本論文主要分成兩部分，首先是使用TSMC 0.25um 1P5M CMOS製程研製CMOS射頻微機電開關，並以微機電製程技術中之表面微加工(surface micromachining)技術，對CMOS微機電開關進行後製程之步驟。透過乾式蝕刻移除0.25um製程中之IMD3與IMD4，來釋放以Metal3、Metal4及Metal5組成的結構層。由於後製程的機台故障問題，未能完成完整的後製程製作，故只附上未做後製程之量測結果:開關操作頻率為1 ~ 10GHz，ON state的return loss為9.8 ~ 18.4dB、insertion loss為0.9 ~ 4.8dB。
第二部分是使用CMOS RFIC研製應用於無線通訊之2GHz與5GHz壓控振盪器。2GHz壓控振盪器採用TSMC 0.25um CMOS製程設計，包括一互補式VCO以及一加入差動調變MOS Varactor機制的VCO。2GHz互補式VCO輸出頻率為1970MHz ~ 2128MHz、輸出功率約為7.4dBm、相位雜訊為-101dBc/Hz@100kHz、主動埠消耗功率約22.5mW;差動調變MOS Varactor之2GHz VCO輸出頻率為1827MHz ~ 2136MHz、輸出功率約為8.2dBm、相位雜訊為-100.2dBc/Hz @100kHz、主動埠消耗功率約20mW。5GHz VCO的設計採用TSMC 0.18um CMOS製程，此外還與Motorola MC12210 PLL晶片整合成為5GHz頻率合成器。VCO量測結果為輸出頻率4517MHz ~ 4782MHz、輸出功率約為0 dBm、相位雜訊為-91.2dBc/Hz@100kHz、主動埠消耗功率約5mW;頻率合成器量測突波大小-58dBc，頻率切換時間在頻道跳躍20MHz時約為2.1ms。

This thesis presents the research on CMOS RF MEMS switches and 2-GHz/5-GHz complementary and differentially tuned MOS-varactors CMOS VCO for wireless communication applications. The MEMS switch is fabricated in a TSMC standard 0.25um CMOS process and then post processed by surface micromachining in MEMS technology. Dry etching removes the IMD3 and IMD4 in the 0.25um CMOS process to release the structure layer composed of Metal3, Metal4 and Metal5. Due to the ICP machine problem, the post process cannot be finished. Here only measurement results of the return loss and insertion loss without post process are presented. The fabricated MEMS switch at ON-state exhibits a return loss from 9.8dB to 18.4dB and an insertion loss from 0.9 dB to 4.8 dB, respectively, while operating from 1 to 10GHz.
The CMOS VCO are fabricated in TSMC standard 0.25um and 0.18um process. The 2GHz complementary VCO exhibits an output frequency from 1970 to 2128MHz, an output power of 7.4 dBm, and a phase noise is –101dBc/Hz@100kHz. The 2GHz complementary VCO with differentially tuned MOS varactors exhibits an output frequency from 1827 to 2136MHz, an output power of 8.2 dBm, and a phase noise is –100.2dBc/Hz@100kHz. The 5GHz VCO with differentially tuned MOS varactors exhibits an output frequency from 4517 to 4782MHz with phase noise of –91dBc/Hz@100kHz. The 5GHz VCO and Motorola MC12210 PLL chip are integrated into a 5GHz-frequency synthesizer. The synthesizer with a spur less than 58dBc has a settling time of 2.1ms for 20MHz step.

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