研究生: |
黃榮銘 Haung, Rung-Ming |
---|---|
論文名稱: |
微電子廠之地震分析 Seismic Analysis of Microelectronic Plants |
指導教授: |
蕭樂群
Shiau, Le - Chung |
學位類別: |
碩士 Master |
系所名稱: |
工學院 - 航空太空工程學系 Department of Aeronautics & Astronautics |
論文出版年: | 2003 |
畢業學年度: | 91 |
語文別: | 中文 |
論文頁數: | 117 |
中文關鍵詞: | 反應譜分析 、微電子廠 、模態分析 、歷時分析 |
外文關鍵詞: | modal analysis, microelectronic plants, time history analysis, response spectrum analysis |
相關次數: | 點閱:78 下載:3 |
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本研究的目的,乃是以結構設計分析軟體 SAP2000分析位於台南科學園區之台積電晶圓六廠,受到地震後的結構動態行為反應。首先以結構模態分析法,求取廠房結構的模態參數(自振週期、自然頻率與模態振型),以瞭解結構動態特性,然後以1940美國 El Centro大地震之地表加速度歷時紀錄作為輸入地震力,對此廠房進行歷時反應分析,以獲知微電子廠房在真實地震作用下之動態反應,最後再以反應譜分析進行分析,進而比較地震歷時分析法與反應譜分析法之結果。研究結果顯示,主要模態之自然頻率在短向為5.51Hz,長向為5.91Hz。當地震力作用在 X方向時,所產生的廠房動態反應大於地震力作用在 Y方向時所產生的動態反應。另外,廠房最大應力值為,鋼結構材料:16.08 ksi,鋼筋混凝土材料:3.29 ksi, 皆符合材料規範要求。
The main objective of this research is to use a finite element software SAP2000 to analyze the structure dynamic behavior of the TSMC 6th microelectronic plant located in the Tainan Science-based Industrial Park subjected to a strong earthquake. The first step is to find the dynamic properties of the plant by a free vibration analysis. Then the plant subjected to the El Centro earthquake is performed by time history analysis as well as response spectrum analysis separately. The comparison between the results obtained by the time history analysis and the response spectrum analysis is made. Results show that the fundamental natural frequency in the X- direction is 5.51Hz and 5.91Hz in the Y-direction. The response of the plant in the X-direction is larger than that in the Y-direction. Besides, the maximum axial stress occurs in the steel material is 16.08 ksi and in the reinforced concrete material is 3.29 ksi. All of these values satisfy the ASTM standard requirements.
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