| 研究生: |
李翊綺 Li, Yi-Chi |
|---|---|
| 論文名稱: |
球面透明物質之曲率半徑、中心厚度及折射率量測系統設計 Design of a Measurement System for the Radius of Curvature, Thickness, and Refractive Index of Spherical Transparent Materials |
| 指導教授: |
劉建聖
Liu, Chien-Sheng |
| 學位類別: |
碩士 Master |
| 系所名稱: |
工學院 - 機械工程學系 Department of Mechanical Engineering |
| 論文出版年: | 2024 |
| 畢業學年度: | 112 |
| 語文別: | 中文 |
| 論文頁數: | 146 |
| 中文關鍵詞: | 光學檢測 、透明物質 、曲率半徑 、厚度 、折射率 |
| 外文關鍵詞: | Optical inspection, Spherical transparent materials, Radius of curvature, Thickness, Refractive index |
| 相關次數: | 點閱:37 下載:1 |
| 分享至: |
| 查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報 |
現今的光學量測方法只有部分技術能量測厚度與折射率,通常僅適用於極薄物質或單層特性的個別量測,少部分研究雖然能夠同時量測球面透明物質的曲率半徑、中心厚度和折射率,但這些方法往往成本高昂,限制了其廣泛應用。本論文以光學基本定律為基礎,提出一套新穎的光學量測方法,透過簡易的光路架構搭配歪斜光追跡,將量測目標從平面待測物延伸至球面待測物,不僅能同時量測出厚度與折射率,也能量測球面之曲率半徑,以提升其應用範圍。
首先,本量測系統透過齊次座標轉換矩陣定義每個介面座標,再搭配歪斜光線追跡建立數學模型,接著,利用 Z 軸電動位移平台上下移動球面待測物,使得量測光線接觸至待測物表面的入射角發生變化,產生兩個入射點的不同光路,由感測器擷取從待測物各邊界表面反射與折射的光斑影像,透過結合最大值法與灰度重心法的影像處理技術計算光點座標,再將此座標資訊代回數學模型中以計算所求未知數。
本論文使用MATLAB建立量測系統之數學模型並驗證正、逆向數學模型,利用ZEMAX光學模擬軟體建立系統架構,初步驗證系統以及影像處理方法之可行性,並透過SOLIDWORK繪圖軟體確立各元件的架設位置。系統之量測範圍為 100 mm ≤ 曲率半徑 R ≤ 940 mm 、1 mm ≤ 中心厚度 t ≤ 10 mm 以及 1 ≤ 折射率 n ≤ 3.6,且本系統在量測範圍內的曲率半徑、中心厚度以及折射率之最佳精度分別為 0.01 mm、0.0001 mm 與 0.001。
經模擬結果證實,本量測系統可在設定的量測範圍內,達到同時量測曲率半徑、中心厚度及折射率,也藉由模擬驗證系統的正確性與穩定性。最後將量測系統實際架設於光學桌,並藉由校正方法補償系統安裝誤差後,進行實際實驗與分析,以此驗證本系統實際的量測精度與重複性。
In contemporary optical measurement techniques, only a few methods could measure both thickness and refractive index of spherical transparent materials simultaneously, such methods are often prohibitively expensive. This paper proposes an innovative optical measurement method based on fundamental optical principles. A simple optical path setup combined with skew ray tracing achieves the simultaneous measurement of the radius of curvature, central thickness, and refractive index of spherical transparent materials.
Firstly, the measurement system establishes a mathematical model using homogeneous transformation matrices combined with skew ray tracing. The spherical object to be measured is moved up and down along the Z-axis using a motorized displacement platform, creating different optical paths from two incident points. The sensor captures the light spot images, and by employing image processing techniques that combine the maximum method and the grayscale centroid method, the coordinates of the light spots are calculated. These coordinates are then substituted back into the mathematical model to determine the unknown parameters.
