本文主要在設計一搭配壓電次系統之刀具載台，並整合現有次微米微動線性平台及旋轉平台組成的桌上型工具機，利用壓電驅動產生二維振動創造出一無須旋轉主軸之類銑削的加工方式，並針對Cu-2600 H04、Al-6061 T6及POM三種材料進行振動切削加工實驗並對加工結果做初步的探討與分析。
　　在針對現有之桌上型工具機及壓電驅動刀具載台進行動態系統識別後，利用PID控制來改善利用壓電驅動之刀具路徑精度及頻寬，並探討在不同的振動頻率及振幅下之系統特性。最後配合刀具軌跡模式的建立進行切削實驗，比較在不同的頻率、切深變化量、進給下工件表面粗糙度及波紋幾何特徵，並討論加工參數對振動切削的影響。

　　This thesis is to design a piezo-driven tool stage integrated with present sub-micro linear motor stages and rotary stage. A new machining mechanism with no rotary spindle and 2D piezo-driven “pseudo-milling” was presented. Then, the machining phenomenon of Cu-2600 H04, Al-6061 T6 and POM in pseudo-milling process were analyzed and discussed.
　　Based on the dynamic system identification of the present machine tool and the piezo-driven tool stage, the piezo-driven cutting tool path and the system bandwidth were improved by PID control. Then, the full system characteristic was found and conferred with different input voltage frequency and amplitude in the experiment. Finally, the results of the cutting experiment showed the influences of various cutting parameters such as input voltage frequency, cutting depth or feed to the surface roughness and surface geometry.

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