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研究生：	葉香蘭 Yeh, Shiang-Lan
論文名稱：	準分子雷射3D微結構加工應用於球閥式微幫浦 Excimer Laser Machining of 3D Microstructures with Application on Ball Valve Micro-pumps
指導教授：	李永春 Lee, Yung-Chun
學位類別：	碩士 Master
系所名稱：	工學院 - 奈米科技暨微系統工程研究所 Institute of Nanotechnology and Microsystems Engineering
論文出版年：	2012
畢業學年度：	100
語文別：	中文
論文頁數：	84
中文關鍵詞：	準分子雷射加工、球閥式微幫浦、PDMS
外文關鍵詞：	Excimer Laser Micromachining, Ball-vale micropump, PDMS
相關次數：	點閱：129 下載：2
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本論文利用準分子雷射微細加工技術配合旋轉平台技術及其相關的特殊光罩設計方法，製作微小的3D軸對稱微結構，其目的是希望加工出剖面為任意曲線的3D軸對稱微小結構，以克服傳統微機電製程中僅限於2D結構的限制。實驗中選擇高分子材料(PC)，加工結果顯示準分子雷射加工與旋轉平台法的確可以控制所需要的各種加工曲面，且加工精度也相當良好、速度非常快、表面平滑度佳。
本論文之主要目標為設計與製作可整合於生醫檢測晶片之微流體輸送系統。在設計過程中，為了使其具有生物相容性，在材料上選擇一種彈性聚合物材料-PDMS(Polydimethylsioxane)作為流道與腔體的結構，並利用其軟韌之特性來作為振動薄膜。針對球閥式微幫浦製作部分，本研究採用PDMS特殊製成，可節省製作之成本與時間，並利用電磁式為驅動源，以直徑為7 mm的磁鐵來帶動振動薄膜的振動，以比較腔體與流道在不同高度時，球閥式微幫浦的效能。
實驗結果顯示，腔體與流道高度在125 μm為最佳設計。量測方面採電壓15 V，頻率50 Hz進行量測，得到最佳體積流率為51.67 μL/min，背壓為13.4 mm-H2O。

This study applies excimer laser micro-machining technology for manufacturing 3D axially symmetrical micro-structures. It is based on a work-piece rotation method in conjunction with a contour mask imaging projection machining. Specially designed laser masks have been developed for machining various kinds of 3D surface profiles. The micromachining is carried out on polycarbonate (PC) material and the surface profiles have been characterized and compared with their theoretical counterparts. Good agreement is observed.
Based on the excimer laser machined 3D micro-structures, the goal of this thesis is to design and fabricate a ball valve micro-pump for fluidic transport and can be used in biochips. In order to make it more biocompatible, polydimethylsioxane (PDMS) material is used and its flexible material property is also excellent to form the moveable membrane of micro-pumps and micro-channel. The actuation the membrane is through magnetic force generated by an electromagnetic coil. Experiments have been carried out to determine the optimal design for the ball-vale micro-pump. At a channel height of 125 μm, a voltage of 15 V, and a frequency of 50 Hz, the micropump can achieve the best performance with a flow rate is 51.67 μL/min and a maximum backpressure of 13.4 mm-H2O.

摘要.......................................................I
Abstract..................................................II
致謝.....................................................III
目錄.......................................................V
圖目錄.....................................................IX
表目錄...................................................XIII
符號說明..................................................XIV
第一章 緒論.................................................1
1-1 前言...................................................1
1-2 微幫浦之介紹.............................................2
1-3 球閥式微幫浦之介紹........................................4
1-4 直立式微幫浦.............................................7
1-5 研究動機...............................................13
1-6 本文架構...............................................14
第二章 準分子雷射與旋轉加工法..................................15
2-1 準分子雷射原理..........................................15
2-2 準分子雷射加工系統.......................................17
2-3 旋轉加工法.............................................20
第三章 實驗架構.............................................24
3-1 製作流程...............................................24
3-2 黃光製程...............................................25
3-2-1 光罩製作.............................................25
3-2-2 SU-8母模製程.........................................25
3-2-2-1 晶片清洗(Clean)....................................25
3-2-2-2 光阻塗佈(Spin Coating).............................26
3-2-2-3 軟烤(Soft bake)...................................29
3-2-2-4 曝光(Exposure)....................................30
3-2-2-5 曝後烤(Post exposure bake).........................31
3-2-2-6 顯影(Development).................................32
3-2-2-7 清洗(Rinse).......................................32
3-2-2-8 硬烤(Hard Bake)...................................33
3-3 上片-微流道製程.........................................34
3-3-1 聚二甲基系氧烷矽膠(Polydimethylsiloxane，PDMS).........34
3-3-2 PDMS製程............................................35
3-4 中片-噴嘴/擴流器的結構製作................................37
3-4-1 微球( Microspheres )................................42
3-5 下片-腔體製程...........................................42
3-6 晶片接合技術............................................46
3-6-1 3-氨丙基三乙氧基硅烷(3-AMINOPROPYLTRIETHOXYSILANE；APTES)	..........................................................46
3-6-2 反應式離子蝕刻機(Reactive Ion Etching；RIE)............47
3-6-3 接合製程.............................................49
3-7 實驗設備...............................................54
3-7-1 線圈................................................54
3-7-2 墊片................................................55
3-7-3 電源供應器...........................................56
第四章 實驗結果與討論........................................57
4-1 噴嘴/擴流器的加工結果....................................57
4-1-1 光罩一...............................................59
4-1-2 光罩二...............................................61
4-1-3 光罩三...............................................63
4-1-4 光罩四...............................................65
4-2 球閥式微幫浦之振幅量測....................................67
4-3 球閥式微幫浦效率分析與比較................................69
4-4 球閥式微幫浦背壓量測.....................................73
4-5 實驗結果比較與討論.......................................75
第五章 結論與未來展望........................................78
5-1 結論..................................................78
5-2 未來展望...............................................80
參考文獻...................................................81

                                    

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校內：2017-09-04公開
校外：2022-08-31公開

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