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研究生：	黃思銘 Huang, Sz-Ming
論文名稱：	以固態法合成無鉛壓電材料(Na0.52K0.4425Li0.0375)(Nb0.8925Ta0.0375Sb0.07)O3應用於壓電加速規與織構化陶瓷之研究 The synthesis of (Na0.52K0.4425Li0.0375)(Nb0.8925Ta0.0375Sb0.07)O3 lead free ceramics using conventional and template-assist method for piezoelectric accelerometer applications
指導教授：	朱聖緣 Chu, Sheng-Yuan
學位類別：	碩士 Master
系所名稱：	電機資訊學院 - 電機工程學系 Department of Electrical Engineering
論文出版年：	2017
畢業學年度：	105
語文別：	中文
論文頁數：	80
中文關鍵詞：	壓電特性、無鉛陶瓷、加速規、模板晶粒成長法、織構化陶瓷
外文關鍵詞：	Piezoelectric, Lead-free, Accelerometer, TGG, Texture
相關次數：	點閱：64 下載：8
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本研究目的在於以無鉛壓電材料製備兩種形式的壓電加速規，分別為壓縮式和鈸型兩種型態；以及透過模板晶粒成長法(TGG)進行織構化陶瓷的製備。
壓電加速規實驗主要透過靈敏度與線性度及頻寬的分析，探討材料特性以及結構差異對加速規性能的影響；織構化陶瓷實驗部分主要探討改變模板參雜量對於材料特性之影響，利用XRD與TOPAS軟體進行相分析，得到晶格取向度以及相組成比例，並透過SEM拍攝材料顯微結構，確認模板能促進晶格成長。
從本實驗中得到以下的重要結果: (一) 壓電加速規靈敏度受材料d33影響最大。
(二) 鈸型加速規擁有較高的靈敏度，使用頻率範圍較窄；環形壓縮式加速規靈敏度較低但使用頻寬較高。(三) 無鉛壓電加速規能實際應用於馬達震動。(四)模板摻雜量於5 %時，有較佳的材料密度與最高的織構取向度，擁有有較佳的電特性。

SUMMARY
Lead-free piezoelectric (Na0.52K0.4425Li0.0375)(Nb0.8925Ta0.0375Sb0.07)O3 (NKLNTS) ceramics were synthesized by conventional mixed oxide method. The ceramics which had an electromechanical coupling factors kp = 45.06% and a piezoelectric constant d33 = 300pC/N were used to fabricate piezoelectric accelerometer and textured study. Two types of piezoelectric accelerometers, assembled with NKLNTS piezoelectric elements, were examined their sensitivity, linearity, frequency range and compared with the PZT ceramic accelerometer in same structures. Textured ceramics were synthesized by template grain growth (TGG). The main propose of this study is to fabricate piezoelectric accelerometer

Keyword: Piezoelectric, Lead-free ceramics, Accelerometer, TGG ,Texture

中文摘要                                 I
Extend Abstratct                        II
致謝                                    VII
表目錄                                  XII
圖目錄                                  XIII
第一章 緒論	                        1
1.1前言	                                1
1-2 研究背景與文獻回顧	                3
1-2-1 無鉛壓電材料研究背景	        3
1-2-2 織構化陶瓷的研究背景	        5
1-2-3 加速規的研究背景及用途	        6
第二章 基礎理論與文獻回顧	                11
2-1壓電材料	                        11
2-1-1 正壓電效應	                        11
2-1-2 逆壓電效應	                        12
2-1-3 壓電單晶體	                        12
2-1-4 壓電多晶體	                        13
2-1-5 壓電複合材料	                13
2-2 壓電特性參數	                        14
2-2-1 機電耦合係數	                14
2-2-2 機械品質因數	                15
2-2-3 壓電方程式	                        16
2-2-4 壓電操作方向模式	                18
2-3 壓電晶域結構	                        19
2-3-1 晶體壓電之根源	                19
2-3-2 容忍因子	                        21
2-3-3 晶格與晶系	                        22
2-4 介電理論	                        23
2-4-1 介電原理	                        23
2-4-2 介電損耗	                        25
2-5 織構化陶瓷TEXTURED	                26
2-5-1 局部化學晶轉化法(Topochemical micro-crystalline conversion)	                        26
2-5-2 模板晶粒成長法(Template Grain Growth)	28
2-6 壓電式加速規PIEZOELECTRIC ACCELEROMETER	30
2-6-1 壓電加速規基本原理介紹	                30
2-6-2 單軸式壓電加速規結構-環形壓縮式	        31
2-7-3 單軸式壓電加速規結構-鈸型壓縮式	        32
第三章 實驗流程與量測	                        34
3-1 壓電陶瓷體的製作	                        34
3-1-1陶瓷粉末的製備	                        34
3-1-2 陶瓷體的製造	                        35
3-3 壓電加速規製作	                        37
3-2 織構化陶瓷體製作	                        38
3-2-1 NaNbO3模板製作	                        38
3-2-1流沿法製程	                                38
3-4 壓電陶瓷體的量測與分析儀器	                39
3-4-1 密度	                                39
3-4-2 SEM	                                40
3-4-3 XRD	                                40
3-4-4 電性量測	                                41
3-5 壓電加速規的量測	                        42
第四章 實驗結果與討論	                        44
4-1 壓電加速規量測	                        44
4-1-1 材料的參數	                                45
4-1-2 環形壓縮式加速規-靈敏度量測	                45
4-1-3 環形壓縮式加速規-工作頻率範圍	        47
4-1-3環形壓縮式加速規-線性度量測	                52
4-2 鈸型壓電加速規量測	                        58
4-2-1 鈸型壓電加速規-靈敏度量測	                58
4-2-2 鈸型壓電加速規-工作頻率範圍	                59
4-2-3 鈸型壓電加速規-線性度量測	                61
4-2-3 鈸型壓電加速規-noise量測	                62
4-3 壓電加速規文獻比較	                        64
4-4 壓電加速規應用於機械量測	                65
4-5 無鉛織構化陶瓷	                        66
4-5-1  XRD、SEM -前驅物Bi2.5Na3.5Nb5O18	        66
4-3-2  XRD、SEM -模板NaNbO3	                68
4-3-3  SEM-改變NaNbO3模板摻雜量	                69
4-3-4  XRD-改變NaNbO3模板摻雜量	                71
4-3-4  介電量測-改變NaNbO3模板摻雜量	        72
4-3-5  電特性	                                73
第五章 結論與未來展望	                        75
5-1 結論	                                75
5-2 未來展望	                                76
參考文獻	                                        77



                                    

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校內：2020-07-01公開
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