In this paper, MATLAB is used to establish and verify the mathematical model of the measurement system in both forward and reverse directions. ZEMAX optical simulation software is utilized to construct the system architecture, preliminarily confirming the feasibility of the system and the image processing method. Additionally, SOLIDWORKS drawing software is employed to determine the installation positions of various components. Simulation results confirm that within the designated measurement range, the system can simultaneously measure the radius of curvature, central thickness, and refractive index of the spherical object. The accuracy and stability of the system are also validated through simulations. Finally, a calibration method is implemented to compensate for installation errors, followed by actual experiments and analysis to validate the practical measurement accuracy and repeatability of the system.
[1] M. Kogel‐Hollacher, M. Breier, D. Schröder et al., “The Next Level–Controlled Conformal Coating Processes: Intelligent Combination of Sensor Technologies for Calibrated Inspection of Coating Thickness and Fault Detection–Directly Integrated into the Production Line,” Optik & Photonik, vol. 12, no. 3, pp. 18-21, 2017.
[2] R. Hao, L. Zhu, Z. Li et al., "A Miniaturized and Fast System for Thin Film Thickness Measurement," Applied Sciences, vol. 10, no. 20, doi: 10.3390/app10207284.
[3] P. J. De Groot, “A Review of Selected Topics in Interferometric Optical Metrology,” Reports on Progress in Physics, vol. 82, no. 5, p. 056101, 2019.
[4] B. Munkhbat, P. Wróbel, T. J. Antosiewicz et al., “Optical Constants of Several Multilayer Transition Metal Dichalcogenides Measured by Spectroscopic Ellipsometry in the 300–1700 Nm Range: High Index, Anisotropy, and Hyperbolicity,” ACS photonics, vol. 9, no. 7, pp. 2398-2407, 2022.
[5] Y. Wang, L. Qiu, Y. Song et al., “Laser Differential Confocal Lens Thickness Measurement,” Measurement Science and Technology, vol. 23, no. 5, p. 055204, 2012.
[6] M. A. Ghita, C. Caruntu, A. E. Rosca et al., “Reflectance Confocal Microscopy and Dermoscopy for in Vivo, Non-Invasive Skin Imaging of Superficial Basal Cell Carcinoma,” Oncology letters, vol. 11, no. 5, pp. 3019-3024, 2016.
[7] S. Mohan, E. Kato, J. K. Drennen Iii et al., “Refractive Index Measurement of Pharmaceutical Solids: A Review of Measurement Methods and Pharmaceutical Applications,” Journal of Pharmaceutical Sciences, vol. 108, no. 11, pp. 3478-3495, 2019.
[8] A. C. Fischer, F. Forsberg, M. Lapisa et al., “Integrating Mems and Ics,” Microsystems & Nanoengineering, vol. 1, no. 1, pp. 1-16, 2015.
[9] Y. Lou, “Non-Contact High Precision Measurement of Surface Form Tolerances and Central Thickness for Optical Elements,” vol. 7656, pp. 1241-1245.
[10] C.-H. Liu, C.-C. Liu, and W.-C. Huang, “Application of Astigmatic Method and Snell’s Law on the Thickness and Refractive Index Measurement of a Transparent Plate,” Microsystem Technologies, vol. 19, no. 11, pp. 1761-1766, 2013.
[11] C. Velzel and J. Masajada, “Superresolution Phase Image Microscope,” Optica Applicata, vol. 29, pp. 293-300, 1999.
[12] A. Davies and T. L. Schmitz, “Defining the Measurand in Radius of Curvature Measurements,” vol. 5190, pp. 134-145.
[13] C.-S. Liu, W.-Y. Shih, Y.-C. Li et al., “Design of Thicknesses and Refractive Indexes Measurement System Combined with Auto-Focus System for Multilayer Transparent Samples,” Optics & Laser Technology, vol. 177, p. 111188, 2024.
