| 研究生: |
郭佳柔 Kuo, Jia-Rou |
|---|---|
| 論文名稱: |
菊池圖譜與應變誘導差排之關係 Simulation investigation of dislocation structures on induced strain and Kikuchi diffraction pattern. |
| 指導教授: |
郭瑞昭
Kuo, Jui-Chao |
| 學位類別: |
碩士 Master |
| 系所名稱: |
工學院 - 材料科學及工程學系 Department of Materials Science and Engineering |
| 論文出版年: | 2026 |
| 畢業學年度: | 114 |
| 語文別: | 中文 |
| 論文頁數: | 143 |
| 中文關鍵詞: | 電子背向散射繞射 、菊池圖譜 、差排應變 、電子繞射圖譜分析 、晶格變形 |
| 外文關鍵詞: | Electron Backscatter Diffraction (EBSD), kikuchi pattern, dislocation induced strain, lattice deformation |
| 相關次數: | 點閱:2 下載:0 |
| 分享至: |
| 查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報 |
當材料尺寸降至奈米尺度時,原子級的缺陷效應則不可忽視;以差排為例,其插入規則排列的晶格時所誘發之彈性應變場,將改變鄰近晶體的局部結構與材料性質,而該缺陷可透過繞射圖譜之變化觀測。故本研究旨在探討差排所造成之晶格變形與 EBSD 菊池圖譜變化之關聯性,以差排理論作為出發點,分析差排周圍原子的位移行為以建立變形晶體結構,並進一步生成對應的變形菊池圖譜,再系統性比較原始圖譜與變形圖譜的菊池帶寬度、菊池帶位移與區域軸位移等差異。建立一套由「原子位移晶格變形-菊池圖譜變化」之分析架構。
結果顯示,菊池帶寬度可透過晶面間距變化進行預測,而菊池帶位移則與晶面法向量旋轉密切相關。此外,區域軸位移則可透過晶軸方向結合球面投影(gnomonic projection)進行預測,且其位移量與相對於 Pattern Center 之位置高度相關。整體結果顯示,利用晶體結構變化能有效預測繞射圖譜之改變,有助於未來利用繞射圖譜快速判別晶體缺陷與結構變形行為,並可作為建立缺陷圖譜資料庫與自動化辨識方法之基礎。
The study investigates the relationship between strain-induced dislocation and changes in electron backscatter diffraction (EBSD) Kikuchi patterns. Based on classical dislocation theory and Molecular dynamics (MD), atomic displacements around a dislocation were analyzed to construct deformed crystal structures and simulate the corresponding Kikuchi patterns. The results show that Kikuchi band width and displacement can be predicted from changes in interplanar spacing and plane normal directions, respectively. Zone axis displacement can also be predicted from crystallographic direction changes combined with gnomonic projection and is strongly dependent on its position relative to the Pattern Center. These results establish a framework linking atomic displacement, lattice deformation, and Kikuchi pattern variation.
[1]Y. Sun, S.E. Thompson, and T. Nishida, Physics of strain effects in semiconductors and metal-oxide-semiconductor field-effect transistors, Journal of Applied Physics, 101(10), 2007.
[2]L.J. Liu, Z.Y. Xue, D. Chen, Z.Q. Mu, J.T. Bian, H.T. Jiang, X. Wei, Z.F. Di, M. Zhang, and X. Wang, Influence of He implantation dose on strain relaxation of pseudomorphic SiGe/Si heterostructure, Thin Solid Films, 542, pp. 129-133, 2013.
[3]E. Kasper, N. Burle, S. Escoubas, J. Werner, M. Oehme, and K. Lyutovich, Strain relaxation of metastable SiGe/Si: Investigation with two complementary X-ray techniques, Journal of Applied Physics, 111(6), 2012.
[4]R. Vincent, A.R. Preston, and M.A. King, Measurement of strain in silver halide particles by convergent beam electron diffraction, Ultramicroscopy, 24(4), pp. 409-419, 1988.
[5]J.A. Venables, Introduction to Surface and Thin Film Processes. Cambridge: Cambridge University Press, 2000.
[6]W. Friedrich, P. Knipping, and M. Laue, Interferenzerscheinungen bei Röntgenstrahlen, Annalen der Physik, 346(10), pp. 971-988, 1913.
[7]G. Aminoff, X-Ray Asterism on Laue-Photogramms, Geologiska Föreningen i Stockholm Förhandlingar, 41(7), pp. 534-538, 1919.
[8]G.I. Taylor, The mechanism of plastic deformation of crystals. Part I.—Theoretical, Proceedings of the Royal Society of London. Series A, Containing Papers of a Mathematical and Physical Character, 145(855), pp. 362-387, 1934.
[9]M. Polanyi, Über eine Art Gitterstörung, die einen Kristall plastisch machen könnte, Zeitschrift für Physik, 89(9), pp. 660-664, 1934.
[10]B.D. Cullity and R. Smoluchowski, Elements of X‐ray Diffraction, Physics Today, 10(3), pp. 50-50, 1957.
[11]G.K. Williamson and W.H. Hall, X-ray line broadening from filed aluminium and wolfram, Acta Metallurgica, 1(1), pp. 22-31, 1953.
