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研究生: 吳宛叡
Wu, Wan-Rui
論文名稱: 燒結促進劑ZnO、MoO3、ZnMoO4對0.91(Mg0.95Co0.05)2(Ti0.95Sn0.05)O4-0.09(Ca0.8Sr0.2)TiO3在介電陶瓷微波特性影響
Effect of Added Sintering Aids ZnO、MoO3、ZnMoO4 on Microwave Dielectric Properties of 0.91(Mg0.95Co0.05)2(Ti0.95Sn0.05)O4-0.09(Ca0.8Sr0.2)TiO3 Ceramics
指導教授: 李炳鈞
Li, Bing-Jing
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 電機工程學系
Department of Electrical Engineering
論文出版年: 2017
畢業學年度: 105
語文別: 中文
論文頁數: 81
中文關鍵詞: 微波介電陶瓷材料燒結促進劑ZnOMoO3ZnMoO40.91(Mg0.95Co0.05)2(Ti0.95Sn0.05)O4-0.09(Ca0.8Sr0.2)TiO3
外文關鍵詞: sintering aids, ZnO, MoO3, ZnMoO4, 0.91(Mg0.95Co0.05)2(Ti0.95Sn0.05)O4-0.09(Ca0.8Sr0.2)TiO3, microwave dielectric ceramics
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  • 本研究的目的為降低0.91(Mg0.95Co0.05)2(Ti0.95Sn0.05)O4-0.09(Ca0.8Sr0.2)TiO3陶瓷材料的燒結溫度,同時維持良好的微波特性,降低燒結溫度的方法為添加不同重量百分比的燒結促進劑ZnO、MoO3與ZnMoO4。首先針對三種燒結促進劑的影響進行實驗與量測,結果顯示,分別添加0.5wt%的ZnO、MoO3與ZnMoO4,降低的溫度為100℃、50℃與75℃,Qxf由原本的221,000GHz降為100,000GHz、56,000GHz與66,000GHz,最佳結果為添加0.5wt%的ZnO,但是與0.91(Mg0.95Co0.05)2(Ti0.95Sn0.05)O4-0.09(Ca0.8Sr0.2)TiO3未添加燒結促進劑在1225℃的量測結果顯示Qxf為124,000GHz,添加ZnO後的Qxf降太多,所以本研究所提出的三種燒結促進劑對於此材料降低的燒結溫度太少且在Qxf的特性上並沒有達到預期的效果。其次,將微波電路製作在FR4、Al2O3及自製基板0.91(Mg0.95Co0.05)2(Ti0.95Sn0.05)O4-0.09(Ca0.8Sr0.2)TiO3+0.5wt% ZnO,最後量測其頻率響應,由量測結果得到,自製基板中心頻率2.4GHz、插入損耗3.1dB、頻寬比6.6%的帶通濾波器,符合預期,高介電常數的自製基板確實能達到縮小尺寸之需求且自製基板的頻寬也是三者之中最小的,代表選擇性佳,但實作損耗方面不如FR4與Al2O3基板。