[14] C.-M. Jan, C.-S. Liu, C.-L. Chen et al., “Optical Interference System for Simultaneously Measuring Refractive Index and Thickness of Slim Transparent Plate,” Optics and Lasers in Engineering, vol. 145, p. 106668, 2021.
[15] C.-S. Liu, T.-Y. Wang, and Y.-T. Chen, “Novel System for Simultaneously Measuring the Thickness and Refractive Index of a Transparent Plate with Two Optical Paths,” Applied Physics B, vol. 124, no. 9, p. 180, 2018.
[16] C.-S. Liu and T.-Y. Weng, “Thickness and Refractive Index Measurement System for Multilayered Samples,” IEEE Access, vol. 9, pp. 21474-21480, 2021.
[17] C.-S. Liu and C.-Y. Jen, “Optical Inspection System for Simultaneously Measuring Thicknesses and Refractive Indexes of Multilayered Transparent Substrates,” vol. 12137, pp. 177-184.
[18] J. N. Dukes and G. B. Gordon, “A Two-Hundred-Foot Yardstick with Graduations Every Microinch,” Hewlett-Packard Journal, vol. 21, no. 2, pp. 2-8, 1970.
[19] P. Hariharan, Basics of Interferometry, Elsevier, 2010.
[20] J. Sun, X. Li, H. Zhang et al., “A Method for Measuring and Calibrating the Thickness of Thin Films Based on Infrared Interference Technology,” Results in Physics, vol. 51, p. 106727, 2023.
[21] J. Jin, J. W. Kim, C.-S. Kang et al., “Thickness and Refractive Index Measurement of a Silicon Wafer Based on an Optical Comb,” Optics Express, vol. 18, no. 17, pp. 18339-18346, 2010.
[22] J. Park, J. Jin, J. Wan Kim et al., “Measurement of Thickness Profile and Refractive Index Variation of a Silicon Wafer Using the Optical Comb of a Femtosecond Pulse Laser,” Optics Communications, vol. 305, pp. 170-174, 2013.
[23] J. Jin, J. Park, J.-A. Kim et al., “Physical Thickness and Group Refractive Index Measurement of Bare Glass Panels Using the Optical Comb for Display Industry,” in Imaging and Applied Optics 2015, p. JT5A.45, 2015.
[24] K. A. Sumihara, S. Okubo, M. Okano et al., “Ultra-Precise Determination of Thicknesses and Refractive Indices of Optically Thick Dispersive Materials by Dual-Comb Spectroscopy,” Optics Express, vol. 30, no. 2, pp. 2734-2747, 2022.
[25] K. Zhang, L. Tao, W. Cheng et al., “Air Etalon Facilitated Simultaneous Measurement of Group Refractive Index and Thickness Using Spectral Interferometry,” Applied Optics, vol. 53, no. 31, pp. 7483-7486, 2014.
[26] J. Park, J. Bae, J.-A. Kim et al., “Physical Thickness and Group Refractive Index Measurement of Individual Layers for Double-Stacked Microstructures Using Spectral-Domain Interferometry,” Optics Communications, vol. 431, pp. 181-186, 2019.
[27] J. Park, J. Bae, Y.-S. Jang et al., “A Novel Method for Simultaneous Measurement of Thickness, Refractive Index, Bow, and Warp of a Large Silicon Wafer Using a Spectral-Domain Interferometer,” Metrologia, vol. 57, no. 6, p. 064001, 2020.
[28] M. Lee, J. Park, and J. Kim, “Line Spectroscopic Reflectometry for Rapid and Large-Area Thickness Measurement,” Optics Express, vol. 31, no. 20, pp. 32241-32252, 2023.
[29] K. Zhang, O. Sasaki, S. Luo et al., “Phase Refractive Index Measurement of Thick Glass Plates with a Spectrally Resolved Interferometer,” Optics Continuum, vol. 2, no. 3, pp. 683-696, 2023.
