隨微機電與微製程技術日益發展，目前微全分析系統已經廣泛應用在藥物治療、醫療診斷、生化分析等上。其中，壓電材料(PZT)為致動器的微型幫浦，因擁有高效率、高形變量與應變時間短等驅動特性，最適合用來實行在高精準控制的系統上面。因此，需要一個適合的壓電等效電路來作為最佳化前置驅動器的參考資訊，使得壓電式微型幫浦在效能上有所提升，由於在微幫浦製程中，容易出現不良情形，故使用此壓電等效電路作為方便並快速檢測故障情形與有瑕疵的微型幫浦。
本研究中，以BVD model為基礎發展出新的壓電等效電路模型，其中包含傳統共振模型與一個串聯的電阻及電感。用此壓電等效電路描述PZT致動器在高電壓、低頻率的方波訊號驅動下，對於兩種不良情形所產生的電性反應，此兩種不良情形分別為正負接腳位置不同與壓電片偏移，之後將所量測到的實驗數據透過常見電路分析軟體SPICE，分析出元件參數，用來對應機械反應，了解壓電片之機械原件特性與電路元件特性之關係。最後使用光纖位移機測量位移量與實驗結果來進行比較，以驗證此壓電模組的正確性與此方式的可行性。

The field of micro-electro-mechanical systems (MEMs) are widely used in chemical, diagnostics, medicine, and biological research. The micropumps with a lead zirconate titanate (PZT) actuator, which has a fast response time and high resolution, are most likely to be applied in implementations. To improve the performance of PZT micropumps utilized in the microfluidics field, suitable models are required to enable the optimization of the PZT actuator driving circuits. Due to the failures is caused by the fabricate process easily, the equivalent circuit is used to detection the failures of the PZT actuator. This study proposes a modified Butterworth-Van Dyke (BVD) model which consists of a BVD model in series with an electrical resistance and an electrical inductance. It describes two failure situations of the PZT actuator which driven by a square pulse with a relatively high voltage and low frequency for micropump applications. The failure analysis (FA) of micropump assembling process is focus on two failures: (1) The different position of two pins bonding with silver (2) The offset center of PZT. In order to understand the relationship between the electrical elements and the mechanical elements, the electrical model is verified by the SPICE software simulation, which analyzes the parameters of the circuit and reflects the mechanical elements of the resonance model. The displacement is measured to verify the correlation between the simulation of the electrical model and the measurements of the PZT actuator under real operating conditions.

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