本篇論文利用電子束蒸鍍法製備氧化鎳薄膜，並利用三電極系統探討氧化鎳薄膜於濃度0.1M過氯酸鋰-碳酸丙烯之中的電致色變性質。實驗中藉由工作功率的改變(100~360 watt)與蒸鍍厚度的不同來討論薄膜其化學成分、結晶方向、微結構、表面形貌等對於電致色變性質的影響。

實驗結果發現，隨著工作功率的增加，薄膜的結晶優選方向會由(200)轉變為(111)，這會使得微結構分析中有明顯的四面體島狀結構出現。另外，表面形貌粗糙度也跟著提昇，且過高蒸鍍功率會造成薄膜均勻度變差。ESCA分析中也得到初鍍膜其化學環境都是非計量比的狀態，由晶格常數的計算後得知此現象乃是鎳空缺所致，Ni+3的比例隨功率增加而上升，因此加深初鍍膜的顏色。
本實驗中最佳參數A55具有最高相對比例的(111)結晶方向，薄膜呈現四面體島狀型態且均勻性一致的形貌，晶粒大小是奈米尺寸(20nm)，有最多鎳空缺等特性，這些原因皆造成其擁有最佳的電致色變性質。它的表現(1)著去色穿透度變化44%，(2)著色效率Coloration Efficiency (CE)= 34.15㎝2/C，(3)經過800次去著色循環還未退化。

薄膜厚度不會影響結晶型態，化學環境等，只從微結構上發現表面顆粒大小會隨厚度而變大，實驗結果170nm其CE=53.1 (㎝2/C)，540nm其CE=32.4 (㎝2/C)，較薄的膜對於電量轉換成變色效率有較佳的運用，應該是因為表面形貌晶界較多所導致。可見電致變色性質當中，形貌的影響大於厚度吸收率造成的影響。不過薄的膜雖然CE值大，但循環壽命不佳，易損毀。

In this study, electrochromic nickel oxide films were initially deposited by electron beam evaporation method. In the second step of analysis, electrochemical properties were activated by using a three-electrode cell system with a 0.1M solution of lithium perchlorate in propylene carbonate. The variations in electrochromic properties of NiOx films, as a function of electron beam working power(100~360 watt) together with film thickness were determined from chemical composition, crystal structure, and surface morphology.

XRD characterizations indicated that lower electron beam working power (EBWP) led to deposition of films with (200) orientation, while EBWP values exceeding 160 watt, led to (111) oriented films. The later films exhibited enhanced electrochromic behavior, while their surface morphology(SEM) showed incipient tetrahedral island structures. Furthermore, the surface roughness(AFM) increased with enhancement in deposition rate. ESCA analysis of the as-deposited NiOx films revealed their nonstoichiometric feature with Ni+2 and Ni+3 ions, due to the presence of large number of Ni vacancies. The transmittances of the as-deposited NiOx films decreased with increasing EBWP. Thus enhancement was attributed to Ni+3.

Sample A55 were found to possess the best electrochromic properties via: (1)maximum transmittance differences upon 44%, (2)CE=34.15㎝2/C,(3) non obvious degradations even after cycling 800 times. These optimum performances are attributed to the following characteristics: (a) highest ratio of (111) plane orientation (b) surface is very uniform with tetrahedral islands (c) nanocrystalline grain.

Crystallography, chemical environment were found to be invariant with film thickness. However, the size of surface particles increased gradually with thickness, which effected on the CE value, wherein a 170nm film had CE=53.1(C/㎝2), while a thicker 540nm film had a lower CE value of 32.4(C/㎝2).Furthermore, the thinner films possessed better efficiency than the thicker films; attributed to a higher density of grain boundaries thus facilitating the double intercalation of Li+1 ions as well as electrons. Although the thinner NiOx films possess excellent electrochromic properties; their performance is deteriorated after subjection to 800-cycling tests.

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