| 研究生: |
石立中 Shih, Li-Chung |
|---|---|
| 論文名稱: |
金奈米粒子修飾氧化鋅錫電晶體光感測與多重組態記憶特性 Au Nanoparticles Modified Zinc Tin Oxide Transistor for Photo-Sensing and Multilevel Memory |
| 指導教授: |
陳貞夙
Chen, Jen-Sue |
| 學位類別: |
碩士 Master |
| 系所名稱: |
工學院 - 材料科學及工程學系 Department of Materials Science and Engineering |
| 論文出版年: | 2021 |
| 畢業學年度: | 109 |
| 語文別: | 中文 |
| 論文頁數: | 100 |
| 中文關鍵詞: | 場效光電晶體 、光感測器 、光記憶體 、多重組態 、表面電漿共振 、金奈米粒子 |
| 外文關鍵詞: | thin film transistor, photosensing, photomemory, localized surface plasmon resonance, gold nanoparticle |
| 相關次數: | 點閱:195 下載:0 |
| 分享至: |
| 查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報 |
為增加網路頻寬與速度,光訊號的偵測以及編碼能力,已成為下一世代通訊與運算元件之核心技術。本研究以溶液法製備鋅錫氧化物(Zinc Tin Oxide,簡稱ZTO)薄膜作為電晶體通道層,選用可見光雷射光(405、520以及635奈米)來激發ZTO內部的中性氧空缺,使其離子化為帶正電氧空缺(V_O^(2+)),並伴隨著光電子產生,造成光響應電流。由於激發ZTO的中性氧空缺需要UV光或是波長小於400 奈米之可見光,為增加ZTO可反應的可見光波段,本研究在ZTO通道層底下埋入金奈米粒子,利用金奈米粒子吸收500奈米~600奈米區間的可見光,進而透過表面電漿共振效應產生熱電子,並導入ZTO通道,增加光響應電流。此外,也希望藉由金奈米粒子捕捉/釋放電子的效應,以達到記憶體的功能表現。
從紫外可見光吸收圖譜中可以發現,金奈米粒子在約520奈米波段確實有明顯的吸收峰,另透過FDTD模擬ZTO與金奈米粒子在520奈米光源照射下,產生的電場變化分佈,發現金奈米粒子表面周圍的ZTO具有較強的電場,藉此來證明金奈米粒子之表面電漿共振效應確實會影響ZTO之電場變化。此外,相較於金奈米粒子置於ZTO表面的結構,將金奈米粒子埋在ZTO底下,對於ZTO的電場變化影響是更加明顯。藉由量測電晶體ID-VG曲線,發現添加金奈米粒子元件因為表面電漿共振的作用,對於520奈米雷射光之光響應度可提高2.2倍。
另外,在照光(405、520以及635奈米)期間施加負閘極偏壓(VG= -40 V),可使原本被ZTO與SiO2介面缺陷所捕捉的電子被釋放出來,進而貢獻到光電流中,對於未添加金奈米粒子之元件,光響應度最大增幅四倍。透過照光期間施加閘極偏壓(VG= -40 V)的操作方式,可使金奈米粒子修飾氧化鋅錫電晶體之光響應度最大增幅達到13倍,其主要原因為帶正電氧空缺會受到負閘極偏壓的吸引,而聚集在ZTO與金奈米粒子之介面,藉此減小蕭特基能障的寬度,增加電子從金奈米粒子穿隧至ZTO之機率,造成光電流的改變。
為了進一步表現出元件之光記憶特性,本研究以“照光(405、520以及635奈米)期間施加閘極偏壓(VG= -40 V)”的方式當作寫入操作,寫入時間為一秒,以閘極偏壓VG= 0 V以及汲極偏壓VD= 10 V讀取寫入後的汲極電流值。透過上述的操作方式,三種照光波長的寫入條件皆可使添加金奈米粒子元件最少達到六個截然不同的組態,以及具有超過4000秒的電流持久度。反觀沒有添加金奈米粒子之元件,在如此短時間的寫入操作下,僅能對405奈米的光源產生光反應,而表現出多重汲極電流組態以及電流持久度,對於520奈米以及635奈米光源的光反應太過於微弱,難以有多重組態以及穩定的光電流。
In this study, we report a dual-functional hybrid device which can work as both a photo-sensing transistor and a photo-memory by embedding Au NPs in the zinc-tin oxide (ZTO) thin film transistor. Au NPs not only act as the charge trapping/detrapping layer but also the LSPR media which can transfer hot electrons to ZTO channel layer. The ZTO/Au NPs hybrid device shows a photoresponsivity ∼200 % higher than that of bare ZTO thin film transistor under 520 nm light illumination. Due to the effect of electron tunneling from Au NPs to ZTO, the photoresponsivity of ZTO/Au NPs hybrid device to 405, 520 and 635 nm light under the negative gate bias is further increased by >500, >300 and >1300 %, respectively.