[30] K. Xue, J. Wang, Y. Zhao et al., “Measurement of Glass Thickness and Refractive Index Based on Spectral Interference Technology,” Applied Optics, vol. 60, no. 26, pp. 7983-7988, 2021.
[31] S. Chen, W. Lu, J. Guo et al., “Flexible and High-Resolution Surface Metrology Based on Stitching Interference Microscopy,” Optics and Lasers in Engineering, vol. 151, p. 106915, 2022.
[32] D. W. Kim, M. Kwon, S. Park et al., “Measurement of the Thickness and Refractive Index of a Thin Film by Analyzing Reflected Interference Fringes,” Applied Optics, vol. 62, no. 30, pp. 8018-8024, 2023.
[33] M. Kogel-Hollacher, T. Nicolay, S. Mieth et al., “Interferometric Surface Inspection with Movable Measurement Spot: High-Speed Oct Imaging for Thickness and Topography in Industry,” vol. 12607, p. 1260702.
[34] T. Kubota, M. Nara, and T. Yoshino, “Interferometer for Measuring Displacement and Distance,” Optics letters, vol. 12, no. 5, pp. 310-312, 1987.
[35] B. Maniscalco, P. M. Kaminski, and J. M. Walls, “Thin Film Thickness Measurements Using Scanning White Light Interferometry,” Thin Solid Films, vol. 550, pp. 10-16, 2014.
[36] J. J. Fendley, “Measurement of Refractive Index Using a Michelson Interferometer,” Physics Education, vol. 17, no. 5, p. 209, 1982.
[37] J. Na, H. Y. Choi, E. S. Choi et al., “Self-Referenced Spectral Interferometry for Simultaneous Measurements of Thickness and Refractive Index,” Applied Optics, vol. 48, no. 13, pp. 2461-2467, 2009.
[38] X. Lu, X. Wang, Y. Zhu et al., “Simultaneous Measurement of Thickness and Group Refractive Index Based on Differential White Light Interferometry,” IEEE Transactions on Instrumentation and Measurement, 2023.
[39] L. Yuan, T. Guo, D. Tang et al., “Simultaneous Film Thickness and Refractive Index Measurement Using a Constrained Fitting Method in a White Light Spectral Interferometer,” Optics Express, vol. 30, no. 1, pp. 349-363, 2022.
[40] J. Park, J. Bae, and J. Jin, “An Interferometric Method for Simultaneous Measurement of Thickness, Refractive Index, and Surface Profile of a Silicon Wafer,” vol. 12221, pp. 167-172.
[41] T. Guo, G. Zhao, D. Tang et al., “High-Accuracy Simultaneous Measurement of Surface Profile and Film Thickness Using Line-Field White-Light Dispersive Interferometer,” Optics and Lasers in Engineering, vol. 137, p. 106388, 2021.
[42] L. A. Selberg, “Radius Measurement by Interferometry,” Optical Engineering, vol. 31, no. 9, pp. 1961-1966, 1992.
[43] D. Karodkar, N. Gardner, B. C. Bergner et al., “Traceable Radius of Curvature Measurements on a Micro-Interferometer,” vol. 5180, pp. 261-273.
[44] B. I. Gramatikov, “Modern Technologies for Retinal Scanning and Imaging: An Introduction for the Biomedical Engineer,” BioMedical Engineering OnLine, vol. 13, no. 1, p. 52, 2014.
[45] I. Mitsuhiro and S. Hiromi, “High-Speed Surface Measurement Using a Non-Scanning Multiple-Beam Confocal Microscope,” Optical Engineering, vol. 38, no. 6, pp. 1035-1040, 1999.
[46] T. Tanaami, S. Otsuki, N. Tomosada et al., “High-Speed 1-Frame/Ms Scanning Confocal Microscope with a Microlens and Nipkow Disks,” Applied Optics, vol. 41, no. 22, pp. 4704-4708, 2002.
[47] J. Bewersdorf, R. Pick, and S. W. Hell, “Multifocal Multiphoton Microscopy,” Optics letters, vol. 23, no. 9, pp. 655-657, 1998.
