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研究生： 李榮盛
Li, Rung-Sheng
論文名稱： NdAlO3陶瓷介電特性改善及微波元件之應用
Improved Dielectric Properties of NdAlO3 Ceramics and Application of Microwave Devices
指導教授： 黃正亮
Huang, Cheng-Liang
學位類別： 碩士
Master
系所名稱： 電機資訊學院 - 電機工程學系
Department of Electrical Engineering
論文出版年： 2005
畢業學年度： 93
語文別： 中文
論文頁數： 101
中文關鍵詞： 微波 、陶瓷 、介電
外文關鍵詞： ceramic, dielectric, microwave
相關次數： 點閱：71  下載：3 
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    • 　　本論文中將討論（x）NdAlO3-（1-x）SrTiO3系統及NdAlO3摻雜（x）wt%ZnO燒結促進劑之微波介電特性及微結構。由實驗發現，（x）NdAlO3-（1-x）SrTiO3系統調整適合的x值，可以使其頻率溫度漂移係數降至趨近於零，除此之外，燒結溫度也較NdAlO3為低；適量的燒結促進劑ZnO，亦能有效的降低NdAlO3的燒結溫度。

    　　在本論文裡，利用雙模三角共振器設計了一個中心頻率在4GHz帶通濾波器，並分別使用了FR4，Al2O3，及NdAlO3+0.5wt%ZnO當作基板，更利用電腦模擬與實作的結果作比較。

    　The microwave dielectric properties and the microstructures of the（x）NdAlO3-（1-x）SrTiO3 system and NdAlO3 +（x）wt%ZnO have been discussed in this paper. The results show that appropriately adjusting the x value ，zero τf value can be obtained in the （x）NdAlO3-（1-x）SrTiO3 system，and the sintering temperature would be lower than pure NdAlO3 ceramics.Adding sintering aids ZnO can also lower the sintering temperature of NdAlO3.

    　A bandpass filter of center frequency at 4GHz have been designed in this paper,and based on dual-mode triangular resonators, with FR4、Al2O3、and NdAlO3+0.5wt%ZnO substrates. And we compared the result of the simulation with the result of the measurement of the performance.

