These results demonstrate a silicon photonic 3-dB power splitter that simultaneously provides broadband operation, low excess loss, and fabrication robustness. The proposed bent-waveguide adiabatic coupler is therefore suitable for use as a fundamental building block in photonic integrated circuits, including optical switches, modulators, and Mach– Zehnder interferometers.

    口試委員會審定書1 中文摘要I AbstractII 致謝XIII 目錄XIV 表目錄XVII 圖目錄XVIII Chapter 1 緒論1 1-1.研究動機1 1-2.文獻回顧2 1-2.1 Y-branch2 1-2.2 多模干涉儀 (Multimode Interference, MMI)4 1-2.3 定向耦合器 (Directional Coupler, DC)6 1-2.4 絕熱耦合器 (Adiabatic Directional Coupler, ADC)7 1-2.5 彎曲波導耦合區8 1-3. 本文結構10 Chapter 2 理論分析13 2-1. 有效折射率 (Effective Refractive Index)13 2-2. 模態耦合理論 (Coupled Mode Theory, CMT)14 2-2.1 局部模態 (Local Mode)14 2-2.2 耦合局部模態理論 (Coupled Local-Mode Theory)15 2-3. 移動材料邊界之擾動理論 (Perturbation Theory for Shifting Material Boundaries18 2-4. 絕熱理論 (Adiabatic Theorem) 20 2-4.1 絕熱地圖 (Adiabatic Map) 22 2-5. 光學模擬方法與理論23 2-5.1 有限時域差分法(Finite-Difference Time-Domain, FDTD)24 2-5.2 粒子群最佳化演算法(Particle Swarm Optimization, PSO)27 2-5.3 有限差分特徵模態求解器 (Finite Difference Eigenmode solver, FDE)30 2-5.4 雙向特徵模態展開求解器 (Bidirectional Eigenmode Expansion Solver, EME)30 Chapter 3 設計與模擬34 3-1. 模擬方法與研究架構34 3-2. 基於模態演化之絕熱地圖-3-dB 分光器36 3-2.1 絕熱地圖 - 幾何結構及參數38 3-2.2 基於絕熱地圖分光器 - 模擬結果與分析40 3-3. 基於材料邊界之擾動理論之 PSO 逆向設計 - 3-dB 分光器45 3-3.1 PSO 逆向設計 - 幾何參數化46 3-3.2 PSO 逆向設計 - 目標函數 (Figure of Merit, FOM) 48 3-3.3 PSO 逆向設計 - 幾何結構及參數49 3-3.4 PSO 逆向設計 - 模擬結果50 3-3.5 FOM 之權重組合 (2) 𝜂1 = 0.3 、𝜂2 = 0.7 - 模擬結果與分析55 3-3.6 FOM 之權重組合 (3)𝜂1 = 0.7 、𝜂2 = 0.3 - 模擬結果與分析60 Chapter 4 結果分析與討論65 Chapter 5 結論71 References73

    [1] Y. Yuan, Y. Peng, W. V. Sorin, S. Cheung, Z. Huang, D. Liang, M. Fiorentino, andR. G. Beausoleil. A 5 × 200 gbps microring modulator silicon chip empowered by two-segment z-shape junctions. Nature Communications, 15:918, 2024.
    [2] A. Fernández-Hinestrosa, J. M. Luque-González, P. Cheben, J. H. Schmid, S. Wang,J. G. Wangüemert-Pérez, I. Molina-Fernández, and A. Ortega-Moñux. Nanophotonic bragg grating assisted Mach–Zehnder interferometers for O-band add-drop filters. Scientific Reports, 14:18492, 2024.
    [3] Z. Lu, H. Yun, Y. Wang, Z. Chen, F. Zhang, N. A. F. Jaeger, and L. Chrostowski. Broad-band silicon photonic directional coupler using asymmetric waveguide based phase control. Optics Express, 23(3):3795–3808, 2015.
    [4] H.-C. Chung, T.-C. Wang, Y.-J. Hung, and S.-Y. Tseng. Robust silicon arbitrary ratio power splitters using shortcuts to adiabaticity. Optics Express, 28(7):10350–10362, 2020.
    [5] Q. Liu, Y. Bian, and J. Xiong. Progress in passive silicon photonic devices: A review. Photonics, 12(9):928, 2025.
    [6] P. Dong. Silicon photonic integrated circuits for wavelength-division multiplexing ap- plications. IEEE Journal of Selected Topics in Quantum Electronics, 22(6):370–378,2016.