Multilevel photo-memory performance is also demonstrated under repeated light and gate bias co-stimulation for 1 s, for at least 6 multiple memory states. The multilevel photo-memory performance of ZTO/Au NPs hybrid device is attributed to Au NPs which donate the hot electrons to ZTO during the co-stimulation. The excess electrons show a superb retention characteristic because there are not many recombination counterparts (i.e., charged oxygen vacancies (VO^(2+))) in the ZTO channel.
(1) Khan, L. U. Visible light communication: Applications, architecture, standardization and research challenges. Digital Commun. Networks 2017, 3, 78-88, DOI: 10.1016/j.dcan.2016.07.004.
(2) Haas, H.; Yin, L.; Wang, Y.; Chen, C. What is LiFi? J. Lightwave Technol. 2016, 34, 1533-1544, DOI: 10.1109/jlt.2015.2510021.
(3) Haas, H. LiFi is a paradigm-shifting 5G technology. Rev. Phys. 2018, 3, 26-31, DOI: 10.1016/j.revip.2017.10.001.
(4) Aldalbahi, A.; Rahaim, M.; Khreishah, A.; Ayyash, M.; Little, T. D. C. Visible Light Communication Module: An Open Source Extension to the ns3 Network Simulator With Real System Validation. IEEE Access 2017, 5, 22144-22158, DOI: 10.1109/access.2017.2759779.
(5) Chang, Y. H.; Ku, C. W.; Zhang, Y. H.; Wang, H. C.; Chen, J. Y. Ultrafast Responsive Non‐Volatile Flash Photomemory via Spatially Addressable Perovskite/Block Copolymer Composite Film. Adv. Funct. Mater. 2020, 30, 2000764, DOI: 10.1002/adfm.202000764.
(6) Vanheusden, K.; Warren, W. L.; Seager, C. H.; Tallant, D. R.; Voigt, J. A.; Gnade, B. E. Mechanisms behind green photoluminescence in ZnO phosphor powders. J. Appl. Phys. 1996, 79, 7983-7990, DOI: 10.1063/1.362349.
(7) Wang, J.; Wang, Z.; Huang, B.; Ma, Y.; Liu, Y.; Qin, X.; Zhang, X.; Dai, Y. Oxygen vacancy induced band-gap narrowing and enhanced visible light photocatalytic activity of ZnO. ACS Appl. Mater. Interfaces 2012, 4, 4024-4030, DOI: 0.1021/am300835p.
(8) Liu, P.-T.; Chou, Y.-T.; Teng, L.-F. Charge pumping method for photosensor application by using amorphous indium-zinc oxide thin film transistors. Appl. Phys. Lett. 2009, 94, 242101, DOI: 10.1063/1.3155507.
(9) Oba, F.; Togo, A.; Tanaka, I.; Paier, J.; Kresse, G. Defect energetics in ZnO: A hybrid Hartree-Fock density functional study. Phys. Rev. B 2008, 77, 245202, DOI: 10.1103/PhysRevB.77.245202.
(10) Thomas, S. R.; Pattanasattayavong, P.; Anthopoulos, T. D. Solution-processable metal oxide semiconductors for thin-film transistor applications. Chem. Soc. Rev. 2013, 42, 6910-6923, DOI: 10.1039/c3cs35402d.
(11) Park, S.; Kim, C.-H.; Lee, W.-J.; Sung, S.; Yoon, M.-H. Sol-gel metal oxide dielectrics for all-solution-processed electronics. Mat. Sci. Eng. R 2017, 114, 1-22, DOI: 10.1016/j.mser.2017.01.003.
(12) Zhang, N.; Han, C.; Fu, X.; Xu, Y.-J. Function-Oriented Engineering of Metal-Based Nanohybrids for Photoredox Catalysis: Exerting Plasmonic Effect and Beyond. Chem. 2018, 4, 1832-1861, DOI: 10.1016/j.chempr.2018.05.005.
