本論文之目的在於BCB光阻材料以不同的製程參數於再流動的結果加以探討之外，並將其再流動之特性應用於三維光學鏡片的自動組裝過程。本文採用SOI晶片來避免繁雜的面加工製程，並用DRIE蝕刻機器來蝕刻出所要的結構圖案，並將光阻材料鋪在結構相關位置來當作絞鍊，再經由結構分離與光阻再流動等步驟後即完成三維光學鏡片自動組裝的製作。此外，亦設計將三維光學鏡片與致動器整合，擬製作出可旋轉式的三維自動組裝之微光學鏡片。
研究目的是希望將光阻再流動的特性以不同參數，如絞鍊的擺設位置、寬度、長度、及長度等，所得到的結果來加以探討外，並製作出可旋轉式三維自動組裝微光學鏡片對微光學系統應用方面有所貢獻。

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