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研究生：	陳冠維 Chen, Guan-Wei
論文名稱：	掃描式探針顯微鏡摩擦力檢測應用於不鏽鋼氮離子植佈技術之建立及材料微／奈米機械性質檢測 Applications of the Scanning Probe Microscope to Examine the 304 Stainless steel Implanted with Nitrogen Plasma:Inspection Techniques for Micro/Nano Mechanical Properties and Tribological Behavior
指導教授：	林仁輝 Lin, Jen-Fin
學位類別：	碩士 Master
系所名稱：	工學院 - 機械工程學系 Department of Mechanical Engineering
論文出版年：	2003
畢業學年度：	91
語文別：	中文
論文頁數：	99
中文關鍵詞：	摩擦力、奈米機械性質、離子植佈、奈米壓痕、形貌效應、刮痕、掃描式探針顯微鏡
外文關鍵詞：	Ion implantation, SPM, AFM, FFM, scratch, nano mechanical properties, nano indentation
相關次數：	點閱：148 下載：4
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本論文主要可分為三個部份：第一部份發明了一種數據處理的方式，成功地消除了樣品表面形貌對掃瞄式探針顯微術摩擦力顯微鏡的影響，因此增強了摩擦力顯微鏡在表面材料定性分析上的準確度。第二部份則是目前國內極少研究的電漿浸泡式離子植入金屬材料表面改質技術之研究，並針對離子注入之製程參數對改質層之影響做了完整地討論。第三部份為建立微／奈米機械性質的量測方法，藉由奈米壓痕、刮痕試驗來得到改質層之硬度(Hardness)、楊氏模數(Young’s modulus)與改質後試件之抗磨耗性能。
掃瞄式探針顯微術在奈米科技的發展上一直扮演著相當重要的角色，利用其極高的靈敏度與原子級的解析度，我們可根據不同的材料，摩擦力也不相同的原理，得到在材料表面的摩擦力分佈，進一步分析出材料在表面的分佈與變化情形。但是一般的試片並無法達到完全平整的理想狀態，所以當使用摩擦力顯微鏡時，試片表面的粗糙度、曲度等等微細形貌變化也會嚴重影響到摩擦力的分佈狀況，使分析表面材質變化時容易產生誤判。
本研究已建立一套方法，從形貌變化與摩擦力變化中找出關係，利用數據後處理的方式把形貌在摩擦力上的影響程度減至最小，讓我們可以正確地由摩擦力分佈來判斷表面材質的變化情形，以便對離子植入後所形成的改質層做材料的定性分析。由於是數據後處理，無論新舊機台量測資料皆可使用是本方法最大的特色。不同於需要超高真空環境才能工作的貴重分析儀器，摩擦力顯微鏡提供了另一種在常壓下簡單又快速的材料定性分析方法。
離子植入材料製作部份，選定浸入式離子植入法，將氮離子注入304不鏽鋼內以增加其強度與抗腐蝕性能。利用上述摩擦力顯微鏡之方法，配合輝光放電分光儀(Glow discharge spectroscopy, GDS)的縱深分析來驗證改質層厚度定性分析之結果。在量測其機械性質時，使用奈米測試機做奈米壓痕、奈米刮痕試驗，可減少底材效應，以得到較正確的改質層機械性質，並且完整地探討植入溫度、植入電壓與植入時間三組製程參數對改質層之厚度以及機械性質的影響，以便歸納出最佳的製程條件，來提升離子植入材料表面改性之效果。
目前本實驗已經成功地把形貌變化對摩擦力顯微鏡的影響去除，並將摩擦力顯微鏡的定性分析應用於離子植入後的改質層以得到厚度。而在製程方面，304不鏽鋼在經過離子植入後，機械性質有明顯的提升。本實驗並藉由奈米機械性質與改質層定性分析的量測，得到了植入溫度、植入電壓、植入時間對其機械性質與改質層厚度之影響。