[48] G. Molesini, G. Pedrini, P. Poggi et al., “Focus-Wavelength Encoded Optical Profilometer,” Optics Communications, vol. 49, no. 4, pp. 229-233, 1984.
[49] X. Zou, X. Zhao, G. Li et al., “Non-Contact on-Machine Measurement Using a Chromatic Confocal Probe for an Ultra-Precision Turning Machine,” The International Journal of Advanced Manufacturing Technology, vol. 90, no. 5, pp. 2163-2172, 2017.
[50] S. Fu, W. S. Kor, F. Cheng et al., “In-Situ Measurement of Surface Roughness Using Chromatic Confocal Sensor,” Procedia CIRP, vol. 94, pp. 780-784, 2020.
[51] T. Liu, J. Wang, Q. Liu et al., “Chromatic Confocal Measurement Method Using a Phase Fresnel Zone Plate,” Optics Express, vol. 30, no. 2, pp. 2390-2401, 2022.
[52] J. Bai, J. Li, X. Wang et al., “A New Method to Measure Spectral Reflectance and Film Thickness Using a Modified Chromatic Confocal Sensor,” Optics and Lasers in Engineering, vol. 154, p. 107019, 2022.
[53] H. Zhang, Z. Li, H. Hu et al., “A Method for Measuring and Adaptively Correcting Lens Center Thickness Based on the Chromatic Confocal Principle,” Results in Physics, vol. 56, p. 107281, 2024.
[54] Q. Yu, Y. Zhang, W. Shang et al., "Thickness Measurement for Glass Slides Based on Chromatic Confocal Microscopy with Inclined Illumination," Photonics, vol. 8, no. 5, doi: 10.3390/photonics8050170.
[55] J. Wu, X. Jiang, L. Jiang et al., “Surface Bilateral Profile Measurement of Curved Transparent Components Based on Chromatic Confocal Sensor,” vol. 12507, pp. 69-74.
[56] D. Pristinski, V. Kozlovskaya, and S. A. Sukhishvili, “Determination of Film Thickness and Refractive Index in One Measurement of Phase-Modulated Ellipsometry,” JOSA A, vol. 23, no. 10, pp. 2639-2644, 2006.
[57] H. Tompkins and E. A. Irene, Handbook of Ellipsometry, William Andrew, 2005.
[58] C. Cobet, “Ellipsometry: A Survey of Concept,” Ellipsometry of Functional Organic Surfaces and Films, pp. 1-27, 2018.
[59] R. W. Collins, "Measurement Technique of Ellipsometry," in Spectroscopic Ellipsometry for Photovoltaics: Volume 1: Fundamental Principles and Solar Cell Characterization, H. Fujiwara and R. W. Collins Eds., Springer International Publishing, pp. 19-58, 2018.
[60] D. Prakash, A. M. Aboraia, M. El-Hagary et al., “Determination of the Optical Constants and Film Thickness of Znte and Zns Thin Films in Terms of Spectrophotometric and Spectroscopic Ellipsometry,” Ceramics International, vol. 42, no. 2, Part A, pp. 2676-2685, 2016.
[61] S. W. Lee, G. Choi, S. Y. Lee et al., “Coaxial Spectroscopic Imaging Ellipsometry for Volumetric Thickness Measurement,” Applied Optics, vol. 60, no. 1, pp. 67-74, 2021.
[62] J. Bae, J. Park, H. Ahn et al., “Optical Method for Simultaneous Thickness Measurements of Two Layers with a Significant Thickness Difference,” Optics Express, vol. 29, no. 20, pp. 31615-31631, 2021.
[63] J. Zhang, L. Shi, R. Zhang et al., “Spectral Interference Ellipsometry for Film Thickness Measurement on Transparent Substrate,” Optics and Lasers in Engineering, vol. 171, p. 107819, 2023.
