本論文研製之94-GHz毫米波天線晶片皆採用台灣半導體研究中心所提供的AFSC GIPD製程。94-GHz GIPD線性漸進式格柵開槽天線與Balun帶通濾波器之毫米波整合晶片，將漸進線性式開槽天線邊緣做矩形格柵，此結構可降低天線輻射場型的旁波束，使得天線往前輻射的效果更為明顯，再和巴倫帶通濾波器做整合，將三種被動電路(天線、巴倫器、帶通濾波器)整合在同一晶片中，減少RF接收機前端電路面積；94-GHz GIPD準八木對數週期偶極子陣列與Balun帶通濾波器之毫米波整合晶片，加入八木天線(Yagi-antenna)之設計理念，輻射體以三階對數偶極子天線陣列實現，並分別在輻射體之前後端加入引向器和反射器，增強指向性，構成準八木天線，再和巴倫帶通濾波器做整合；94-GHz GIPD帶通濾波Yagi天線，以一段λ/4開路傳輸線和另一段λ/4短路傳輸線耦合和λ/4天線輻射體做整合形成一個二階帶通濾波器，並在輻射體前端加入引向器、後端加入反射器構成八木天線架構，整合天線晶片具有帶通濾波之響應，可在天線輻射之功率增益觀察到通帶兩側具有兩個傳輸零點。模擬數據顯示本論文研製之三種純天線架構之輻射效率皆在79%以上，整合巴倫帶通濾波器後皆在40%以上。製作之天線晶片皆以平面式佈局，減少元件不良率。考量量測時採用on-wafer方式進行測試，本論文研製之天線晶片皆採用共平面波導方式饋入訊號。

This thesis presents the research on 94-GHz millimeter wave (MMW) on-chip antennas, which are fabricated on glass-integrated-passive-device (GIPD) technology. The process is provided by Taiwan Semiconductor Research Institute (TSRI). In 94-GHz GIPD on-chip linear grating taper slot antenna with integrated balun-bandpass filter design, LTSA uses the corrugation structure to reduce the sidelobe pattern. The structure will add rectangular gratings at two sides of LTSA. This work combined three passive components (antenna, balun, bandpass filter) on a single chip, so that it can reduce the circuit size of RF-receiver. In 94-GHz GIPD on-chip quasi- Yagi log-periodic dipole array antenna with integrated balun-bandpass filter design, the driver of quasi-Yagi antenna used the three-order log-periodic dipole array antenna (LPDA). The director and reflector are added in the front and back of the antenna respectively, it can increase the antenna power gain and forming quasi-Yagi antenna structure. This work also combined with balun-bandpass filter. In 94-GHz GIPD bandpass-filtering Yagi-antenna design, a bandpass filter is formed by an open-stub λ/4 microstrip resonator and a short-end λ/4 microstrip resonator. Then, the second-order filter combines with a λ/4 antenna radiator and λ/4 microstrip resonator. Also, this work adds director and reflector in front and back of the antenna respectively. The integration on-chip antenna has filtering response feature, it can be observed that two extra transmission zeros appear at two sides of the center frequency to form a multi-function on-chip antenna.

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