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研究生: 呂宗霖
Lu, Zong-Lin
論文名稱: 應用電鍍銅技術於高功率發光二極體之研製
Using Copper Electroplating Technique in High Power LED Fabrication
指導教授: 蘇炎坤
Su, Yan-Kuin
盧炎田
Lu, Yan-Ten
學位類別: 碩士
Master
系所名稱: 理學院 - 光電科學與工程研究所
Institute of Electro-Optical Science and Engineering
論文出版年: 2007
畢業學年度: 95
語文別: 英文
論文頁數: 65
中文關鍵詞: 雷射剝離發光二極體高功率電鍍銅垂直結構氮化鎵
外文關鍵詞: high power, copper electroplating, light-emitting diodes, laser-lift off, vertical structure, GaN
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  • 自日人Nakamura先生於1990年成功研製出高亮度氮化鎵系列 LED以來,世人逐漸在些小小的亮點身上,看到未來世界光明的希望。於是投入大量的人力心血以及時間,在這種節能的科技之中,憑藉著前輩們的努力,成果亦十分豐碩。然則發展至今,我們不得不面對的問題除了持續的提升LED之外部量子效率之外,點亮過程中產生的廢熱,亦是影響其壽命及效率的關鍵。
    因此發展出各式各樣的散熱製程模式,一般而言,對於GaN LED來說,散熱效率最好的製程,莫過於雷射剝離製程,其後不論是以bonding或是以electroplating接合金屬,其導熱率,將遠勝於本身Sapphire基板。而綜論前人論述,垂直結構LED在增加光取出效率之上,亦有其優點,位於底部的全面金屬反射鏡,將反射由多重量子井所發出,而方向向下的光,這是相對於傳統LED的ㄧ大優點,然則在ㄧ般LED製造過程中,不論是製程或者是封裝,往往伴隨著熱衝擊。高反射率的金屬反射鏡在經過熱處理的高溫衝擊之下,往往會發生反射率的下降,在此實驗中將以緩衝層Ni來解決熱衝擊下反射率下降的問題,以期提升出光效率,另外為配合Novel package的封裝方式,實驗中亦將探討高速電鍍銅的參數以及製程方式,透過田口法的實驗設計,可利用較簡單的實驗設計得到較佳的參數,進而幫助實驗Novel package的量產進程。最後將探討垂直式結構LED,以電鍍銅的方式製造其基板,而用三種不同的方式嘗試將其切分,最後得到以光阻遮擋,於掛鍍的過程中先行將銅分離乃為最佳之製作方式。

    Since Nakamura succeeded in developing high power GaN based LED in 1990s, people around the world see the hope of bright future on these tiny spots day by day. Then large amount of resource and researchers are devoted into such kind of energy-conserving science and technology. By the efforts of the elders, the achievement is also very rich. Until today the challenge we get is not only increasing the external efficiency of LEDs but also need to solve the problem that excess heat damage LED chips during high power operation which also affect the life time and efficiency of LEDs a lot.
    So there are plenty of process focus on heat dissipation were successfully developed, generally speaking, as for GaN LED , there is nothing better than LLO in heat dissipation process hereafter no matter with bonding or electroplating, the heat conduction of metal will be better than Sapphire originally. According to the papers presented before, vertical structures LEDs take advantages in light extraction. Due to the full surface metal reflector, the light emitted downward generated by multi-quantum well would be reflected and escaped from the crystal at the top surface. However, no matter in the conventional or LLO processes the annealing processes are always accompany with thermal impacts and the reflectivity of metal reflector would drop down with these processes. In the experiment, Ni layer was used as a buffer layer to stop the diffusion of metal during annealing process, and increase the light extraction efficiency at the same time. Second part is about high deposition rate of copper electroplating, by the help of Taguchi method use the fewest number of experiments and get the best recipe to realize the mass production of Novel packages. Finally the singulation of LLO LEDs with copper substrates has been discuss, after try three different methods define each chip by photo-resistance before rack plating is the best choice to separate each chip with copper substrates without damage their crystal quality.

