在本研究論文中，我們以奈米壓印、反應離子蝕刻(RIE)、感應耦合電漿離子蝕刻(ICP-RIE)、電子束蒸鍍等等技術，製作出金與二氧化鈦複合的各向異性手性奈米結構，並分析在各個步驟中所使用的製程參數與製作過程中碰到的各種問題。數值模擬的部分，除了以嚴格耦合波分析法(RCWA)模擬製程上金厚度與二氧化鈦厚度誤差對頻譜的影響，還模擬了不同環境折射率、不同偏振方向入射手性奈米結構時，對於圓二色性頻譜的影響。在圓二色性頻譜量測的部分，我們使用實驗室原有的史托克參數(Stokes parameters)量測方法與多數文獻以右圓偏振與左圓偏振穿透率計算的量測方法，並比較兩種量測方法在物理意義上的差異，並以這兩種量測方法進行手性檢測。在手性檢測的部分，我們測試的手性分子為色胺酸，先是以自行架設的旋光儀確認色胺酸於手性奈米結構產生圓二色性的波段無圓二色性訊號後，我們成功以右圓偏振與左圓偏振穿透率計算的量測方法，證實手性奈米結構能夠藉由侷域表面電漿產生的近場手性增益，增強手性分子的圓二色訊號，達到手性檢測的目的。

We use dry etching method to fabricate the metasurfaces, composed of gold and titania, and discuss the fabrication parameters of every manufacture steps. To improve the yield rates, we also find out the reason of the large defects from the previous fabrication recipe in our group, and successfully improve yield rates from less than ten percentage to around seventy percentage. The metasurfaces following the fabrication steps will be robust enough to endure several times of cleaning by flowing deionized water. According to the structural parameters of the metasurfaces we made, we use rigorous coupled wave analysis (RCWA) method to simulate the optical properties of metasurfaces. For the purposes of chirality detection of chiral molecules, we emphasized on the special optical phenomenon which is called circular dichroism (CD). While the linearly polarized light, which can be express as the superposition of left circularly polarized light (LCPL) and right circularly polarized light (RCPL), interact with the chiral materials, the difference between absorption of LCPL and RCPL will cause the transmitted light cannot be still linearly but elliptically polarized light. Comparing with the CD spectrum before and after adsorbing chiral molecules, we successfully evidence the nearfield optical chirality enhancement of metasurfaces would enhance the chirality of chiral molecules, let us distinguish different chirality of molecules from each other in the wavelength ranges out of electronic and vibrational circular dichroism regions.

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