There are three parts in this study. First is the invented signal processing method used to eliminate the effect of surface profile to friction force mode of Scanning Probe Microscope (SPM). This method improves the accuracy of analysis for sample surface material successfully. Second is the research for technology of plasma immersion ion implantation which is used rarely. This study gives detail discussion for effects of processing parameters of ion implantation to the formation layer. Third is establishing measuring procedure for micro/nano mechanical properties. The procedure provides hardness, Young’s modulus, and wear resistance of formation layer by indentation and scratch test in nanometer level.
SPM plays important rule in the development of nanotechnology because of its atomic leveled sensibility and resolution. We can analyze the distribution of sample’s material according to the different friction force due to different material. However, the friction force depends on not only smaple’s material but also surface roughness, curvature…etc. There is no sample with exactly flat surface in SPM scale. This research develops a method to eliminate the effect of friction force due to surface profile according to the relation between them. The friction force data can be used to obtain the information of surface material distribution and the qualitative analysis of formation layer through signal processing. This method is a signal post-processing so that it is suitable for every SPM.
For the plasma immersion ion implantation procedure, nitrogen ion is chosen to dope 304 stainless steel in order to increase its strength and corrosion resistance. To examine the formation layer after ion implantation, we use both friction mode of SPM and depth profile analysis by Glow Discharge Spectroscopy (GDS). To measure the mechanical properties, we use indentation and scratch test in nanometer level to avoid from substrate effect. We discuss how the procedure parameters, such as bios voltage, temperature, and duration, affect thickness and mechanical properties of formation layer. We also induce the optimal procedure parameters for ion implantation.
This study eliminates profile effect to friction force of SPM and applies to analyze thickness of formation layer. In the other hand, the measuring method for mechanical properties in nanometer scale is established and it is applied to optimize the procedure parameters such as bios voltage, temperature, and duration.

中文摘要..................................................I
英文摘要.................................................Ⅲ
致謝.....................................................Ⅳ
目錄.....................................................Ⅴ
表目錄...................................................Ⅶ
圖目錄...................................................Ⅷ
符號表...................................................Ⅸ

第一章 緒論...............................................1
    1-1前言...............................................1
    1-2文獻回顧...........................................3
    1-3研究目的及內容.....................................5
第二章 離子植入強化、摩擦力定性分析與奈米機械性質量測理論.7
    2-1離子植入材料表面改性...............................7
       2-1-1金屬材料強化原理..............................7
       2-1-2金屬材料強化機制..............................8
       2-1-3電漿浸泡式離子植入(PIII).....................11
       2-1-4電漿產生原理.................................12
       2-1-5電子迴旋共振微波電漿源(ECR microwave plasma
            source)......................................15
    2-2掃瞄探針顯微術....................................17
        2-2-1掃瞄式作用力顯微術..........................17
       2-2-2摩擦力顯微術用於材料表面定性分析之修正.......20
    2-3奈米壓痕試驗之硬度與彈性模數理論建立..............24
第三章 實驗方法及步驟....................................45
    3-1實驗目的..........................................45
    3-2離子植入表面改質..................................45
       3-2-1離子植入系統設備.............................45
       3-2-2試驗材料.....................................46
       3-2-3步驟.........................................46
    3-3改質層特性分析及鑑定..............................47
       3-3-1 改質層厚度之檢測............................48
       3-3-2 改質層硬度、楊氏模數及抗磨耗性能之檢測......48
       3-3-3 三維表面微細形貌及表面粗糙度量測............50
       3-3-4 改質層定性分析..............................51
第四章 結果與討論........................................58
    4-1 輝光放電縱深分析結果.............................58
    4-2摩擦力顯微鏡改質層厚度分析........................61
    4-3壓痕試驗分析......................................62
    4-4抗磨耗性能........................................64
    4-5改質層表面粗糙度..................................65
    4-6綜合分析..........................................67
第五章 結論與未來研究方向................................94
    5-1結論..............................................94
    5-2未來研究方向......................................95
參考文獻.................................................97
自述.....................................................99
                                    

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