[64] C.-J. Yu, C.-H. Hung, K.-C. Hsu et al., “Phase-Shift Imaging Ellipsometer for Measuring Thin-Film Thickness,” Microelectronics Reliability, vol. 55, no. 2, pp. 352-357, 2015.
[65] S. Srisuwan, C. Sirisathitkul, and S. Danworaphong, “Validiation of Photometric Ellipsometry for Refractive Index and Thickness Measurements,” MAPAN, vol. 30, no. 1, pp. 31-36, 2015.
[66] S. W. Lee, S. Y. Lee, G. Choi et al., “Co-Axial Spectroscopic Snap-Shot Ellipsometry for Real-Time Thickness Measurements with a Small Spot Size,” Optics Express, vol. 28, no. 18, pp. 25879-25893, 2020.
[67] T. Lohner, E. Szilágyi, Z. Zolnai et al., “Determination of the Complex Dielectric Function of Ion-Implanted Amorphous Germanium by Spectroscopic Ellipsometry,” Coatings, vol. 10, no. 5, p. 480, 2020.
[68] C. Howlader, M. Hasan, A. Zakhidov et al., “Determining the Refractive Index and the Dielectric Constant of Ppdt2fbt Thin Film Using Spectroscopic Ellipsometry,” Optical Materials, vol. 110, p. 110445, 2020.
[69] G. E. Jellison, N. J. Podraza, and A. Shan, “Ellipsometry: Dielectric Functions of Anisotropic Crystals and Symmetry,” Journal of the Optical Society of America A, vol. 39, no. 12, pp. 2225-2237, 2022.
[70] M. Hilfiker, E. Williams, U. Kilic et al., “Elevated Temperature Spectroscopic Ellipsometry Analysis of the Dielectric Function, Exciton, Band-to-Band Transition, and High-Frequency Dielectric Constant Properties for Single-Crystal Znga2o4,” Applied Physics Letters, vol. 120, no. 13, 2022.
[71] M. Fang, H. Gu, Z. Guo et al., “Temperature and Thickness Dependent Dielectric Functions of Mote2 Thin Films Investigated by Spectroscopic Ellipsometry,” Applied Surface Science, vol. 605, p. 154813, 2022.
[72] H. Gu, S. Zhu, B. Song et al., “An Analytical Method to Determine the Complex Refractive Index of an Ultra-Thin Film by Ellipsometry,” Applied Surface Science, vol. 507, p. 145091, 2020.
[73] E. Gnenna, N. Khemiri, M. I. Alonso et al., “Optical Characterization of Sb2s3 Vacuum Annealed Films by Uv–Vis–Nir Spectroscopy and Spectroscopic Ellipsometry: Determining the Refractive Index and the Optical Constants,” Optik, vol. 268, p. 169740, 2022.
[74] X. Zuo, X. Li, C. Wang et al., “Determination of Complex Refractive Index of Plastics from Ultraviolet to Mid-Infrared by Ellipsometry,” Infrared Physics & Technology, vol. 134, p. 104910, 2023.
[75] Y. B. Seo, Y. H. Yun, and K.-N. Joo, “3d Multi-Layered Film Thickness Profile Measurements Based on Photometric Type Imaging Ellipsometry,” International Journal of Precision Engineering and Manufacturing, vol. 17, no. 8, pp. 989-993, 2016.
[76] J. S. Kim, H. M. Park, and K.-N. Joo, “Single Shot Line Profile Measurement of Multi-Layered Film Thicknesses,” International Journal of Precision Engineering and Manufacturing, vol. 21, no. 11, pp. 2089-2094, 2020.
[77] D. H. Kim, Y. H. Yun, and K.-N. Joo, “Lasie: Large Area Spectroscopic Imaging Ellipsometry for Characterizing Multi-Layered Film Structures,” International Journal of Precision Engineering and Manufacturing, vol. 19, no. 8, pp. 1125-1132, 2018.
