虛擬量測技術使用生產機台之重要參數資料及採用適當的預測架構，在不實際量測情況下預測產品品質。全自動虛擬量測系統(Automatic Virtual Metrology System, AVMS)中，虛擬量測管理伺服器(Virtual Metrology Manager)是系統運作之核心，為各子系統間相互溝通的橋梁，負責分派各子系統命令及具有存取中央資料庫(Central Database)的權限。本論文針對虛擬量測管理伺服器，開發新的核心與精進功能機制，以有效提升AVMS之整體執行效率。主要改善處包含：豐富介面設計，使其具有多溝通介面(Multi-Interface)功能；採用平行處理(Parallel Processing)技術，使迴圈運算執行更具效率；支援多執行緒(Multithreading)，能夠自動依照硬體等級決定同時處理訊息的數量，達到即時回應的目的；改良訊息處理機制，使能追蹤每一訊息的狀態，且依照重要程度有不同的處理方式。整合測試結果顯示本研究所開發之虛擬量測管理伺服器新式核心與各項功能機制，確能達到設計目標。

Virtual Metrology (VM) refers to a technology that is able to conjecture product quality using important parameter data of production equipment and adopting a proper prediction scheme without conducting real metrology. In an automatic VM system (AVMS), the VM manager is the core of system's operations and the communication bridge among subsystems. It is responsible for distributing commands to each subsystem and possesses access privilege to the central database. This thesis aims to develop a new kernel and refine functional mechanisms for the VM manager such that the total execution efficiency of AVMS can be effectively enhanced. The major improvements include the following. The interface design is enriched to possess multi-interface capabilities. The parallel processing technology is adopted to enable the loop computation to execute more efficiently. Multithreading is supported such that the system can decide how many messages can be processed simultaneously according to the hardware grade for the purpose of prompt responses. The message processing mechanism is reformed for allowing the system to trace the status of each message and have different processing modes based on the importance levels of the messages. Integrated testing results show that the developed new kernel and various functional mechanisms of the VM manager can indeed achieve the design objectives.

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