    Contents Abstract (In Chinese) ----------------------------------- I Abstract (In English) --------------------------------- III Acknowledge (In Chinese) -------------------------------- V Contents ---------------------------------------------- VII Table Captions ----------------------------------------- IX Figure Captions ----------------------------------------- X Chapter 1 Introduction ---------------------------------- 1 1.1 The Development of High Brightness LEDs ------------- 1 1.2 Introduction of LLO technique ----------------------- 2 1.3 The Background of copper electroplating application in LED process------------------------------------------ 3 Chapter 2 Principles of Light-emitting Diodes ----------- 6 2-1 An overview of lateral-structures GaN blue LEDs ----- 6 2-2 Electrical property of LEDs ------------------------- 8 2-2-1 P-type Ohmic Contact------------------------------- 8 2-2-2 Current spreading design for metal-semiconductor contact ------------------------------------------ 10 2-3 Substrate Transport from Sapphire to Metal Substrate -- ---------------------------------------------------- 13 2-3-1 Laser Lift Off process --------------------------- 13 2-3-2 Electroplating Copper Substrate ------------------ 15 2-4 Taguchi method ------------------------------------- 18 Chapter 3 Chapter 3 Process and Package of High Poewr LED Fabrication ---------------------------------- 27 3-1 Fabrication of P-Side down Laser Lift off LED ------ 27 3-2 the metal reflector and copper electroplating technology in LLO LED fabrication ------------------ 30 3-2-1 The Metal Reflector in LLO LED fabrication ------- 30 3-2-2 Copper electroplating ---------------------------- 30 Chapter 4 Result and Discussion ------------------------ 36 4-1 Barrier layer of the Metal Reflector in Laser-Lift off process -------------------------------------------- 36 4-2 High deposition rate of copper electroplating ------ 38 4-3 Cutting of Copper Substrate ------------------------ 39 4-3-1 cutting by diamond blade ------------------------- 39 4-3-2 Separating Each Chip by Barrel Plating Copper Substrate ---------------------------------------- 40 4-3-3 Using Photo Resistance as Mask before Rack Plating 40 Chapter 5 Conclusion and Future Work ------------------- 56 5-1 Conclusion ----------------------------------------- 56 5-2 Future work ---------------------------------------- 58 Reference ---------------------------------------------- 60

    [1] J. Nishizawa, and K. Suto, “Minority-carrier lifetime
    measurements of efficient GaAlAs p-n heterojunctions”
    J. Appl. Phys., Vol 48 pp.3484,1977
    [2] M. R. Krames, “High-power truncated-inverted-pyramid
    (AlxGa1–x)0.5In0.5P/GaP light-emitting diodes
    exhibiting >50 external quantum efficiency”, Appl.
    Phys. Lett. 75 pp.2365,1999
    [3] S.Nakamura, M. Senoh, N. Iwasa, S. Nagahama, T.Yamada,
    T. Mukai, ” Superbright Green InGaN Single-Quantum-
    Well-Structure Light-Emitting Diodes ”,Jpn. J. Appl.
    Phys., Vol. 34 pp.L1332-L1335, 1995
    [4] C. R. Miskey, M.K. Kelly, O.Ambacher, M. Stutzmann,
    “Freestanding GaN-substrates and devices”,Phys. Stat.
    Sol. No.6, pp.1627-1650, 2003
    [5] M. K. Kelly, O. Ambacher, R. Dimitrov, H. Angerer, R.
    Handschuh, M. Stutzmann, “Laser-processing for
    patterned and free-standing nitride films”,Materials
    Research Society Symposium – Proceedings, v482,
    Nitride Semiconductors, pp.973-978, 1997
    [6] W. S. Wing, Y. Cho, E.R. Weber, T. Sands, K. M. Yu, J.
    Kruger, A. B. Wengrow, N. W. Cheng ,” Structural and
    optical quality of GaN/metal/Si heterostructures
    fabricated by excimer laser lift-off”, Appl. Phys.
    Lett., v75, n 13, pp.1887-1889, 1999
    [7] N. W. Cheung, T. D. Sands, W. S. Wong, US patent
    number 6071795, Jun. 6th 2000
    [8] W. S. Wong, T. Sands, N. W. Cheung, M. Kneissl, D. P.
    Bour, P. Mei, L. T. Romano, and N. M. Johnson,
    “InxGa1–xN light emitting diodes on Si substrates
    fabricated by Pd–In metal bonding and laser lift-
    off”,Appl. Phys. Lett., V77 p.p.2822-2824, 2000
    [9] H.P. Maruskas, J. J. Tietjen,” THE PREPARATION AND
    PROPERTIES OF VAPOR-DEPOSITED SINGLE-CRYSTAL-LINE
    GaN” Appl. Phys. Lett. Vol.15, (1969)327
    [10] H. Amono, N. Sawaki, I. Akasaki, and Y. Toyoda,”
    Metalorganic vapor phase epitaxial growth of a high
    quality GaN film using an AlN buffer layer”,Appl.
    Phys. Lett. Vol. 48(1986) p.p. 353-355
    [11] S. Nakamura, T Mukai, and M. Senoh,“ Candela-class
    high-brightness InGaN/AlGaN double-heterostructure
    blue-light-emitting diodes“,Appl. Phys. Lett. Vol. 64
    (1994) p.p.1687-1689
    [12] S. Keller, B. P. Keller, Y.-F. Wu, B. Heying, D.