[78] S. M. F. Nee, “Ellipsometric Analysis for Surface Roughness and Texture,” Applied Optics, Article vol. 27, no. 14, pp. 2819-2831, 1988.
[79] T. V. Vorburger and E. C. Teague, “Optical Techniques for on-Line Measurement of Surface Topography,” Precision Engineering, Article vol. 3, no. 2, pp. 61-83, 1981.
[80] T. V. Vorburger and K. C. Ludema, “Ellipsometry of Rough Surfaces,” Applied Optics, Article vol. 19, no. 4, pp. 561-573, 1980.
[81] D. E. Aspnes, “Expanding Horizons: New Developments in Ellipsometry and Polarimetry,” Thin Solid Films, vol. 455-456, pp. 3-13, 2004.
[82] E. Garcia-Caurel, A. De Martino, J.-P. Gaston et al., “Application of Spectroscopic Ellipsometry and Mueller Ellipsometry to Optical Characterization,” Applied Spectroscopy, vol. 67, no. 1, pp. 1-21, 2013.
[83] M. Losurdo, M. Bergmair, G. Bruno et al., “Spectroscopic Ellipsometry and Polarimetry for Materials and Systems Analysis at the Nanometer Scale: State-of-the-Art, Potential, and Perspectives,” Journal of Nanoparticle Research, vol. 11, no. 7, pp. 1521-1554, 2009.
[84] V. A. Odarich, “Ellipsometric Studies of the Surface Layer of Polished Optical Glass,” Journal of Optical Technology, vol. 75, no. 2, pp. 132-137, 2008.
[85] J. Wang, L. Peng, F. Zhai et al., “Polarized Angle-Resolved Spectral Reflectometry for Real-Time Ultra-Thin Film Measurement,” Optics Express, vol. 31, no. 4, pp. 6552-6565, 2023.
[86] S. Kim, J. Na, M. J. Kim et al., “Simultaneous Measurement of Refractive Index and Thickness by Combining Low-Coherence Interferometry and Confocal Optics,” Optics Express, vol. 16, no. 8, pp. 5516-5526, 2008.
[87] H. Maruyama, T. Mitsuyama, M. Ohmi et al., “Simultaneous Measurement of Refractive Index and Thickness by Low Coherence Interferometry Considering Chromatic Dispersion of Index,” Optical Review, vol. 7, no. 5, pp. 468-472, 2000.
[88] M. Ohmi, H. Nishi, Y. Konishi et al., “High-Speed Simultaneous Measurement of Refractive Index and Thickness of Transparent Plates by Low-Coherence Interferometry and Confocal Optics,” Measurement Science and Technology, vol. 15, no. 8, p. 1531, 2004.
[89] P. D. Lin and T.-t. Liao, “Skew Ray Tracing and Sensitivity Analysis of Geometrical Optics,” Journal of Manufacturing Science and Engineering, vol. 122, no. 2, pp. 338-349, 1999.
[90] P. D. Lin, Advanced Geometrical Optics, Springer, 2017.
[91] P. D. Lin, "Mathematical Background," in Advanced Geometrical Optics, P. D. Lin Ed., Springer Singapore, pp. 3-28, 2017.
[92] P. D. Lin, "Homogeneous Coordinate Notation," in New Computation Methods for Geometrical Optics, P. D. Lin Ed., Springer Singapore, pp. 1-16, 2014.
[93] 蔡忠佑, “稜鏡成像位姿變化之分析與設計prisms Analysis and Design Base on Image Orientation Change”, 國立成功大學機械工程學系, 博士論文, 2007.
[94] P. D. Lin, “Derivative Matrices of a Skew Ray for Spherical Boundary Surfaces and Their Applications in System Analysis and Design,” Applied Optics, vol. 53, no. 14, pp. 3085-3100, 2014.
[95] P. D. Lin, "Skew-Ray Tracing of Geometrical Optics," in Advanced Geometrical Optics, P. D. Lin Ed., Springer Singapore, pp. 29-69, 2017.