(13) Yu, H.; Peng, Y.; Yang, Y.; Li, Z.-Y. Plasmon-enhanced light–matter interactions and applications. npj Comput. Mater. 2019, 5, 45, DOI: 10.1038/s41524-019-0184-1.
(14) Underwood, S.; Mulvaney, P. Effect of the Solution Refractive Index on the Color of Gold Colloids. Langmuir 1994, 10, 3427-3430, DOI: 10.1021/la00022a011.
(15) Link, S.; Mohamed, M. B.; El-Sayed, M. A. Simulation of the Optical Absorption Spectra of Gold Nanorods as a Function of Their Aspect Ratio and the Effect of the Medium Dielectric Constant. J. Phys. Chem. B 1999, 103, 3073-3077, DOI: 10.1021/jp990183f.
(16) García de Abajo, F. J. Nonlocal Effects in the Plasmons of Strongly Interacting Nanoparticles, Dimers, and Waveguides. J. Phys. Chem. C 2008, 112, 17983-17987, DOI: 10.1021/jp807345h.
(17) Xu, X.; Cortie, M. B. Shape Change and Color Gamut in Gold Nanorods, Dumbbells, and Dog Bones. Adv. Funct. Mater. 2006, 16, 2170-2176, DOI: 10.1002/adfm.200500878.
(18) Shokri Kojori, H.; Yun, J. H.; Paik, Y.; Kim, J.; Anderson, W. A.; Kim, S. J. Plasmon Field Effect Transistor for Plasmon to Electric Conversion and Amplification. Nano Lett. 2016, 16, 250-254, DOI: 10.1021/acs.nanolett.5b03625.
(19) Liu, Y.; Huang, W.; Chen, W.; Wang, X.; Guo, J.; Tian, H.; Zhang, H.; Wang, Y.; Yu, B.; Ren, T.-L.; Xu, J. Plasmon resonance enhanced WS2 photodetector with ultra-high sensitivity and stability. Appl. Surf. Sci. 2019, 481, 1127-1132, DOI: 10.1016/j.apsusc.2019.03.179.
(20) Shi, R.; Cao, Y.; Bao, Y.; Zhao, Y.; Waterhouse, G. I. N.; Fang, Z.; Wu, L. Z.; Tung, C. H.; Yin, Y.; Zhang, T. Self-Assembled Au/CdSe Nanocrystal Clusters for Plasmon- Mediated Photocatalytic Hydrogen Evolution. Adv. Mater. 2017, 29, 1700803, DOI: 10.1002/adma.201700803.
(21) Chand, N.; Houston, P. A.; Robson, P. N. Gain of a heterojunction bipolar phototransistor. IEEE Trans. Electron Devices 1985, 32, 622-627, DOI: 10.1109/T- ED.1985.21988.
(22) Ma, N.; Jena, D. Interband tunneling in two-dimensional crystal semiconductors. Appl. Phys. Lett. 2013, 102, 132102, DOI: 10.1063/1.4799498.
(23) Hosseini, Z. S.; Bafrani, H. A.; Naseri, A.; Moshfegh, A. Z. High-performance UV‐Vis-NIR photodetectors based on plasmonic effect in Au nanoparticles/ZnO nanofibers. Appl. Surf. Sci. 2019, 483, 1110-1117, DOI: 10.1016/j.apsusc.2019.03.284.
(24) Hsu, C.-L.; Chang, L.-F.; Hsueh, T.-J. A dual-band photodetector based on ZnO nanowires decorated with Au nanoparticles synthesized on a glass substrate. RSC Adv. 2016, 6, 74201-74208, DOI: 10.1039/c6ra09866e.
(25) Wu, K.; Chen, J.; McBride, J. R.; Lian, T. Efficient hot-electron transfer by a plasmon-induced interfacial charge-transfer transition. Science 2015, 349, 632, DOI: 10.1126/science.aac5443.
(26) Kumar, P. V.; Rossi, T. P.; Marti-Dafcik, D.; Reichmuth, D.; Kuisma, M.; Erhart, P.; Puska, M. J.; Norris, D. J. Plasmon-Induced Direct Hot-Carrier Transfer at Metal- Acceptor Interfaces. ACS Nano 2019, 13, 3188-3195, DOI: 10.1021/acsnano.8b08703.
