本文以實驗方法探討具內部衝擊機制噴嘴之霧化特性，並探討應用於水及熔融金屬之霧化以產生超微粒子之方法。噴嘴霧化特性以Spraytec粒徑分析儀，相差都卜勒粒子分析儀(PDPA)，及粒子影像測速儀(PIV)量測。水模實驗結果顯示，當氣液質量比為0.14時，霧化平均粒度SMD小於10微米。且霧化平均粒度於低壓操作下即可達到4微米，這顯示了本型噴嘴在低壓下即擁有良好的霧化效能，此特性並非一般設計之噴嘴可輕易達成。實驗結果亦顯示，增加內部衝擊角度及噴口直徑可降低霧化粒度，這亦是本型噴嘴霧化效能的控制參數。另外本研究亦使用操作參數及噴嘴尺度成功地推導出噴霧粒徑實用之經驗公式。另一方面，瞬時影像流場之量測結果顯示，具內部衝擊機制之噴嘴所產生之噴霧呈現間歇式噴霧現象，而不具內部衝擊機制之噴嘴其噴霧在軸向呈現大尺度之正弦波結構。這是因為噴嘴內部衝擊機制增強液相與氣相之混合，並且擴展到下游之噴霧結構上。因此，具內部衝擊機制之噴嘴其噴霧延伸較廣且分佈較均勻，此現象亦可由噴霧粒徑及體積流率之量測結果得到印證。
　　在超微粒金屬粉末之製程研究方面，本文根據八個設計參數使用田口式L18實驗計畫法，並針對目標函數產生小於15微米之粉末，探討金屬粉末噴霧製程之最佳化組合。研究結果顯示，在八個設計參數中，霧化氣體種類、熔湯進料口徑、噴嘴出口大小、熔湯壓力及金屬材料種類等五種參數為重要因子。18項實驗之平均品質特性為32.86，標準差為2.67，S/N比為29.70。以最佳化之設計參數進行驗證實驗，S/N比提高6.97，品質特性則進一步提高至56.9，即所生產之金屬粉末中有56.9%落在0~15微米範圍，優於傳統外混式氣霧法噴霧製程。金屬粉末之分級結果顯示，傳統機械式震動篩分對45微米以下的粉末分級不易。這是因為小顆粒有較強之表面效應以及細粉之漂浮現象所造成，前者導致顆粒間相互團聚，並影響小顆粒之篩分品質。另外篩網網目大小的不均勻及團聚粉末形狀的不規則亦造成篩分上之困難。若以氣體輸送粉末並配合篩網篩分，可改善篩分品質，但篩網的使用仍限制了25微米以下粉末之篩分。最後以空氣動力式分級機進行超微粒粉末之分級，研究結果顯示將控制參數作適當之調整，對於1微米到30微米之超微粒金屬粉末均可得到甚佳之結果。

　The goal of this dissertation is to produce the ultra fine sprays for different applications. Both water spray and metallic spray were characterized in this research program. The atomizer was designed with internal impinging mechanism and the characteristics of the spray are measured by a Malvern Spraytec particle analyzer, a two-component phase Doppler particle analyzer (PDPA) and a particle image velocimeter (PIV). Results show that the Sauter mean diameter below 10μm has been achieved with GLR of 0.14 in the test of water atomization. The minimum mean drop size can be lowered to 4.0μm under low pressure conditions using this particular atomizer. Such performance cannot be easily achieved with the conventional nozzle design. Results also show that better atomization performance can be achieved by increasing the internal impinging angle and the orifice diameter. An empirical formula of SMD, in terms of operating conditions and nozzle length scale is also presented in this research program.
　Furthermore, instantaneous flow image shows the intermittence of the spray jet as injected with internal impingement. On the other hand, a large-scaled sinusoidal flow structure along the axial direction is observed when the spray jet is injected without internal impingement. Hence flow impingement inside the atomizer has strong effects on the structure of the spray jet because of the enhanced mixing processes between the liquid and gas phases. It turns out that the spray jet with internal impingement has a wider and more uniform distribution. Measurements of the distribution of the spray droplets and volume flux justify the above observation.
　The production of the extra-fine metal powder was further optimized using the L18(21x37) scheme of Taguchi method. The goal is to produce the metal powder with particle size less than 15μm. Optimization analysis shows that the atomization gas, the melt inlet diameter, the nozzle outlet diameter, the melt injection pressure and the materials are the control parameters among the eight design factors. Confirmation test with the optimized conditions indicates that the accumulative volume of the powder within 0~15μm as high as 56.9% can be obtained. That is, more than half of the powder is within extra-fine range. The results of melt spray were also compared with water spray in this dissertation.
　The classification for metal powder shows that the mechanical vibration sieving of particles below 45μm is difficult due to the high surface energy and the floating of small particles. The former one causes the agglomerated phenomenon that reduced the filtration quality of fine particles. The irregular distribution of the mesh and irregular shape of particles also cause some problems. On the other hand, by the classification with the air-jet sieving, the particles carried by the air flow could reduce the agglomerated and floating effects. Thus it has a better performance as compared to that of the mechanical vibration sieving. However, the classification performance is still limited due to the existence of the sieve. It is concluded that the classification of particles smaller than 25μm is difficult by the classifiers with sieves. Finally, the experiments of the aerodynamic classifier with centrifugal force were carried out in the classification of the ultra-fine particles. By adjusting the settings of the operating parameters, the classifications of particles with cut points ranging from 1μm to 30μm had been performed successfully.

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