在本研究中，吾人係以烷基硫醇修飾金/砷化鎵蕭特基二極體製備新穎性酒精感測器。文中分別以不同碳鏈長度之烷基硫醇在金膜上形成自組裝單分子層，利用接觸角、反射式紅外線吸收光譜儀和循環伏安法探討自組裝單分子層之特性，其次，製作烷基硫醇修飾金/砷化鎵蕭特基二極體，探討其電流-電壓特性。另外，以各條件所得二極體元件進行酒精感測，實驗中改變酒精濃度、操作溫度及施加偏壓，探討金膜厚度、烴基碳數及末端官能基(–COOH、–OH、–CH3)對酒精感測性能之影響。
研究結果顯示，當金膜厚度在20-200 nm間時，金膜厚度愈薄時，其表面型態愈粗糙，故所得硫醇在金膜表面吸附量較少。另外，羧基 (–COOH) 修飾金膜表面隨碳數增加其親水性愈佳，且單分子層愈趨於整齊排列，故可提供酒精吸附之活性座數目增加。
由二極體元件之電性量測結果顯示，當金膜厚度下降時，電流值提升。由酒精感測結果顯示，單分子層之化學結構對電性及感測性能影響甚鉅。當烴基碳數由3增加至6時，由於自組裝性增高，吸附座增加，故感測靈敏度提升，但當碳數大於6時，由於碳鏈愈長，誘導之靜電位能降低，故靈敏度下降。若以苯環取代直鏈烷基，可提升感測靈敏度。末端官能基對酒精感測性能扮演極重要之角色，其感測靈敏度依序為 –COOH ＞ –OH ＞ –CH3。當酒精濃度在1.95-4.55% 範圍內，濃度增高時，靈敏度增大，操作溫度在298-308K範圍內時，增高溫度卻造成靈敏度下降。
综合以上結果，烷基硫醇修飾金/砷化鎵蕭特基二極體製備新穎性酒精感測器，在金膜厚度為50 nm，烴基碳數為6且末端官能基為羧基時，能得一最佳靈敏度之常溫酒精感測器。

In this work, a series of novel sensors based on the self-assembled organo-functionalized Au/GaAs Schottky diodes were fabricated for ethanol detection. Firstly, the contact angle, reflection absorption infrared spectroscope, and cyclic voltammetry techniques were used for the characterization of self-assembled monolayers (SAMs). The current-vcoltage (I-V) rectifying properties of SAMs functionalized devices were investigated. Moreover, the ethanol sensing performances of these devices were studied under various ethanol concentrations, temperatures and applied voltages. The dependences of ethanol sensing performances on the Au thickness, carbon numbers and terminal functional groups (e.g., –COOH、 –OH and –CH3) of SAMs were investigated.
From experimental results, it revealed that, in the Au thickness ranging of 20-200 nm, the surface roughness of Au layer increased with decreasing the Au thickness, resulting in less adsorption amounts of SAMs on Au surface. For the carboxyl-terminated SAMs/Au, the hydrophilicity, order and stability were increased with increasing carbon numbers. Besides, the SAMs tended to produce more active sites.
From the result of I-V rectifying properties, the current of SAMs modified Au/GaAs device increased with decreasing the Au thickness. From the results of ethanol detection, it indicated that as the carbon number increased from 3 to 6, the sensitivity of the studied devices were increased. Whereas, when the carbon number was above 6, the current was reduced owing to the decrease of induced electrostatic potential. In addition, as the aliphatics replaced by aromatics the device showed an enhancement in the ethanol sensitivity. It also found that the terminated functional group of SAMs played an important role on the sensing performance of device. The ethanol sensitivity decreased in the order as –COOH > –OH > –CH3. Under the ethanol concentrations of 1.95-4.55% EtOH/N2 and temperature of 298-308K, the sensitivity of device was increased with either increasing the ethanol concentration or decreasing the sensing temperature.
In conclusion, among various preparation conditions, the Au/GaAs Schottky diodes modified by the carboxyl-terminated alkylthiol SAMs with a carbon number of 6 and with a Au thickness of 50 nm showed the best ethanol sensing performance.

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