奈米壓痕是最近發展出的技術，一種量測薄膜的機械性質的新方法。當薄膜厚度愈來愈薄之時，微硬度試驗實驗上有它的缺陷，因此奈米壓痕技術隨即受到注目。其利用負載與壓痕深度的關係圖，來求得薄膜的機械性質，本研究還施以動態負載的方式，希望藉由動態負載對複合試片的產生疲勞破壞，來建構奈米級的疲勞破壞理論。
而本研究探討疲勞破壞，期望能提出有效方式預測材料之疲勞破壞，由計算複合材料受到動態負載時產生之變形能深入，即為試件抵抗彈性變形(可回復)與塑性變形(不可回復)的能量表現。無論何種材料其實皆有其可接受程度的變形，一旦超越可接受程度的變形，便產生破壞或斷裂。由此可考慮材料的變形能實有個固定上限，當單位體積內產生的變形能一旦突破上限，薄膜便可能會產生破裂，此值我們以破壞變形能（Wc）來表示。但影響材料破壞之因素太多，所以本研究利用能量區間來判斷破壞變形能量之範圍。由實驗數據配合理論得證無論操作條件如何變動，破壞變形能（Wc）始終包含在固定之能量區間，如此便能有效判斷材料發生破壞的可能性。且破壞變形能（Wc）為塑性變形能（Wp）和彈性變形能（Wc）之和，當平均負載較低，即塑性變形能較低，如此材料欲破裂，需由動態加載來滿足變形能，即彈性變形能（Wc）。

Mechanical properties of nanoscale structures are needed to design reliable micro/nanoelectromechanical systems (MEMS/NEMS). Most material properties are known to be size-dependent and such properties of the nanoscale structures have not been well characterized. Load cycles used in continuous stiffness measurement were not used to perform fatigue tests. The contact stiffness was monitored continuously throughout the fatigue test, but the contact stiffness can’t use to larger amplitude of oscillating. Cleavage steps were found on the fatigue fracture surface. The dynamic nanoindentation fatigue test used in this study can be satisfactorily used to evaluate the fatigue behavior of nanoscale structures for use in MEMS/NEMS.
Deformation energy that can’t endure. The maximum deformation energy is the sum of plastic deformation energy and elastic deformation energy .Energy-based conditions on the inelastic surface deformation of brittle materials are conduced. The hysteresis loop energy which is dissipated during the indentation loading-unloading cycle is related to the true hardness . And we try to use hysteresis loop energy to evaluate the film fracture of fatigue.

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