    內文目錄 第一章 緒論．．．．．．．．．．．．．．．．．．1 第二章 介電及材料原理．．．．．．．．．．．．．3 2-1 介電原理．．．．．．．．．．．．．．．．． 3 2-2 介電共振器原理．．．．．．．．．．．．．． 8 2-3 燒結理論．．．．．．．．．．．．．．．．． 9 2-4 液相燒結．．．．．．．．．．．．．．．．．10 第三章 微波電路及濾波器理論．．．．．．．．． 12 3-1 微波電路起源．．．．．．．．．．．．．．．12 3-2 微帶線原理．．．．．．．．．．．．．．．．12 3-3 微帶線組抗及計算公式．．．．．．．．．．．13 3-4 微帶線的功率損耗．．．．．．．．．．．．．16 3-5 集膚效應的影響．．．．．．．．．．．．．．18 3-6 濾波器通論．．．．．．．．．．．．．．．．18 3-7 共振器耦合的概念．．．．．．．．．．．．．19 3-8　 Dual-Mode三角共振濾波器．．．．．．．．．20 3-8-1 二階Dual-Mode三角共振濾波器模型．．．． 23 3-8-2 二階Dual-Mode三角共振濾波器模型．．．． 24 第四章 實驗製程與元件量測．．．．．．．．．． 25 4-1 材料的製備．．．．．．．．．．．．．．．．25 4-2 基板的選擇．．．．．．．．．．．．．．．．26 4-3 介電材料之特性分析與量測方法．．．．．．．26 4-3-1 密度的量測．．．．．．．．．．．．．．．26 4-3-2 X-Ray分析（XRD）．．．．．．．．．．．．26 4-3-3 掃描式電子顯微鏡分析（SEM）．．．．．． 27 4-3-4 微波特性的量測．．．．．．．．．．．．．27 4-4 濾波器的製作．．．．．．．．．．．．．．．32 4-4-1 濾波器的規格．．．．．．．．．．．．．．32 4-4-2 Al2O3與NdAlO3+0.5wt%ZnO基板之實作．．． 32 4-4-3 FR4基板的實作．．．．．．．．．．．．． 33 4-5 濾波器的特性量測．．．．．．．．．．．．．33 第五章 實驗結果與討論．．．．．．．．．．．． 34 5-1 （1-x）SrTiO3+（x）NdAlO3陶瓷之微波介電特性分析．．．．．．．．．．．．．．．．．．．．． 34 5-1-1 介電常數分析．．．．．．．．．．．．．．34 5-1-2 密度分析．．．．．．．．．．．．．．．．35 5-1-3 Q*f值分析．．．．．．．．．．．．．．． 36 5-1-4 溫度頻率漂移係數（τf）分析．．．．．．．36 5-1-5 XRD繞射分析．．．．．．．．．．．．．． 37 5-1-6 SEM分析．．．．．．．．．．．．．．．． 38 5-2 NdAlO3摻雜0.25wt%、0.5wt%及1wt%ZnO之微波介電特性分析．．．．．．．．．．．．．．．．．．． 38 5-2-1 介電常數分析．．．．．．．．．．．．．．38 5-2-2 密度分析．．．．．．．．．．．．．．．．39 5-2-3 Q*f值分析．．．．．．．．．．．．．．． 39 5-2-4 溫度頻率漂移係數（τf）分析．．．．．．．40 5-2-5 XRD繞射分析．．．．．．．．．．．．．． 41 5-2-6 SEM分析．．．．．．．．．．．．．．．． 41 5-3 濾波器的響應．．．．．．．．．．．．．．．42 5-3-1 FR4基板．．．．．．．．．．．．．．．． 42 5-3-2 Al2O3基板．．．．．．．．．．．．．．． 42 5-3-3 NdAlO3+0.5wt%ZnO基板．．．．．．．．．．43 第六章 結論．．．．．．．．．．．．．．．．． 45 參考文獻．．．．．．．．．．．．．．．．．．． 47 圖目錄 圖2-1 極化結構圖．．．．．．．．．．．．．．．51 圖2-2 極化頻率分佈圖．．．．．．．．．．．．．52 圖2-3 電磁波入射介電陶瓷關係圖．．．．．．．．53 圖2-4 電磁波發生全反射之路徑．．．．．．．．．53 圖2-5 (a)圓柱型DR之TE01δ mode電場分佈圖 (b)圓柱型DR之TE01δ mode磁場分佈圖．．．．．．．．．． 54 圖2-5 (c)圓柱型DR之TM01δ mode電場分佈圖 (d)圓柱型DR之TM01δ mode磁場分佈　圖．．．．．．．．． 55 圖2-5 (e)圓柱型DR之HEM11δ mode電場分佈圖 (f)圓柱型DR之HEM11δ mode磁場分佈圖．．．．．．．．．．56 圖2-5 (g)圓柱型DR之HEM11δ mode電場分佈圖(ψ=0) (h)圓柱型DR之HEM11δ mode磁場分佈圖(ψ=π/2)．．．57 圖2-6 不同共振模式下，傳輸總功率分佈在空氣中與分佈在介電共振器內之功率比．．．．．．．．．．． 58 圖3-1 (a)微帶線之外觀圖 (b)微帶線之電場與磁場分佈圖．．．．．．．．．．．．．．．．．．．．． 59 圖3-2 微帶線Quais TEM模態電磁場分佈圖．．．． 60 圖3-3 三種濾波器的低通原型圖 (a) Butterworth 濾波器 b) Chebyshev 濾波器(c) Elliptic Function濾波器．．．．．．．．．．．．．．．．．．．．．． 61 圖3-4 （a）Dual-Mode Circular Ring Resonator（b）Dual -Mode Meander Loop Resonator（c）Dual-Mode Circular Disk Resonator（d）Dual-Mode Square Patch Resonator．．．．．．．．．．．．．．．．