(27) Lee, D.; Hwang, E.; Lee, Y.; Choi, Y.; Kim, J. S.; Lee, S.; Cho, J. H. Multibit MoS2 Photoelectronic Memory with Ultrahigh Sensitivity. Adv. Mater. 2016, 28, 9196-9202, DOI: 10.1002/adma.201603571.
(28) Lin, W.; Chen, G.; Li, E.; He, L.; Yu, W.; Peng, G.; Chen, H.; Guo, T. Nonvolatile Multilevel Photomemory Based on Lead-Free Double Perovskite Cs2AgBiBr6 Nanocrystals Wrapped Within SiO2 as a Charge Trapping Layer. ACS Appl. Mater. Interfaces 2020, 12, 43967-43975, DOI: 10.1021/acsami.0c12185.
(29) Cai, X.; Yin, L.; Sakai, N.; Liu, D.; Teng, C.; Ebina, Y.; Ma, R.; Sasaki, T. Photocharge Trapping in Two-Sheet Reduced Graphene Oxide–Ti0.87O2 Heterostructures and Their Photoreduction and Photomemory Applications. ACS Appl. Nano Mater. 2019, 2, 6378-6386, DOI: 10.1021/acsanm.9b01348.
(30) Chiang, Y. C.; Hung, C. C.; Lin, Y. C.; Chiu, Y. C.; Isono, T.; Satoh, T.; Chen, W. C. High-Performance Nonvolatile Organic Photonic Transistor Memory Devices using Conjugated Rod-Coil Materials as a Floating Gate. Adv. Mater. 2020, 32, 2002638, DOI: 10.1002/adma.202002638.
(31) Abbas, S.; Kumar, M.; Ban, D.-K.; Yun, J.-H.; Kim, J. Transparent and Flexible In2O3 Thin Film for Multilevel Nonvolatile Photomemory Programmed by Light. ACS Appl. Electron. Mater. 2019, 1, 437-443, DOI: 10.1021/acsaelm.8b00139.
(32) Liou, Y. R.; Lin, H. Y.; Cai, S. Y.; Liao, Y. M.; Lin, T. Y.; Chen, Y. F. Photoelectronic memory based on nitride multiple quantum wells and the hybrid of graphene nanoflakes and a-IGZO film. Opt. Express 2020, 28, 13542-13552, DOI: 10.1364/OE.374548.
(33) Brust, M.; Walker, M.; Bethell, D.; Schiffrin, D. J.; Whyman, R. Synthesis of thiol- derivatised gold nanoparticles in a two-phase Liquid–Liquid system. J. Chem. Soc., Chem. Commun. 1994, 0, 801-802, DOI: 10.1039/C39940000801.
(34) Zhao, Q.; Ju, D.; Deng, X.; Huang, J.; Cao, B.; Xu, X. Morphology-modulation of SnO2 hierarchical architectures by Zn doping for glycol gas sensing and photocatalytic applications. Sci. Rep. 2015, 5, 7874, DOI: 10.1038/srep07874.
(35) Saravanakumar, B.; Ravi, G.; Ganesh, V.; Ameen, F.; Al-Sabri, A.; Yuvakkumar, R. Surfactant assisted zinc doped tin oxide nanoparticles for supercapacitor applications. J. Sol-Gel Sci. Technol. 2018, 86, 521-535, DOI: 10.1007/s10971-018-4685-z.
(36) Zhang, H.; Zhao, Y.; Geng, X.; Huang, Y.; Li, Y.; Liu, H.; Liu, Y.; Li, Y.; Wang, X.; Tian, H.; Liang, R.; Ren, T.-L. Au Nanoparticles-decorated Surface Plasmon Enhanced ZnO Nanorods Ultraviolet Photodetector on Flexible Transparent Mica Substrate. IEEE J. Electron Devices Soc. 2019, 7, 196, DOI: 10.1109/jeds.2018.2889888.
(37) Goswami, L.; Aggarwal, N.; Krishna, S.; Singh, M.; Vashishtha, P.; Singh, S. P.; Husale, S.; Pandey, R.; Gupta, G. Au-Nanoplasmonics-Mediated Surface Plasmon-Enhanced GaN Nanostructured UV Photodetectors. ACS Omega 2020, 5, 14535-14542, DOI: 10.1021/acsomega.0c01239.