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研究生: 黃銘揚
Huang, Ming-Yang
論文名稱: 矽基板製備陽極氧化鋁核殼結構單晶二硒化銅銦二極體及光感測器應用
Single crystal Core-shell CuInSe2 diode synthesis for photodetector with AAO template on silicon substrate
指導教授: 洪茂峰
Houng, Mau-Phon
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 微電子工程研究所
Institute of Microelectronics
論文出版年: 2018
畢業學年度: 106
語文別: 中文
論文頁數: 95
中文關鍵詞: 陽極氧化鋁模板銅銦硒奈米柱二極體核殼結構光感測器
外文關鍵詞: Thin film AAO template, CuInSe2 nanorod, core-shell, photodetector
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  • 本篇論文期望利用薄膜式陽極氧化鋁模板製備出核殼結構單晶二硒化銅銦奈米柱的元件。期望改善塊材式陽極氧化鋁易碎良率低的問題,並且以低成本且低溫的電化學沉積技術,製備大面積的奈米柱陣列,利用奈米柱結構相較於平面式結構其高比表面積的優勢,配合核殼結構的改善,達到更佳的光電效果,爾後應用於各項光感測器的元件當中。
    本篇論文成功製備出單晶二硒化銅銦奈米柱,以電鍍液pH1.7、電鍍電壓-1.2V為最佳參數,其製備完成之CIS晶粒大小為43.4nm,並且以(112)晶相為優選的單晶結構,所製備完成的CIS/n-Si二極體具備整流特性在2V為22.2mA/cm2,在-2V為-1.72x10-4 mA/cm2,再經過核殼結構的改善過後,在2V的電流提升到1270 mA/cm2。而最佳電鍍條件的CIS二極體,應用於光感測方面,其光響應度為1.57A/W,再經過核殼結構的改善後提升到12.76A/W,有確實改善光響應度且達到光感測的效果。

    In recent years, one noticeable concept of automobile electronics is autopilot. LiDAR is the main technique of autopilot for sensing obstacles around the automobiles which consists of laser, photodetector, and images processing.
    In this study, we utilize nanorod structure to fabricate a highly sensitive photodetector to achieve the multi-point detection like LiDAR. We realize the photodetector by electrochemical deposition assisted with a thin film anodic aluminum oxide(AAO) template made by anodic polarization process. The pore of the AAO template is further widen and smooth with the step down voltage anodization and KCl cathodic polarization. CuInSe2(CIS) is a prominent material for optical absorption, therefore we modulate the pH value of plating solution and plating voltage for manufacturing high quality single crystal CIS nanorod through the AAO template.
    The best plating pH value and plating voltage for CIS nanorod in this study is 1.7 and -1.2V which results in a single crystal structure CIS nanorod with grain size 43.4nm after rapid thermal annealing(RTA) process.
    CIS/n-silicon diode exhibits a tremendous rectifying characteristic of forward current density 22.2 mA/cm2 and reverse current density -1.72x10-4 mA/cm2. CIS/n-silicon diode photoresponsivity enhances from 1.57 to 12.76A/W with ITO core-shell structure.
    This work demonstrates a low cost method to fabricate a nanorod structure photodetector with highly photosensitivity.

    摘要 I SUMMARY II 誌謝 X 目錄 XIII 表目錄 XV 圖目錄 XVI 第一章緒論 1 1-1前言 1 1-2光電二極體概論 4 1-2-1太陽能電池概論 5 1-2-2光感測器概論 8 1-2-3發光二極體概論 9 1-2-4二硒化銅銦材料介紹 10 1-3陣列式奈米柱 15 1-3-1奈米結構材料介紹 15 1-3-2奈米柱製備 17 1-3-3陽極氧化鋁模板結構與特性介紹 18 1-3-4陽極氧化鋁模板簡易製備過程簡介 20 1-3-5陽極氧化鋁輔助化合物材料填孔成柱介紹 21 1-3-6 CuInSe2奈米柱電化學沉積介紹 23 1-4 研究動機 26 第二章理論基礎 28 2-1陽極氧化鋁模板介紹 28 2-1-1陽極氧化鋁模板簡介 28 2-1-2陽極氧化鋁模板結構特性介紹 29 2-1-3陽極氧化鋁生成反應式介紹 32 2-1-4陽極氧化鋁模板孔洞形成介紹 33 2-1-5薄膜式與塊材鋁箔陽極氧化鋁的比較 34 2-2二硒化銅銦材料 36 2-2-1二硒化銅銦材料特性介紹 36 2-2-2二硒化銅銦材料製備方式介紹 38 2-3電化學沉積介紹 39 2-3-1電化學沉積機制及系統介紹 39 2-3-2電化學沉積晶體之結晶成長過程介紹 41 2-3-3影響電鍍主要因素介紹 43 2-4 PN接面二極體理論介紹 44 2-4-1 PN接面 44 2-4-2核殼結構奈米柱元件介紹 47 第三章實驗方法與量測儀器介紹 49 3-1 實驗流程 49 3-1-1實驗流程圖 49 3-1-2實驗步驟介紹 51 3-2實驗藥品及參數介紹 54 3-2-1實驗藥品及供應商介紹 54 3-2-2實驗參數介紹 56 3-3量測儀器介紹 57 3-3-1 X光繞射儀(X-Ray Diffractometer; XRD) 57 3-3-2場發射掃描式電子顯微鏡(Field Emission-Scanning Electron Microscope, FE-SEM) 59 3-3-3能量分析光譜儀(Energy Dispersive Spectrometer ; EDS) 61 3-3-4接觸角量測儀 (Contact angle) 61 3-3-5熱蒸鍍系統 (Thermal Evaporation deposition) 63 第四章結果與討論 64 4-1實驗架構 64 4-2薄膜式陽極氧化鋁模板製作 65 4-3電鍍CuInSe2奈米柱參數探討 67 4-4 CIS二極體結構分析 78 4-5 CIS二極體電性量測 79 4-6核殼結構製作 84 4-7光感測器應用 87 第五章結論 89 第六章未來展望 91 參考文獻 92

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