    The dielectric material 0.91(Mg0.95Co0.05)2(Ti0.95Sn0.05)O4-0.09(Ca0.8Sr0.2)TiO3 sintered at 1325oC presents excellent microwave properties, such as εr =19, temperature coefficient of resonant frequency |τf |< 5 ppm/℃ and Q×f≅220,000GHz. The purpose of this study was to reduce sintering temperature of the dielectric material further while maintaining its good microwave characteristics by adding sintering aids such as ZnO, MoO3 and ZnMoO4 during the conventional sintering process. The effect of sintering aids with varied weight percentages of addition, 0.5, 1.0 and 2.0, on the dielectric material was investigated, respectively. The experimental results showed that the sintering temperature decreased with the amount of sintering aids as expected and εr and τf were less influenced by the addition of these sintering aids. However, Q×f was greatly degraded with the addition of sintering aids. For the present study, the best Q×f was 103,211 GHz for 0.5 wt% addition of ZnO sintered at 1225 oC. Experiment also showed that Q×f was 124,876 GHz for 0.91(Mg0.95Co0.05)2(Ti0.95Sn0.05)O4-0.09(Ca0.8Sr0.2)TiO3 sintered at 1225 oC without any sintering aids. Therefore, ZnO, MoO3 and ZnMoO4 were not qualified as the effective sintering aids for 0.91(Mg0.95Co0.05)2(Ti0.95Sn0.05)O4-0.09(Ca0.8Sr0.2)TiO3. In addition, a microwave filter in microstrip structure was realized on the substrate of 0.91(Mg0.95Co0.05)2(Ti0.95Sn0.05)O4-0.09(Ca0.8Sr0.2)TiO3+0.5wt% ZnO. The measured properties were 2.4 GHz for the center frequency, 3.1dB for the insertion loss and 6.6% for the bandwidth ratio.

    摘要 I 目錄 VII 表目錄 IX 圖目錄 X 第一章 緒論 1 1-1前言 1 1-2研究目的與方法 3 第二章 理論背景與研究現況 4 2-1陶瓷材料之微波介電特性 4 2-1-1介電常數 4 2-1-2介電品質因數 7 2-1-3共振頻率溫度飄移係數 9 2-2 MgO-TiO2 系列材料 10 2-3介電共振器 12 2-2-1介電共振器原理 13 第三章 微帶線與濾波器 14 3-1濾波器原理 14 3-1-1濾波器簡介 14 3-1-2濾波器之種類及其頻率響應 15 3-1-3濾波器微波特性參數 16 3-2微帶線共振器 17 3-2-1微帶線的簡介 17 3-2-2微帶線共振器種類 17 3-2-3共振器間的耦合形式 20 3-2-4外部品質因素 23 3-2-5四分之一波長的阻抗轉換器與開路殘段 24 第四章 實驗方法與規劃 26 4-1實驗方法 26 4-1-1固態合成法 26 4-1-2固相燒結法 28 4-1-3液相燒結法 29 4-1-4 XRD相鑑定 31 4-1-5密度量測 32 4-1-6微波特性之量測 32 4-1-7濾波器設計、分析、製作與量測 34 4-2實驗規劃 43 4-2-1主相與混相、燒結促進劑粉末製備進行步驟 43 4-2-2實驗進行規劃 46 第五章 實驗結果與討論 48 5-1 0.91(Mg0.95Co0.05)2(Ti0.95Sn0.05)O4-0.09(Ca0.8Sr0.2)TiO3添加燒結促進劑ZnO的影響 48 5-1-1 91MCTS未添加燒結促進劑之特性 48 5-1-2 91MCTS/ZnO之XRD相鑑定分析 51 5-1-2 91MCTS/ZnO密度量測 52 5-1-3 91MCTS/ZnO微波特性分析 53 5-1-4總結 57 5-2 0.91(Mg0.95Co0.05)2(Ti0.95Sn0.05)O4-0.09(Ca0.8Sr0.2)TiO3添加燒結促進劑MoO3的影響 58 5-2-1 91MCTS/MoO3密度量測 58 5-2-2 91MCTS/MoO3微波特性分析 60 5-2-3總結 64 5-3 0.91(Mg0.95Co0.05)2(Ti0.95Sn0.05)O4-0.09(Ca0.8Sr0.2)TiO3添加燒結促進劑ZnMoO4的影響 64 5-3-1 91MCTS/ ZnMoO4密度量測 64 5-3-2 91MCTS/ ZnMoO4微波特性分析 66 5-3-3總結 70 5-4濾波器實作 71 5-4-1自製基板實作量測結果 72 5-4-2 FR4實作量測結果 73 5-4-3 Al2O3實作量測結果 75 第六章 結論與未來方向 77 參考文獻 79

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