半導體產業因為電子產品的應用層面變廣，使得市場需求增加，故吸引了許多企業投入資源以求獲利。而台灣的半導體業者為了維持在半導體產業的競爭力，除了建置廠房提升產能外，也投入大筆研發經費進行製程技術的提升，惟由於半導體產業屬於高污染、高耗能產業，因此也對環境造成不良的影響。
半導體製程使用諸多化學藥劑，諸如硫酸、磷酸、氫氟酸……等，而在薄膜製程、擴散製程、黃光製程與蝕刻製程皆會使用化學藥劑，排放後由廠房進行委外清運或者排放至廢水廠進行處理後放流。本研究為廠內製程技術的提升，造成廢硫酸用量上升，而廢硫酸為廠內委外清運數量最多的廢棄物，故以廢硫酸廢棄物減量作為改善標的，運用萃智的技術矛盾，擬訂廢硫酸回收再利用之方案，期望提升廢硫酸回收效率。
本研究將廠內清運量最大宗的廢硫酸，導入廢硫酸回收機制之後，使得廠內清運廢硫酸的車次，由平均每月18車減量為平均每月6車，平均每月減少清運廢硫酸12車，減少清運車次高達66%。達到企業永續經營、資源妥善利用以及產業與環境共存之效益。

The semiconductor industry has increased the market demand due to the application of electronic products, and it has attracted many companies to invest resources for profits. In order to maintain the competitiveness of the semiconductor industry, semiconductor manufacturers have to invest a large amount of R&D funds to improve the yield-rates and build factories to increase company’s production capacity. However, the semiconductor industry is a high pollution and high power consumption industries, and therefore has a negative impact on the environment.

Semiconductor manufacturing process uses many chemicals, such as sulfuric acid、phosphoric acid、hydrofluoric acid, etc. They are used in thin film process、diffusion process、photo process and etch process, and disposed of by an outside industrial waste treatment company or drain to a wastewater plant to treatment and discharged to the environment. In the case, the plant improve the yield rates, resulting in waste sulfuric acid used in an amount of rise, and it is the largest number of waste in the plant. Therefore, waste sulfuric acid is used as a target for improvement of waste reduction. Using the contradictory matrix of TRIZ theory, set up a scheme for recycling waste sulfuric acid and it is expected to improve waste sulfuric acid recovery efficiency.

In this case, the largest amount of waste sulfuric acid in the factory will be imported into the recycling mechanism of waste sulfuric acid and the number of vehicles used to remove waste sulfuric acid from the factory was reduced from 18 vehicles per month to 6 vehicles per month, which resulted in a reduction in the total number of waste sulfuric acid 12 vehicles, this benefit is as high as 66%, and the number of vehicles to purchase hydrochloric acid was reduced from an average of 30 vehicles per month to 0 vehicles per month, the number of vehicles to purchase sulfuric acid was reduced from an average of 8 vehicles per month to 0 vehicles per month, achieve the sustainable operation of enterprises、recycling and make the industry and the environment coexist.

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