本論文以一維氧化銅奈米線為核心感測材料平台，發展兼具低濃度偵測能力與元件整合可行性之電阻型環境感測器，研究主題涵蓋低濃度臭氧氣體感測與相對濕度感測兩大方向。第一研究主軸採用熱氧化法於圖形化叉指電極上成長氧化銅奈米線，並系統性探討銅薄膜厚度對奈米線形貌特徵與感測性能之影響。由結構鑑定與形貌觀察結果可確認樣品形成單斜晶系之氧化銅相，且具備良好結晶性與奈米線成長一致性。氣體感測結果顯示，該感測元件於臭氧濃度範圍 50–300 ppb之間具有線性響應關係，並可在低操作溫度 100 ℃條件下偵測 50 ppb 之臭氧，且響應值可達 40%，同時展現良好之重複性與穩定性。
第二研究主軸導入穿矽通孔整合基板，建立金奈米顆粒修飾之氧化銅奈米線濕度感測元件。結果證實穿矽通孔結構具有良好之銅填孔完整性，可提供穩定之導通路徑與電性接觸基礎；此外，金奈米顆粒修飾可有效提升濕度感測之靈敏度與動態穩定性，其增益效應主要歸因於金屬與半導體界面所造成之電荷轉移與能帶調變作用，並結合奈米尺度金顆粒所提供之活性吸附位點，使相對濕度變化下之載子調變幅度得以放大。
綜合而言，本論文建立穿矽通孔整合與表面工程策略下之一維氧化銅奈米線感測架構，展現其於微型化環境監測與智慧感測系統之應用潛力。

This dissertation develops resistive-type environmental sensors based on one-dimensional copper oxide (CuO) nanowires (NWs), aiming to achieve both low-concentration detection capability and device-integration feasibility. The research is organized into two main thrusts: low-concentration ozone (O₃) gas sensing and relative humidity (RH) sensing.
In the first research thrust, CuO NWs were grown on patterned interdigital electrodes (PIEs) via a thermal oxidation method. The effects of Cu thin-film thickness on nanowire morphology and sensing performance were systematically investigated. Structural and morphological characterizations, including X-ray diffraction (XRD) and scanning electron microscopy (SEM), confirmed the formation of monoclinic CuO with good crystallinity and uniform nanowire growth. Gas-sensing results demonstrated a linear response over an O₃ concentration range of 50 – 300 ppb. Notably, the sensor was capable of detecting 50 ppb O₃ at a low operating temperature of 100 °C, achieving a response of 40% with good repeatability and stability.
In the second research thrust, through-silicon via (TSV)-integrated substrates were introduced to establish Au nanoparticle-decorated CuO NW (Au NP/CuO NW) humidity sensors. The fabrication results verified high-quality Cu-filled TSV structures, providing reliable electrical pathways and improved backside contact feasibility. Furthermore, Au NP decoration effectively enhanced humidity sensitivity and dynamic stability. The performance improvement is attributed to charge transfer and band modulation at the Au/CuO metal–semiconductor interface, as well as the increased density of active adsorption sites introduced by nanoscale Au NPs, which amplifies carrier modulation under varying RH environments.
Overall, this dissertation establishes a TSV-integrated and surface-engineered CuO NW sensing platform, demonstrating strong potential for miniaturized environmental monitoring and future intelligent sensing applications.

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