本研究是利用鑽石結構高聲波波速以及具有高品質因素的特性，並設
計鑽石和壓電材料(Piezoelectric Material)的複合結構，分別以不同的壓電材料氮化鋁(AlN)和氧化鋅(ZnO)做分析以及比較。首先先設計文獻上的結構確認此分析方式的可行性，之後分別設計由450MHz 以及1.5GHz 以上中心頻率的共振器並且使用兩種不同的壓電材料作比較分析，接著改變設計的尺寸大小結構，共振驅動方式來作好壞的
評估，最後利用壓電材料施加額外直流偏壓會造成介電常數改變的特性以及週期性的結構來設計出可調頻共振器，並且分析了可調頻共振器的可調頻率範圍。

In this research, I use the characteristics of diamond structure which is with high velocity to design the structure of hybrid diamond-piezoelectric material. In addition, I make the comparison of different piezoelectric materials, ZnO and AlN. First, I design a structure witch is the same as the reference structure in order to make sure of the feasibility of my simulation method. After this, design the resonance frequency over 450MHz and 1.5GHz and make the analysis and comparison of differenct piezoelectric materials. Then I try to change the dimension of the structrue and the driving method to estimate advantages and disadvantages. Finally, I use periodic structrue and the characteristics of piezoelectric material which changes the dielectric constant when sufferes DC bias through the material to d`esign tunable resonators. Furthermore, I analyze the tunable range of tunable resonators.

[1] Rayleigh, J.W.S.: On waves propagated along the plane surface of an elastic solid, Proceedings of the London Mathematical Society, Vol. 17, No. 1, pp.4-11, 1885.
[2] White and F. Voltmer, Direct piezoelectric coupling to surface acoustic waves, Applied Physics. Letters 7 (1965), pp. 314–316.
[3] S. T. Lee, et al., "CVD diamond films: nucleation and growth," Materials Science & Engineering R-Reports, vol. 25, pp. 123-154, Jul 30 1999.
[4] J. C. Angus, "Diamond and Diamond-Like Films," Thin Solid Films, vol.216, pp. 126-133, Aug 28 1992.
[5] M. N. Yoder, Synthetic Diamond: Emerging CVD Science and Technology:John Wiley & Son, 1993.
[6] Y. Gurbuz, et al., "Diamond semiconductor technology for RF device applications," Solid-State Electronics, vol. 49, pp. 1055-1070, Jul 2005.
[7] O.A. Williams, et.al, “High Young’s modulus in ultra thin nanocrystalline diamond” Chemical Physics Letters 495 (2010) 84–89
[8] R. Tabrizian, M. Rais-Zadeh, F. Ayazi, "Effect of phonon interactions on limiting the f.Q product of micromechanical resonators," Transducers 2009,
2131-2134 (2009).
[9] Chennupati Jagadish and Stephen Pearton “Zinc Oxide Bulk, Thin Films and Nanostructures - Processing, Properties, and Applications” (2006)
[10] Eliseo Ruiz, Santiago Alvarez and Pere Alemany” Electronic structure and properties of AIN”, PHYSICAL REVIW B V.49 7115-7123 (1994)
[11] Jose A. Garrido, ” Piezoelectric Biochemical Sensors Piezoelectricity Mechanical” Walter Schottky Institut-TUM (2011/2012)
[12] Kenji Uchino, “Ferroelectric Devices” Marcel Dekker Inc., New York,(2000)
[13] G. Piazza, P.J. Stephanou, A.P. Pisano, “One and two port piezoelectric higher order contour-mode MEMS resonators for mechanical signal processing”, Solid-State Electronics, vol. 51, pp. 1596–1608, 2007.
[14] Lord Rayleigh, "On waves propagating along the plane of an elastic solid”Proc. London Math. Soc. 17(1881)
[15] Ken-Ya Hashimoto , “Surface Acoustic Wave Devices in
Telecommunications: Modelling and Simulation” (2000)
[16] R. H. White and F. W. Voltmer： Appl. Phys. Lett., 17(1965)314.
[17] M. Rinaldi, C. Zuniga, C. Zuo and G. Piazza, “Super-High-Frequency Two-Port AlN Contour-Mode Resonators for RF Applications”, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 57,
n.1, pp. 38, January 2010
[18] M. Rinaldi, C. Zuniga, and G. Piazza, “5-10 GHz AlN Contour-Mode
Nanoelectromechanical Resonators” 2nd IEEE International conference on Micro Electro Mechanical Systems (MEMS 2009), pp.916-919, Jan 2009.
[19] Yoshio SATOH, Tokihiro NISHIHARA, Tsuyoshi YOKOYAMA,
Masanori UEDA and Tsutomu MIYASHITA, ” Development of Piezoelectric Thin Film Resonator and Its Impact on Future Wireless Communication
Systems”, Japanese Journal of Applied Physics Vol. 44, No. 5A, pp.2883–2894(2005)
[20] Gianluca Piazza, Albert P. Pisano, ” Two-port stacked piezoelectric aluminum nitride contour-mode resonant MEMS”, Sensors and Actuators A 136 (2007) 638–645
[21] I. L. Guy, S. Muensit, and E. M. Goldys, ” Extensional piezoelectric coefficients of gallium nitride and aluminum nitride”, APPLIED PHYSICS LETTERS VOLUME 75, NUMBER 26 27 DECEMBER 1999
[22] K. Tonisch, V. Cimalla, Ch. Foerster, H. Romanus, O. Ambacher, D.Dontsov, “Piezoelectric properties of polycrystalline AlN thin films for MEMS application”, Sensors and Actuators A 132 (2006) 658–663
[23] Ryan Christopher Norris, ” Two-Dimensional Phononic Crystal Simulation and Analysis”, A thesis presented to the University of Waterloo in fulfilment of the thesis requirement for the degree of Master of Applied Science in Electrical and Computer Engineering Waterloo, Ontario, Canada, 2005
[24] R. Abdolvand, G.K. Ho, J. Butler, and F. Ayazi,
“ZnO-On-Nanocrystalline Diamond Lateral Bulk Acoustic Resonators”, Proc. 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007), Kobe, Japan, Jan. 2007, pp. 795-798.
[25]Mattew W. Hooker, “Properties of PZT-Based Piezoelectric Ceramics Between -150 and 250℃”, Lockheed Martin Engineering & Sciences Co.,Hampton, Virginia (1998)
[26] Mourad Oudich, and M. Badreddine Assouar, ” Surface acoustic wave band gaps in a diamond-based two-dimensional locally resonant phononic crystal for high frequency applications”, JOURNAL OF APPLIED PHYSICS 111, 014504 (2012)