    Kapolnek, J. S. Speck, U. K. Mishra, and S. P.
    DenBaar,” Influence of sapphire nitridation on
    properties of gallium nitride grown by metalorganic
    chemical vapor deposition”, Appl. Phys. Lett. Vol.68
    (1996) p.p.1525-1527
    [13] S. Yoshida, S. Misawa, and S. Gonda,” Improvements
    on the electrical and luminescent properties of
    reactive molecular beam epitaxially grown GaN films
    by using AlN-coated sapphire substrates”, Appl.
    Phys. Lett. Vol. 42(1983), pp. 427-429
    [14] S. Nakamura, “GaN Growth Using GaN Buffer Layer”
    ,Jpn. J. Appl. Phys. Vol. 30(1991) p.p. L1705-1707
    [15] B. Beaumont, Ph. Vennéguès, P. Gibart, „Epitaxial
    Lateral Overgrowth of GaN“,Phys. Stat. Sol. (b) Vol.
    227 (2001), p.p. 1-43
    [16] K. Tadatomo, H. Okagawa, Y. Ohuchi, T. Tsunekawa, Y.
    Imada, M. Kato, and T. Taguchi, “High Output Power
    InGaN Ultraviolet Light-Emitting Diodes Fabricated on
    Patterned Substrates Using Metalorganic Vapor Phase
    Epitaxy”,Jpn. J. Appl. Phys. Vol.40(2001) p.p. L583-
    585
    [17] S.J. Chang a, Y.C. Lin a, Y.K. Su, C.S. Chang, T.C.
    Wen, S.C. Shei, J.C. Ke, C.W. Kuo, S.C. Chen, C.H.
    Liu,” Nitride-based LEDs fabricated on patterned
    sapphire substrates”, Solid-State Electronics vol.47
    (2003) p.p.1539–1542
    [18] S. Nakamura, M. Senoh, S. Nagahama, N. Iwasa,T.Yamada,
    T. Matsushita, Y.Sugimoto, and H. Kiyoku,” Ridge-
    geometry InGaN multi-quantum-well-structure laser
    diodes”, Appl. Phys. Lett. Vol.69(1996) p.p.1477-1479
    [19] J. K. Ho, C. S. Jong, C. C. Chiu, C. N. Huang,
    K.K.Shih, L.C. Chen, F. R. Chen, and J. J. Kai, “Low-
    resistance ohmic contacts to p-type GaN achieved by
    the oxidation of Ni/Au films”,J. Appl Phys. Vol 86
    (1999) p.p.4491-4496
    [20] K. Greven, A. Ludwig, and P. R. Sahm , “Time
    dependent interface stability during rapid
    solidification”,J. Appl Phys. Vol.86(1999) p.p. 3682-
    3687
    [21] J. S. Jang, I. S. Chang, H. K.Kim, T. Y. Seong, S.
    Lee, and S. J. Park, “Low-resistance Pt/Ni/Au ohmic
    contacts to p-type GaN”,Appl. Phys. Lett. Vol.74
    (1999) p.p.70-72
    [22] J. K. Ho, C. S. Jong, C. C. Chiu, C. N. Huang, C. Y.
    Chen, and K. K. Shih ,” Low-resistance ohmic
    contacts to p-type GaN”,Appl. Phys. Lett. Vol. 74
    (1999) p.p. 1275-1277
    [23] J. K. Sheu, Y. K. Su, G. C. Chi, P. L. Koh, M. J.
    Jou, C. M. Chang, C. C. Liu, and W. C. Hung, “High-
    transparency Ni/Au ohmic contact to p-type
    GaN”,Appl. Phys. Lett. Vol. 74 (1999) p.p. 2340-2342
    [24] R. H. Horng, D. S. Wuu, Y.C. Lien, and W. H. Lan ,”
    Low-resistance and high-transparency Ni/indium tin
    oxide ohmic contacts to p-type GaN”,Appl. Phys.
    Lett. Vol. 79 (2001) p.p. 2925-2927
    [25] E. Fred Schubert, Light-Emitting Diodes. Cambridge
    University Press 2006
    [26] S. R. Jeon, Y. H. Song, H. J. Jang, G. M. Yang, S. W.
    Hwang, and S. J. Son,” Lateral current spreading in
    GaN-based light-emitting diodes utilizing tunnel
    contact junctions”, Appl. Phys. Lett. Vol.78 (2001)
    p.p. 3265-3267
    [27] S. J. Wang, S. L. Chen, K. M. Uang, W. C. Lee, T. M.
