電與水是密不可分的兩種資源，而半導體業電與水的使用量非常大，在這個水資源越來越不充裕，每到夏季頻頻缺水、限水的大環境下，深入了解、管理、分配有限的水資源益顯迫切。
半導體廠房中，製程端機台使用與廠務端水處理，為消耗能源的兩大宗，本研究以科學園區中的半導體廠房為案例，探討廠房內的能源使用效率。首先了解廠房中各系統耗能情形，並分析耗能較高的製程端水系統，和廠務端水系統內部模組之構成，以找出高消耗區域與設備，接著分析一年中電與水使用量，了解造成這些設備耗能的原因。透過訪問廠內實務工程師，探求廠房每個月電與水使用量數據之變化與趨勢代表的現象，尋求節省的機會。
接著利用廠房用電量與用水量，計算廠房內部的電、水資源使用效率。再使用相關係數與月份間用電與用水量，計算電與水使用量的相關性。透過能源使用效率與相關性，可以找出節能效益最大的系統。
研究結果指出，廠務端系統中廢水處理系統之電與水使用量的相關性為0.52，較超純水生產系統之-0.04以及製程水回收系統之0.45為高，適合將節能措施與節能設備優先導入。但與另一廠房相比，其超純水生產系統之用電量用水量相關性為0.83，回收水系統為0.7，廢水處理系統為0.94，顯見全廠能源管理猶有改善空間。另外，各水處理系統耗能容易受到水質、排程、生產量，以及政府規範影響，因此指標的好壞需要以多種面相評估。

SUMMARY

Electricity and water are two inseparable resources. Since the amount of electricity and water usage of the semiconductor industry is very large, water shortage increases every summer. Thus, in-depth understanding, management, and allocation of limited water resources are urgent. The machines for the process and water treatment systems are two primary energy consumption in semiconductor plants, In this study, a semiconductor plant was selected as a case to explore the relationships between electricity and water consumptions, and the energy efficiency within the factory.

First, the circumstances of the plant were confirmed, and the composition of the high-energy was analyzed using module of water systems to identify high-consumption area and equipment. Followed by analyzing the electricity and water usage data in a year, and exploring the reasons why the facilities consumed much energy. Then, the trends and the phenomenon of these data were explored through interviewing the engineers, seeking opportunities for saving energy. The consumptions of electricity and water every month were calculated to get correlation coefficient. Through correlation coefficient and energy efficiency, the maximum efficiency system for saving energy could be found.

The research concludes that the correlation between electricity and water consumptions of wastewater treatment systems was 0.52, compared with that of the ultrapure water production system (-0.04), and the water recycling system (0.45). Energy-saving measures and energy-saving equipment should have priority to adopt. However, the energy management of the plant still has room for improvement, and they are highly related to water quality, production schedule, production rate, and the government regulations.

Keywords: water usage in process, water usage in utility, semiconductor plants,
relationships between electricity and water, energy efficiency
INTRODUCTION

In recent years, the government frequently promote energy-related policies, such as carbon reduction, progressive electricity, water counseling, water restriction, showing that energy using is not unlimited (EPA 2016). At the same time, the associations of electricity and water are rarely explored.
When a stream of water extracted from the source to the end use, it will go through transportation, processing and distribution. After using, the wastewater will also go through the collection, processing, distribution, discarded, and transported. All these processes require energy, which is the electricity (Lienhard 2012). Therefore, electricity and water are closely related, a waste of electricity is a waste of water. This relationship between electricity and water appears in the plant as an end user.
Semiconductor plant, for example, imports water from the source into water purification treatment, transportation, waste water treatment, discarded, distribution, and emissions. The steps are all linked together. Although the relationship between electricity and water is a relatively new concept, but the idea is universally-all to be in many places, even can be verified and improved in other areas.
The purpose of this study was to analyze the data of monthly electricity and water consumptions in a semiconductor plant, trying to find the association between electricity and water consumptions of the manufacturing process and utility service in the semiconductor plant, providing suggestions of energy saving in operation.

MATERIALS AND METHODS

The water systems of a semiconductor plant located in Tainan science park was analyzed, including the ultrapure water production system, process water recycling system, process wastewater treatment system. The monthly electricity and water consumptions data were collected, and the trend was analyzed. Then the case plant engineers were interviewed to confirm the analysis results to identify factors affecting the changes in energy use of the plant.
After establishing research purposes, the water system composition, operation of the process, and the special property of electricity and water in the factory were studied. Current performance was reviewed, followed by correlation calculations, the electricity and water data of the plant were used to find the relationships between electricity and water consumptions, and finally conclusions and recommendations were made.

RESULTS AND DISCUSSION

The energy consumption of the plant is highly intensive and complicated. Water treatment system is responsible for three main scopes: producing ultrapure water, recycling the water after the production process, and diverting them into 8 recycling systems and 26 wastewater treatment systems. The three systems and process machine are connected to the end use, and the high energy consumption facilities of the entire semiconductor plant.

It is not easy to directly reduce electricity or water consumptions. Ultrapure water production system consumes a lot of energy, but guarantees the quality of the product; water recycling system uses energy but helps reduce daily water consumptions; waste water treatment system consumes energy to protect the environment and ecology. In this study, through discussions with the engineers, the data outliers were explained, which is also applicable to other systems.

The semiconductor production industry is highly electricity-intensive and water-intensive. The correlation between the electricity and water consumptions, whether it is for an initial operation period of the plant, or a stable period of operation of a plant, is very high (0.89). To reach the goal of saving water, studying wastewater treatment system would bring cost-effective results.

Comparisons are provided to understand the real virtue of good and bad of energy efficiency. When analyzing energy efficiency, energy saving standards can also be provided for a new starting plant in addition to comparing with past performance. For example, it has very high energy efficiency in April, the mode of using energy should be copied to other months in a year.
CONCLUSIONS

The relationship between electricity and water consumptions in a production process can help quickly find the priority of energy saving. The facility breakdown can save time for searching in the extensive data when failure happens. This study summarized the factors of variations of daily energy consumptions in a semiconductor plant. It allows the identification of more opportunities for energy use efficiency and makes a suggestion to the company that they can improve the internal instability by reducing the occurrences of the factors.

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