62 圖3-5 The Characteristics of mode splitting （Meander Loop）．．．．．．．．．．．．．．． 63 圖3-6 （a）三角共振器原型（b）三角共振器座標轉變圖．．．．．．．．．．．．．．．．．．．．．． 64 圖3-7 三角共振器mode1及mode2的電場分佈圖．．．65 圖3-8 三角共振器mode1及mode2的電流分佈圖．．．65 圖3-9 二階三角濾波器．．．．．．．．．．．．．66 圖3-10 N-poles三角共振濾波器等效電路模型．．．66 圖3-11 三角共振器split-mode frequencies與self-resonant frequencies模擬圖．．．．．．．．．． 67 圖3-12 2-poles 三角共振濾波器等效電路圖．．． 68 圖3-13 4-poles 三角共振濾波器等效電路圖．．． 68 圖4-1 實驗流程圖．．．．．．．．．．．．．．．69 圖4-2 煆燒昇溫曲線圖．．．．．．．．．．．．．70 圖4-3 去黏劑及燒結昇溫曲線圖．．．．．．．．．70 圖4-4 Courtney hold基本架構．．．．．．．．． 71 圖4-5 量測用模具組．．．．．．．．．．．．．．71 圖4-6 介電共振器量測儀器圖．．．．．．．．．．72 圖4-7 介電常數及品質因素測量系統圖．．．．．．72 圖4-8 濾波器之電路佈局．．．．．．．．．．．．73 圖4-9 Al2O3基板濾波器實做圖．．．．．．．．． 73 圖4-10 NdAlO3+0.25wt%ZnO基板濾波器實做圖．．．74 圖4-11 FR4基板濾波器實作圖．．．．．．．．．．74 圖5-1 (x)NdAlO3+(1-x)SrTiO3不同比例之介電常數與燒結溫度關係圖．．．．．．．．．．．．．．．． 75 圖5-2 (x)NdAlO3+(1-x)SrTiO3不同比例之密度與燒結溫度關係圖．．．．．．．．．．．．．．．．．． 76 圖5-3 (x)NdAlO3+(1-x)SrTiO3不同比例之Q*f值與燒結溫度關係圖．．．．．．．．．．．．．．．．．． 77 圖5-4 (x)NdAlO3+(1-x)SrTiO3不同比例之τf值與燒結溫度關係圖．．．．．．．．．．．．．．．．．． 78 圖5-5 0.7NdAlO3 – 0.3SrTiO3在不同溫度的XRD繞射圖．．．．．．．．．．．．．．．．．．．．．． 79 圖5-6 0.6NdAlO3 – 0.4SrTiO3在不同溫度的XRD繞射圖．．．．．．．．．．．．．．．．．．．．．． 79 圖5-7 0.5NdAlO3 – 0.5SrTiO3在不同溫度的XRD繞射圖．．．．．．．．．．．．．．．．．．．．．． 80 圖5-8 0.45NdAlO3 – 0.55SrTiO3在不同溫度的XRD繞射圖．．．．．．．．．．．．．．．．．．．．． 80 圖5-9 0.4NdAlO3 – 0.6SrTiO3在不同溫度的XRD繞射圖．．．．．．．．．．．．．．．．．．．．．． 81 圖5-10 (x)NdAlO3 - (1-x)SrTiO3在1520℃下各比例之XRD圖．．．．．．．．．．．．．．．．．．．．．81 圖5-11 0.7NdAlO3 – 0.3SrTiO3在不同溫度下的SEM圖．．．．．．．．．．．．．．．．．．．．．． 82 圖5-12 0.6NdAlO3 – 0.4SrTiO3在不同溫度下的SEM圖．．．．．．．．．．．．．．．．．．．．．． 83 圖5-13 0.5NdAlO3 – 0.5SrTiO3在不同溫度下的SEM圖．．．．．．．．．．．．．．．．．．．．．． 84 圖5-14 0.45NdAlO3 – 0.55SrTiO3在不同溫度下的SEM圖．．．．．．．．．．．．．．．．．．．．．． 85 圖5-15 0.4NdAlO3 – 0.6SrTiO3在不同溫度下的SEM圖．．．．．．．．．．．．．．．．．．．．．． 86 圖5-16 NdAlO3摻雜0.25wt%，0.5wt%，1wt%ZnO之介電係數與不同燒結溫度之關係．．．．．．．．．．． 87 圖5-17 NdAlO3摻雜0.25wt%，0.5wt%，1wt%ZnO之密度與不同燒結溫度之關係圖．．．．．．．．．．．． 88 圖5-18 NdAlO3摻雜0.25wt%，0.5wt%，1wt%ZnO之Q*f值與不同燒結溫度之關係圖．．．．．．．．．．．． 89 圖5-19 NdAlO3摻雜0.25wt%，0.5wt%，1wt%ZnO之頻率溫度漂移係數與不同燒結溫度之關係圖．．．．．． 90 圖5-20 NdAlO3+0.25wt%ZnO在不同溫度的XRD繞射圖 91 圖5-21 NdAlO3+0.5wt%ZnO在不同溫度的XRD繞射圖．91 圖5-22 NdAlO3+1wt%ZnO在不同溫度的XRD繞射圖．．92 圖5-23 NdAlO3+0.25wt%ZnO在不同溫度的SEM圖．． 93 圖5-24 NdAlO3+0.5wt%ZnO在不同溫度的SEM圖．．．94 圖5-25 NdAlO3+1wt%ZnO在不同溫度的SEM圖．．．．95 圖5-26 IE3D模擬之FR4基板頻率響應圖．．．．．．96 圖5-27 FR4基板實際量測圖．．．．．．．．．．．97 圖5-28 IE3D模擬之Al2O3基板頻率響應圖．．．．．98 圖5-29 Al2O3基板實際量測圖．．．．．．．．．．99 圖5-28 IE3D模擬之自製基板頻率響應圖．．．．．100 圖5-31 自製基板實際量測圖．．．．．．．．．．101

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