    Chen, C. H. Chen, and B. W. Liou, “The use of
    transparent conducting indium-zinc oxide film as a
    current spreading layer for vertical-structured high-
    power GaN-based light-emitting diodes”,IEEE
    PHOTONICS TECHNOLOGY LETTERS, Vol. 18(2006) P.P.1146-
    1148
    [28] C. J. Tun, J. K. Sheu, B. J. Pong, M. L. Lee, M. Y.
    Lee, C. K. Hsieh, C. C. Hu, and G. C. Chi ,
    “Enhanced light output of GaN-based power LEDs with
    transparent Al-doped ZnO current spreading
    laye”,IEEE PHOTONICS TECHNOLOGY LETTERS, Vol. 18,
    (2006) P.P 274-276
    [29] H. Kim, J. M. Lee, C. Huh, S. W.Kim, D. J. Kim, S. J.
    Park, and H. Hwang,” Modeling of a GaN-based light-
    emitting diode for uniform current spreading”, Appl.
    Phys. Lett. Vol.77 (2000) p.p. 1903-1904
    [30] H. Kim, S. J. Park, and H. Hwang, “Design and
    Fabrication of Highly Efficient GaN-Based Light-
    Emitting Diodes ”,IEEE TRANSACTIONS ON ELECTRON
    DEVICES,, Vol. 49 (2002) p.p. 1715-1721
    [31] M. K. Kelly, O. Ambacher, B. Dahlheimer, G. Groos, R.
    Dimitrov, H. Angerer, and M. Stutzmann ,” Optical
    patterning of GaN films”,Appl. Phys. Lett. Vol. 69
    (1996) p.p.1749-1751
    [32] C. R. Miskys, M. K. Kelly, O. Ambacher, and M.
    Stutzmann ,” Freestanding GaN-substrates and
    devices”, phys. stat. sol. (c) vol.6 (2003) p.p.
    1627-1650
    [33] O. Ambacher, M. S. Brandt, R. Dimitrov, T. Metzger,
    M. Stutzmann, A. Fischer , A. Miehr, A. Bergmaier
    ,and G. Dollinger ,” Thermal stability and desorption
    of Group III nitrides prepared by metal organic
    chemical vapor deposition”,J. Vac. Sci. Technol. B
    vol.14(1996) p.p. 3532-3542
    [34] William Sam Wong” Integration of GaN Thin Films with
    Dissimilar Substrate Materials by Wafer Bonding and
    Laser Lift-off” 1999
    [35] C. F. Chu, F.I Lai, J. T. Chu, C. C. Yu, C. F. Lin,
    H. C. Kuo, and S. C. Wang, “Study of GaN light-
    emitting diodes fabricated by laser lift-off
    technique”,J. Appl Phys. Vol. 95 (2004) p.p. 3916-
    3922
    [36] L. Zilan, H. Xiaodong, C. Ke, N. Ruijuan, L. Xuhui,
    Z. Xiaoping, Y. Tongjun, Z. Bei, C. Song, Y. Zhijian,
    C. Zhizhong, and Z. Guoyi, “Preparation of GaN-based
    cross-sectional TEM specimens by laser lift-off”
    ,Micron Vol. 36 (2005) p.p. 281–284
    [37] B. S. Tan, S. Yuan, and X. J. Kang ,” Performance
    enhancement of InGaN light-emitting diodes by laser
    lift-off and transfer from sapphire to copper
    substrate”,Appl. Phys. Lett. Vol.84 (2004) p.p.2757-
    2759
    [38] J. T. CHU, H. W. HUANG, C. C. KAO, W. D. LIANG, F.I
    LAI,C. F. CHU, H. C. KUO and S. C. WANG,
    “Fabrication of Large-Area GaN-Based Light-Emitting
    Diodes on Cu Substrate”,Jpn. J. Appl. Phys. Vol.44
    (2005) p.p.2509-2511
    [39] S. J. Wang, T. M. Chen, K. M. Uang, S. L. Chen, T. S.
    Hsiao, S. C. Chang, H. Y. Kuo ,and B. W. Liou, “A
    Vertical-Structured Ni/GaN Schottky Barrier Diode
    Using Electroplating Nickel Substrate”,Jpn. J. Appl.
    Phys. Vol. 45(2006), pp. L555-L558
    [40] R. H. Horng , C. E. Lee, S. C. Hsu, S. H. Huang , C.
    C. Wu , C. Y. Kung ,and D. S. Wuu, “High-power GaN
    light-emitting diodes with patterned copper
    substrates by electroplating”,physic status solidi(a)
    (2004) p.p. 2786 – 2790
    [41] C. F. Chu, C. C. Yu, H. C. Cheng, C. F. Lin and S. C.
    Wang,” Comparison of p-Side Down and p-Side Up GaN
    Light-Emitting Diodes Fabricated by Laser Lift-Off”,
    Jpn. J. Appl. Phys. vol 42(2002) p.p.L147-L150

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