本研究採用非平衡磁控濺鍍在高速鋼以及矽晶片上濺鍍含鈦金屬之碳氮鍍膜，並探討鍍層的機械性質、磨潤性質、耐腐蝕性以及車削與鑽削等應用層面。
實驗主要分為兩個階段：第一階段為在相同濺鍍參數下探討不同靶材位置配置對鍍層的影響；第二階段為添加不同比例鈦金屬於碳氮鍍層中，以分析不同鈦含量對碳氮鍍層的影響，最後將第二階段磨潤性質最佳之鍍層濺鍍於捨棄式車刀刀片以及微鑽針上，並進行乾車削以及鑽削印刷電路板實驗，以評估其在工業上的應用表現。
實驗結果所得到一系列含鈦之碳氮鍍膜，其鈦含量介於0~24%之間，硬度則在12.9~15.6GPa之間，其中可以發現隨著鈦含量增加至14%以後開始產生柱狀晶結構，但鍍層的附著性也逐漸下降，其中含鈦量7.5%的鍍層(CN-Ti-1.0A)在重負荷(1000g)條件下有最低的摩擦係數以及磨耗率，分別為0.13及0.15(10-6 mm3/Nm)，抗磨耗性優於純碳氮鍍層，並將此鍍層濺鍍於車刀以及鑽針上，在車刀部分，負切邊角條件下能有效降低刀腹磨耗達35%，而正切邊角則降低27%，在微鑽針(ψ=0.02mm)部份，刀腹及刀角磨耗量可減少達24.5%以及28%，此外所有鍍層在電化學實驗中，其耐蝕性皆較原材明顯提升。

This thesis studies the mechanical and tribological properties of Titanium-doped carbon nitride coating deposited by unbalanced DC magnetron sputtering using nitrogen-argon mixture gas and graphite as carbon source. In this study, Ti-doped carbon nitride coating are deposited on HSS and Si wafer with different target configuration and current of Ti target. This investigate has two stages, first we change the configuration of target position, second we change the current of Ti target (0~2.0A).
We get a series of Ti-doped carbon nitride coatings which contain 0~24% Titanium and have 12.9~15.6GPa hardness. The results show that the indentation adhesion decreases with increasing titanium. The coatings of 7% Titanium content (CN-Ti-1.0A) showed the lowest friction coefficient (0.13) and wear rate (0.15 10-6mm3/Nm) in pin-on-disk test (Load=1000g). These result significantly better than pure carbon nitrogen coating. In addition, we choose the best anti-wear performance of the samples (CN-Ti-1.0A) to do the turning cutting test and the micron-drilling test. In the turning cutting test section, under the conditions of the negative tool cutting edge angle condition, the coatings of 7% Titanium content reduced 35% flank wear of turning inserts. In the drilling(ψ=0.02mm) test, this coating reduced 24.5% flank wear and 28% corner wear of micro-drillers. Besides, all of coatings (CN-Ti) have obvious promotion of corrosion resistance.

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