    [7] X. Chen, J. Lin, and K. Wang. A review of Silicon-based integrated optical switches.Laser & Photonics Reviews, 17(4):2200571, 2023.73
    [8] A. Rahim, A. Hermans, B. Wohlfeil, D. Petousi, B. Kuyken, D. Van Thourhout, and R. Baets. Taking Silicon photonics modulators to a higher performance level: State-of- the-art and a review of new technologies. Advanced Photonics, 3(2):024003, 2021.
    [9] H. Saghaei, P. Elyasi, and R. Karimzadeh. Design, fabrication, and characterization of Mach–Zehnder interferometers. Photonics and Nanostructures – Fundamentals and Applications, 37:100733, 2019.
    [10] A. Maese-Novo, R. Halir, S. Romero-García, D. Pérez-Galacho, L. Zavargo-Peche, A. Ortega-Moñux, I. Molina-Fernández, J. G. Wangüemert-Pérez, and P. Cheben. Wavelength independent multimode interference coupler. Optics Express, 21(6):7033– 7040, 2013.
    [11] L. Wan, N. Zhu, R.-Y. Zhang, and T. Mei. All-polymeric planar waveguide de- vices based on a gas-assisted thermal imprinting technique. Microsystem Technologies, 23(12):5271–5279, 2017.
    [12] T. Lee, D. Lee, and Y. Chung. Design and simulation of fabrication-error-tolerant triplexer based on cascaded Mach–Zehnder inteferometers. IEEE Photonics Technology Letters, 20(1):33–35, 2008.
    [13] Y. Xue, L. Zhang, Y. Ren, Y. Lei, and X. Sun. Fast adiabatic mode evolution assisted 2×2 broadband 3-db coupler using silicon-on-insulator fishbone-like grating waveguides. Nanomaterials, 13(20):2776, 2023.
    [14] Y. Zhang, S. Yang, A. E.-J. Lim, G.-Q. Lo, C. Galland, T. Baehr-Jones, and M. Hochberg. A compact and low loss Y-junction for submicron silicon waveguide. Optics Express, 21(1):1310–1316, 2013.
    [15] C. Ozcan, M. Mojahedi, and J. S. Aitchison. Short, broadband, and polarization-insensitive adiabatic Y-junction power splitters. Optics Letters, 48(18):4901–4904, 2023.
    [16] K. Okamoto. Fundamentals of Optical Waveguides. Academic Press, Burlington, MA, 2nd edition, 2006.
    [17] A. Ortega-Moñux, C. Alonso-Ramos, A. Maese-Novo, R. Halir, L. Zavargo-Peche,D. Pérez-Galacho, I. Molina-Fernández, J. G. Wangüemert-Pérez, P. Cheben, J. H. Schmid, J. Lapointe, D. Xu, and S. Janz. An ultra-compact multimode interference coupler with a subwavelength grating slot. Laser & Photonics Reviews, 7(2):L12–L15, 2013.
    [18] J. Kim, J.-Y. Kim, J. Yoon, H. Yoon, H.-H. Park, and H. Kurt. Experimental demonstration of inverse-designed silicon integrated photonic power splitters. Nanophotonics, 11(20):4581–4590, 2022.
    [19] R. G. Hunsperger. Coupling between waveguides. In Integrated Optics: Theory and Technology, chapter 8, pages 153–169. Springer, New York, NY, 6th edition, 2009.
    [20] K. Thyagarajan. The optical directional coupler. In Integrated Quantum Photonics, Graduate Texts in Physics, chapter 5, pages 135–183. Springer Nature Switzerland, Cham, Switzerland, 2025.
    [21] X. Liu, Y. Zhao, Z. Sheng, and F. Gan. Compact and ultra-broadband silicon photonic adiabatic directional coupler using rib waveguides. IEEE Photonics Technology Letters, 36(10):637–640, 2024.
    [22] D. Mao, Y. Wang, E. El-Fiky, L. Xu, A. Kumar, M. Jaques, A. Samani, O. Carpentier, S. Bernal, M. S. Alam, J. Zhang, M. Zhu, P.-C. Koh, and D. V. Plant. Adiabatic coupler 75 with design-intended splitting ratio. Journal of Lightwave Technology, 37(24):6147– 6155, 2019.