[96] N. Otsu, “A Threshold Selection Method from Gray-Level Histograms,” Automatica, vol. 11, no. 285-296, pp. 23-27, 1975.
[97] W. Niblack, An Introduction to Digital Image Processing, Strandberg Publishing Company, 1985.
[98] J. Sauvola and M. Pietikäinen, “Adaptive Document Image Binarization,” Pattern recognition, vol. 33, no. 2, pp. 225-236, 2000.
[99] Y.-T. Pai, Y.-F. Chang, and S.-J. Ruan, “Adaptive Thresholding Algorithm: Efficient Computation Technique Based on Intelligent Block Detection for Degraded Document Images,” Pattern recognition, vol. 43, no. 9, pp. 3177-3187, 2010.
[100] R. M. Haralick, S. R. Sternberg, and X. Zhuang, “Image Analysis Using Mathematical Morphology,” IEEE transactions on pattern analysis and machine intelligence, no. 4, pp. 532-550, 1987.
[101] 翁子堯, “三層透明基板厚度及折射率量測系統與自動對焦顯微鏡之設計 Design of Thickness and Refractive Index Measurement System Auto-Focusing Microscope for Three-Layer of Transparent Substrates”, 國立成功大學機械工程學系, 碩士論文, 2020.
[102] K. Ma, H. Li, H. Yong et al., “Robust Multi-Exposure Image Fusion: A Structural Patch Decomposition Approach,” IEEE Transactions on Image Processing, vol. 26, no. 5, pp. 2519-2532, 2017.
[103] J. Liu, G. Wu, J. Luan et al., “Holoco: Holistic and Local Contrastive Learning Network for Multi-Exposure Image Fusion,” Information Fusion, vol. 95, pp. 237-249, 2023.
[104] A. A. Goshtasby, “Fusion of Multi-Exposure Images,” Image and Vision Computing, vol. 23, no. 6, pp. 611-618, 2005.
[105] A. P. Moore, S. J. D. Prince, J. Warrell et al., “Superpixel Lattices,” in 2008 IEEE Conference on Computer Vision and Pattern Recognition, pp. 1-8, 2008.
[106] R. Achanta, A. Shaji, K. Smith et al., “Slic Superpixels Compared to State-of-the-Art Superpixel Methods,” IEEE transactions on pattern analysis and machine intelligence, vol. 34, no. 11, pp. 2274-2282, 2012.
[107] W. Shu, L. Huchuan, Y. Fan et al., “Superpixel Tracking,” in 2011 International Conference on Computer Vision, pp. 1323-1330, 2011.
[108] M. Guizar-Sicairos, S. T. Thurman, and J. R. Fienup, “Efficient Subpixel Image Registration Algorithms,” Optics letters, vol. 33, no. 2, pp. 156-158, 2008.
[109] K. Jensen and D. Anastassiou, “Subpixel Edge Localization and the Interpolation of Still Images,” IEEE Transactions on Image Processing, vol. 4, no. 3, pp. 285-295, 1995.
[110] Y.-S. Ghim, H.-G. Rhee, and A. Davies, “Simultaneous Measurements of Top Surface and Its Underlying Film Surfaces in Multilayer Film Structure,” Scientific reports, vol. 7, no. 1, p. 11843, 2017.
[111] Y.-S. Ghim, Y. B. Seo, K.-N. Joo et al., “Single-Shot Spectrally Resolved Interferometry for the Simultaneous Measurement of the Thickness and Surface Profile of Multilayer Films,” Optics Express, vol. 29, no. 16, pp. 25524-25534, 2021.
[112] J. Park, J. Bae, Y.-S. Jang et al., “Thickness Measurements and Uncertainty Evaluation of a Multilayer Thin-Film Sample Using Auxiliary Single-Layer Samples,” Metrologia, vol. 60, no. 2, p. 025007, 2023.