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研究生： 陳政慰
Chen, Cheng-wei
論文名稱： 新型單相超音波馬達之分析與實現
Analysis and Implementation of a Novel Single-Phase Ultrasonic Motor
指導教授： 蔡明祺
Tsai, Mi-Ching
學位類別： 碩士
Master
系所名稱： 工學院 - 機械工程學系
Department of Mechanical Engineering
論文出版年： 2007
畢業學年度： 95
語文別： 中文
論文頁數： 91
中文關鍵詞： 垂直電極 、單相驅動 、超音波馬達 、壓電致動器
外文關鍵詞： single phase drive, ultrasonic motor, perpendicular electrode, piezoelectric actuator
相關次數： 點閱：83  下載：7 
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    • 自二十世紀以來，光電通訊以及半導體等IT產業的發展快速，帶動精密定位與微小組裝技術升級，因此相關製造組裝設備精度需求比以往更高，而壓電材料具機電耦合特性，且其振動的頻率高及振幅小，因此具有高精度的特性，不論是奈米定位用的微位置致動器或是最新進的吸收式微電能發電機等，壓電致動器實為電磁致動元件以外提供一個不錯的選擇。
    近幾年，超音波馬達以單相驅動及小型化為其發展趨勢，而本研究提出一新型單相超音波馬達，主要特色在於垂直電極設計之壓電致動器結構，藉由單一輸入訊號，激發出其特殊振動模態，此致動器結構有別於目前習知的單相超音波馬達，屬創新型設計，特點為體積小、結構簡單以及組裝容易等。實驗結果顯示，以5×5×5mm3之致動器作為線型超音波馬達之定子時，馬達最大速度及推力分別為115mm/s及3.72N，效率可達26.45%。本創新型壓電致動器設計，已陸續應用於各種相關場合，如主動式線性滑軌、微夾爪模組以及球型超音波馬達等。

    Since 20th century, the development of optical communication and semiconductor industries prospered, bringing the precise positioning technique promotion. Owing to the trend of miniaturization of electronic products, manufacturing apparatus has required ever higher precision. Piezoelectric material exhibits an electromechanical coupled characteristic, and possesses precise accuracy from high frequency and small amplitude vibration. Piezoelectric actuators indeed provide a better selection for micro actuators or micro power generators, with the exception, however, of the electromagnetic actuator.
    The development tendency of ultrasonic motor is moving toward a single phase drive and miniaturization. This thesis proposes a novel single phase ultrasonic motor, which is characterized by a perpendicular electrode set of the actuator. It is simple in structure; just a 5×5×5mm3 cubic type in size, and requires only one input signal to excite the special vibration mode of the actuator. Experimental results show that the maximum velocity and thrust of the novel ultrasonic motor are 115mm/s and 3.72N in sequence, while its efficiency presently reaches 26.45%. This innovative design of the piezoelectric actuator has been employed in various applications, such as an active linear guide, micro grippers, and spherical ultrasonic motors etc.

    摘要 I Abstract II 誌謝 III 目錄 IV 表目錄 VII 圖目錄 VIII 第一章 緒論 1 1.1 前言與動機 1 1.2 研究背景 4 1.3 文獻回顧 6 1.3.1 超音波馬達分類 6 1.3.2 超音波馬達分析理論 15 1.4 研究目的 16 1.5 本文架構 18 第二章 壓電理論與有限元素分析 19 2.1 壓電理論 19 2.1.1 壓電陶瓷 20 2.1.2 壓電方程式 22 2.1.3 壓電陶瓷的致動模式 24 2.2 有限元素法(Finite Element Method, FEM) 27 2.2.1 FEM分析理論 27 2.2.2 FEM分析流程 28 2.3 新型壓電致動器分析 29 2.3.1 新型壓電致動器原理介紹 29 2.3.2 新型壓電致動器FEM分析 30 第三章 新型壓電振動子之分析與設計 37 3.1 超音波馬達性能探討 37 3.1.1 振動子模型 37 3.1.2 振動子與接觸層 40 3.1.3 滑塊運動模型 41 3.1.4 結論 41 3.2 新型壓電振動子尺寸分析 42 3.2.1 新型壓電振動子 42 3.2.2 改變致動器高度 44 3.2.3 改變致動器維度 44 3.2.4 結論 46 3.3 放大機構(Horn) 47 3.3.1 方形放大機構(Cubic horn) 47 3.3.2 錐形放大機構(Taper conical horn) 49 3.3.3 結論 51 第四章 實驗架設與性能量測 53 4.1 實驗設備 53 4.1.1 實驗儀器規格 53 4.1.2 量測實驗設置介紹 55 4.2 振動子HL之實驗量測 59 4.2.1 共振頻率量測 59 4.2.2 表面振幅量測 61 4.2.3 性能量測 63 4.2.4 結果討論 65 4.3 振動子H5及振動子H8之性能量測 66 4.3.1 共振頻率量測 66 4.3.2 表面位移量測 67 4.3.3 性能量測 69 4.3.4 結果討論 75 4.4 主動式線性滑軌性能量測 78 4.4.1 機台設計 78 4.4.2 性能量測 80 4.4.3 結果討論 80 4.5 其他應用機台設計 81 第五章 結論與建議 83 參考文獻 87 作者自述 91

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