工具機加工出零件外型，因外在因素影響，導致伺服落後，而產生輪廓誤差。如何有效的降低輪廓誤差，在本研究針對線性馬達五軸工具機由座標轉換關係所得雙軸X軸、Y軸、Z軸、B軸與C軸所構成NURBS曲面輪廓路徑，並透過理想曲線與實際曲線之路徑的各軸誤差，可獲得各軸軌跡追蹤誤差，並設計多軸交叉耦合控制器架構，進行雙軸X軸與Y、Z軸輪廓誤差補償。在數控雙軸分度盤所移動距離與角度有直接之關聯性，然B、C軸為個別在二維面上之角度改變，故各軸無法使用交叉耦合控制器進行補償，將個別設計一補償器控制架構進行補償。將多軸同動交叉耦合控制器架構與B、C軸補償器控制架構，並設計一線性馬達五軸工具機同動補償器控制架構進行補償。在線性馬達五軸工具機同動補償器控制架構中，單軸伺服迴路設計一速度迴路IP控制器架構，可消除穩態誤差，有利於抑制雜訊，能有較低震盪特性且無超越量的快速響應，達到精確的控制。
系統鑑別方面，將裝配完成線性馬達五軸工具機，以PC-based為控制器，利用輸入Pulse訊號並且擷取系統響應輸出Pulse訊號，再利用MATLAB系統鑑別工具（System Identification Toolbox）對雙軸X軸、Y、Z軸與數控雙軸分度盤B、C軸做系統的鑑別，並且用最小平方模型(ARX模型)，鑑別出符合此系統的數學模型。系統鑑別出各軸馬達轉移函數與參數值，並使用多軸交叉耦合控制器與B、C軸補償控制器改善各軸伺服落後情形，並降低輪廓誤差量，達至NURBS曲面在線性馬達五軸工具機之輪廓誤差補償。

The machine tool cuts the component contour. Due to external factors, the servo will moved imprecisely and causes a contour error. How to effectively reduce the contour error will be illustrated in this research. The main idea of this research is to focus on NURBS curve derivation from the five-axis linear motor machine deviation. Besides, we can obtain the deviation of each axis by tracking the moving path. This research also designs a Multi-axis cross-couple controller in order to compensation the contour error of dual-axis X-axis and Y, Z-axis. CNC rotary tables’ moving distance has a strong connection with the angle. The angle changes on 2D with B, C axis so it can’t make compensation by cross-couple controller in each axle. We will design a compensation device in our research structure and implement on the frameworks of multi-axis cross-coupled controller and B, C-axis compensator controller. We also design a single-axis speed loop IP servo controller structure which eliminates steady-state error and it is conducive to suppress noise, too. Therefore, the characteristic of turbulence is lower and it makes the control precisely.
For System Identification, the composed Five-axis linear motor machine tool is controlled by PC-based controller. It will make use of the input pulse signal and capture the system response in order to output another pulse signal. And it also makes use of the MATLAB System Identification Toolbox to identify the double X-axis, Y, Z axis and CNC rotary tables’ two-axis indexing plate B, C-axis. It uses least-squares model (ARX model) to identify a mathematical model and fit in with this system. The system identifies the different axis motor transfer function and parameter values. It uses Multi-axis cross-couple controller and B, C axis compensation controller to improve the situation of each axis's moving error and lower contouring errors in order to compensate NURBS curves/surfaces deviation on the Five-axis linear motor machine tool's profile.

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