中文摘要

微流道晶片具有可微小型化、大量製造、與低成本等特性，相較於傳統的晶片裝置，可以運作的更有效率。
本論文結合數種微機電製程技術，包含黃光製程技術、電鍍技術，實現出一組可以捕捉微米等級粒子的微流道晶片。此晶片將微電極結合於微孔洞，形成一立體的捕捉量測結構。如果微粒子被捕捉，便可立即對微粒子進行阻抗量測。阻抗量測是一種可以用來區分且分析不同待測物電特性的技術。本研究利用研製出的微流道晶片，可以百分之百地捕捉到單一微粒子與單一子宮頸癌細胞。此組微流道晶片有五組電極，可同時量測五組阻抗值。經過比較和分析，五組量測值相對誤差在4%以下。由捕捉前後阻抗變化以及相角的差異，此裝置可以不用標記待測物下成功地區分微粒子與細胞。因此，本捕捉量測晶片未來可運用於生物醫學檢測上的應用，具備可量測、非標記、多筆資料的優勢。

ABSTRACT

Microfluidic chips have the advantages of mass production, minia-turization, and low cost. Compared to conventional devices, these chips are more efficient to operate.
This study combines several processing techniques, including photolithography process and electroplating to fabricate a microfluidic device which can capture micro-scale particles. This device integrates microelectrodes with micro-cavities to perform a three dimensional trapping and measurement structures. If a micro-bead is trapped in the structure, the device can make impedance measurement immediately. EIS (Electrical impedance spectroscopy) technique is used to differentiate and analyze the electrical properties of different objects under measurement. In this study, single micro-bead and single HeLa cell can be captured by one hundred percent by using developed microfluidic device. The device consists of five groups of electrodes which can take measurement simultaneously. Through comparison and analysis, the relative error is under 4%. According to the variation of the impedance magnitude and phase, this device can distinguish label-free single micro-bead and single HeLa cell successfully. Therefore, this device has the potential to be applied in biomedical detection in the future for holding the advantages of being measureable, label-free, and simultaneous multiple measurements.

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