本論文的主要研究目的在於設計與製造壓電平台，並且著重於達成壓電平台的精密定位。由於非線性磁滯現象存在於壓電致動器中，因而造成了壓電平台的定位誤差。除此之外，由於震動現象的影響，使得高頻的精密定位產生定位誤差。因此，本論文將利用基於Preisach模型的前饋控制(feedforward control based on Preisach model)去補償非線性磁滯現象，此外，H∞控制以及最佳化前饋控制(optimal inversion based feedforward control)將被實現於改善振動現象。實驗結果證明，經由H控制、最佳化前饋控制以及基於Preisach模型的前饋控制將能有效的提高壓電平台的定位效能並且達成精密定位。

The purpose of this thesis is to design and manufacture piezo-stage, additionally, this thesis focus on control the piezo-stage such that can be achieved precision positioning. Positioning error in piezo-stage occurs due to the hysteresis effect of piezo actuator, and the vibration effect especially when the stage is operated at high frequency. Therefore, in this thesis, the feedforward control based on Preisach model was used to compensate for hysteresis effect. Moreover, H∞ control and the optimal inversion based feedforward control were implemented to compensate for vibration effect. Experiment results showed that, the proposed control method can improve the tracking performance and achieve precision positioning.

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