於多軸循跡運動控制問題中，如何有效地降低追蹤誤差及輪廓誤差為提升加工精度的重要議題。然而於運動控制系統中，伺服機構往往會因非線性現象影響進而降低系統運動精度。例如當伺服系統操作在低速度運動或反轉運動時，則摩擦力現象之影響將特別明顯。除此之外，系統之模型誤差、外部干擾量或頓動力等影響亦會降低系統運動精度。上述現象將使得運動控制系統各軸的追蹤性能變差，進而降低循跡運動精度。因此，若要提升整體循跡精度，除了必須具備良好的控制架構外，更需進一步探討使用合宜的摩擦力、頓動力及干擾量補償等機制。本論文中，於循跡運動改善之議題上，除了先以回授控制技巧來達到基本循跡精度要求外，並另提出一具適應性滑動模式之干擾量補償架構。所提出方法為基於適應性及滑動模式控制理論，且考慮各軸系統之摩擦力模型及頓動力模型來發展補償架構，並以一配置線性馬達之XY平台進行驗證。實驗結果顯示，本論文所提出之補償方法與其他三種控制架構相較，確實能有效地降低雙軸循跡運動之追蹤誤差及輪廓誤差。

In multi-axis contour following control problems, how to effectively reduce tracking and contour error is an important issue in machining precision improvement. However, in motion control systems, the servomechanism usually encounters nonlinear phenomena such that the motion accuracy will be degraded. For example, when the servomotor is operated in low speed or a reverse motion, the influence of friction force is inevitable. In addition, the adverse effects of modeling error, external disturbance and cogging force also result in motion accuracy deterioration. The aforementioned problems degrade the tracking performance of the motion in each axis so that the contour error of the overall system is increased. Therefore, to improve contouring accuracy, aside from having an excellent control structure, a further study on friction force compensation and cogging force compensation as well as designing an appropriate disturbance compensation scheme is necessary. Hence, for contour following tasks, in addition to the feedback controller used to meet certain performance requirement, the Adaptive Sliding Mode-based Disturbance Compensation Structure is proposed in this thesis. The proposed compensation scheme is based on sliding mode control and adaptive control, in which a friction force model and a cogging force are also considered. To compare the performance of the proposed structure and three other control schemes, several experiments have been conducted on an X-Y table driven by two linear motors. Experimental results indicate that the proposed control scheme can significantly reduce tracking error and contour error of a biaxial contouring control system.

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