    [23] J. M. Fargas Cabanillas, B. Zhang, and M. A. Popović. Demonstration of 3 ± 0.12 db power splitting over 145 nm optical bandwidth in a 31 𝜇m-long 3-db rapid adiabatic coupler. In Optical Fiber Communication Conference (OFC) 2020, OSA Technical Digest, page Th1A.2. Optica Publishing Group, 2020.
    [24] A. H. El-Saeed, A. Elshazly, H. Kobbi, R. Magdziak, G. Lepage, C. Marchese, J. Rahimi Vaskasi, S. Bipul, D. Bode, M. Ersek Filipcic, D. Velenis, M. Chakrabarti, P. De Heyn, P. Verheyen, P. Absil, F. Ferraro, Y. Ban, J. Van Campenhout, W. Bogaerts, and Q. Deng. Low-loss silicon directional coupler with arbitrary coupling ratios for broadband wavelength operation based on bent waveguides. Journal of Lightwave Technology, 42(17):6011–6018, 2024.
    [25] A. W. Snyder and J. D. Love. Optical Waveguide Theory. Chapman and Hall, London, 1983.
    [26] L. Jin, W. Jin, J. Ju, and Y. Wang. Coupled local-mode theory for strongly modulated long period gratings. Journal of Lightwave Technology, 28(12):1745–1751, 2010.
    [27] S. G. Johnson, M. Ibanescu, M. A. Skorobogatiy, O. Weisberg, J. D. Joannopoulos, and Y. Fink. Perturbation theory for Maxwell’s equations with shifting material boundaries. Physical Review E, 65(6):066611, 2002.
    [28] J. M. Fargas Cabanillas and M. A. Popović. Fast adiabatic mode evolution based on geometry-induced suppression of nearest-mode crosstalk. In Conference on Lasers and Electro-Optics (CLEO), OSA Technical Digest, page STh4A.2. Optica Publishing Group, 2018.
    [29] M. Born and V. Fock. Beweis des adiabatensatzes. Zeitschrift für Physik, 51(3–4):165– 180, 1928.
    [30] F. F. Li, J.-Z. Lai, and S.-Y. Tseng. A systematic study of the adiabaticity parameter in optical waveguides. IEEE Photonics Journal, 18(1):6600109, 2026.
    [31] K. S. Yee. Numerical solution of initial boundary value problems involving Maxwell’s equations in isotropic media. IEEE Transactions on Antennas and Propagation, 14(3):302–307, 1966.
    [32] G. Mur. Absorbing boundary conditions for the finite-difference approximation of the time-domain electromagnetic-field equations. IEEE Transactions on Electromagnetic Compatibility, EMC-23(4):377–382, 1981.
    [33] J.-P. Bérenger. A perfectly matched layer for the absorption of electromagnetic waves. Journal of Computational Physics, 114(2):185–200, 1994.
    [34] J. Kennedy and R. C. Eberhart. Particle swarm optimization. In Proceedings of ICNN’95 – International Conference on Neural Networks, volume 4, pages 1942–1948. IEEE, 1995.
    [35] J. Robinson and Y. Rahmat-Samii. Particle swarm optimization in electromagnetics.IEEE Transactions on Antennas and Propagation, 52(2):397–407, 2004.
    [36] Y. Shi and R. C. Eberhart. A modified particle swarm optimizer. In Proceedings of the 1998 IEEE International Conference on Evolutionary Computation, pages 69–73, Anchorage, AK, USA, 1998. IEEE.
    [37] Z. Zhu and T. G. Brown. Full-vectorial finite-difference analysis of microstructured optical fibers. Optics Express, 10(17):853–864, 2002.
    [38] D. F. G. Gallagher and T. P. Felici. Eigenmode expansion methods for simulation ofoptical propagation in photonics: Pros and cons. In Integrated Optics: Devices, Materials, and Technologies VII, volume 4987 of Proceedings of SPIE, pages 69–82. SPIE, 2003.
    [39] M. D. Feit and J. A. Fleck, Jr. Computation of mode properties in optical fiber waveguides by a propagating beam method. Applied Optics, 19(7):1154–1164, 1980.
    [40] L. Song, L. Lyu, X. Jiao, C. Gao, W. Liu, H. Li, Y. Shi, and D. Dai. Low-loss C+L+S-band 2×2 thermo-optic Mach–Zehnder switches with compact fast quasi-adiabatic couplers. Journal of LightwaveTechnology,42(23):8316–8322, 2024.

    QR CODE