本論文利用CMOS　BioMEMS微系統技術，將多功能的生物感測器和一個環境溫度監控整合於單一感測系統中。以CMOS為主的離子感測場效電晶體微系統能夠準確的檢測出白蛋白分子和連續式的酸鹼度量測。這微系統的感測薄膜可以自然形成於最頂層，不需要額外的後製程處理。為了達到整體系統的微小化，這微系統以固態的參考電極取代傳統式的商用型參考電極。從結果顯示這一個微系統最後可以應用於尿液白蛋白檢測。
　　根據實驗的架設是以氧化鋁和金的感測薄膜做為離子感測場效電晶體感測器結構的感測材料，並進行了白蛋白與酸鹼值感測器之特性比較和評估：
1. 對於一個BioFET白蛋白晶片製造之可以簡易檢測白蛋白及其特點進行了研究。因此，這個BioFET的電流訊號變化是靠不同濃度的白蛋白吸附在金表上。根據實驗結果可知，這一個白蛋白感測器對於不同的白蛋白濃度可以檢測的線性範圍在14 μg/ml到28 μg/ml之間。所以這個白蛋白感測器可以實際應用於尿液的檢測。
2. 我們使用pH-ISFET去感測酸鹼值濃度的變化，感測薄膜由自然形的氧化鋁它位於在最頂端的金屬層。針對其靈敏度、線性度、可逆性與遲滯現象做探討與比較兩種參考電極的特性。從實驗結果可知pH-ISFET的酸鹼值靈敏度最高可達到53.2 mV/pH，檢測範圍位於pH 6到pH 8之間。除此之外，溫度感測器也一併做探討，對於溫度感測器檢測範圍在25 ℃到60 ℃之間，對溫度的靈敏度是每度可以變化0.152歐姆。
3. 最後我們整合白蛋白感測器、酸鹼值感測器、溫度感測器和一個固態的參考電極，它們被整合在一個玻璃基板上。從實驗結果明確的指出我們可以成功的檢測出白蛋白濃度、酸鹼值和溫度的變化。因此這一個以CMOS為主的離子感測場效應電晶體之微系統有能力實際應用於尿液的感測。

This thesis reports a CMOS BioMEMS (biological micro-electromechanical system) microsystem for monolithically integrated multi-type biosensors and environment temperature monitor. CMOS-based ISFET microsystem is capable of precise detection albumin and continuous pH measurements. Without any deposition layer, the sensing membrane is formed naturally on the top of metal. To minimize the whole system size, the commercial Ag/AgCl electrode is replaced by pseudo electrode. The test results showed the applicability of the microsystem as a urinary albumin monitor.
From the experimental setup, using native aluminum oxide and gold membrane to be the material of ISFET detecting device structure, and then comparing and estimating characteristic of albumin and pH sensor：
1. A BioFET albumin chip for the easy detection of albumin was fabricated and its characteristics were investigated. As such, the drain current of the BioFET albumin chip can be varied by albumin absorbed on the gate (Au) surface. According to experiment results, it is shown that a linear curve from 14 μg/ml to 28 μg/ml for the different albumin concentrations. Therefore, it can be used as urinary albumin sensor in real applications.
2. We used the pH-ISFET to detect the variation pH value that sensing membrane is aluminum oxide formed naturally on the top of M4. The discussion is base on the estimating of sensitivity, linearly, reversibility, and comparison commercial and pseudo reference electrode. From the experiment results, it is found that sensitivity of pH-ISFET is maximum 53.2 mV/pH ranging from pH 6 to pH 8. In addition, temperature sensor have estimated, sensitivity is 0.1526 Ω/ ℃ between 25 ℃ and 60 ℃ (step 5 ℃).
3. Finally, we integrate albumin sensor, pH sensor, and temperature sensor and pseudo reference electrode on a glass substrate. Experimental results definitely indicate that we successfully measure albumin concentration, pH value, and temperature variation. Therefore, this CMOS-based ISFET microsystem is capable application in urine sensing.

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