[12]S. Danilchenko, O. Kukharenko, C. Moseke, I.Y. Protsenko, L. Sukhodub, and B. Sulkio‐Cleff, Determination of the bone mineral crystallite size and lattice strain from diffraction line broadening, Crystal Research and Technology: Journal of Experimental and Industrial Crystallography, 37(11), pp. 1234-1240, 2002.
[13]C. Suryanarayana and M.G. Norton, Determination of crystallite size and lattice strain, in X-ray diffraction: a practical approach. Boston, MA: Springer, 1998, pp. 207-221.
[14]W. Qin and J.A. Szpunar, Origin of lattice strain in nanocrystalline materials, Philosophical Magazine Letters, 85(12), pp. 649-656, 2005.
[15]A.A. Nazarov, A.E. Romanov, and R.Z. Valiev, On the nature of high internal stresses in ultrafine grained materials, Nanostructured Materials, 4(1), pp. 93-101, 1994.
[16]D. Oleszak and P.H. Shingu, Nanocrystalline metals prepared by low energy ball milling, Journal of Applied Physics, 79(6), pp. 2975-2980, 1996.
[17]M. Obstalecki, S.L. Wong, P.R. Dawson, and M.P. Miller, Quantitative analysis of crystal scale deformation heterogeneity during cyclic plasticity using high-energy X-ray diffraction and finite-element simulation, Acta Materialia, 75, pp. 259-272, 2014.
[18]A. Debelle and A. Declémy, XRD investigation of the strain/stress state of ion-irradiated crystals, Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 268(9), pp. 1460-1465, 2010.
[19]J.V. Bernier, N.R. Barton, U. Lienert, and M.P. Miller, Far-field high-energy diffraction microscopy: a tool for intergranular orientation and strain analysis, The Journal of Strain Analysis for Engineering Design, 46(7), pp. 527-547, 2011.
[20]A.J. Schwartz, M. Kumar, B.L. Adams, and D.P. Field, Electron backscatter diffraction in materials science. Springer, 2009.
[21]A.J. Wilkinson, Measurement of elastic strains and small lattice rotations using electron back scatter diffraction, Ultramicroscopy, 62(4), pp. 237-247, 1996.
[22]A.J. Wilkinson, G. Meaden, and D.J. Dingley, High-resolution elastic strain measurement from electron backscatter diffraction patterns: New levels of sensitivity, Ultramicroscopy, 106(4), pp. 307-313, 2006.
[23]T.B. Britton and A.J. Wilkinson, High resolution electron backscatter diffraction measurements of elastic strain variations in the presence of larger lattice rotations, Ultramicroscopy, 114, pp. 82-95, 2012.
[24]T.B. Britton, S. Birosca, M. Preuss, and A.J. Wilkinson, Electron backscatter diffraction study of dislocation content of a macrozone in hot-rolled Ti–6Al–4V alloy, Scripta Materialia, 62(9), pp. 639-642, 2010.
[25]A. Winkelmann, C. Trager-Cowan, F. Sweeney, A.P. Day, and P. Parbrook, Many-beam dynamical simulation of electron backscatter diffraction patterns, Ultramicroscopy, 107(4), pp. 414-421, 2007.
[26]A.J. Wilkinson, Methods for determining elastic strains from electron backscatter diffraction and electron channelling patterns, Materials Science and Technology, 13(1), pp. 79-84, 1997.
[27]R.R. Keller, A. Roshko, R.H. Geiss, K.A. Bertness, and T.P. Quinn, EBSD measurement of strains in GaAs due to oxidation of buried AlGaAs layers, Microelectronic Engineering, 75(1), pp. 96-102, 2004.
[28]L. Clément, R. Pantel, L.F.T. Kwakman, and J.L. Rouvière, Strain measurements by convergent-beam electron diffraction: The importance of stress relaxation in lamella preparations, Applied Physics Letters, 85(4), pp. 651-653, 2004.
[29]陳東宏, 穿透式電子顯微鏡之收斂電子束繞射於半導體材料分析之應用, 國家奈米元件實驗室奈米通訊, 15(4), pp. 2-5, 2008.
[30]A.H. Cottrell, Theory of dislocations, Progress in Metal Physics, 4, pp. 205-264, 1953.
[31]G. Gottstein, Physical foundations of materials science, vol. 3. Berlin: Springer, 2004.
[32]D. Blavette, E. Cadel, A. Fraczkiewicz, and A. Menand, Three-Dimensional Atomic-Scale Imaging of Impurity Segregation to Line Defects, Science, 286(5448), pp. 2317-2319, 1999.
[33]R.J. Asaro, Crystal Plasticity, Journal of Applied Mechanics, 50(4b), pp. 921-934, 1983.
[34]J.W. Hutchinson, Bounds and self-consistent estimates for creep of polycrystalline materials, Proceedings of the Royal Society of London. A. Mathematical and Physical Sciences, 348(1652), pp. 101-127, 1976.
[35]F. Kocks, C. Tomé, and H.R. Wenk, Texture and Anisotropy. Preferred Orientations in Polycrystals and Their Effect on Material Properties. Cambridge 2000.
[36]G.I. Taylor, Plastic strain in metals, J. Inst. Metals, 62, pp. 307-324, 1938.
[37]M. Griffiths, Crystal Orientation and Dislocation Slip, Metals, 13(12), p. 1950, 2023.
[38]B.J. Alder and T.E. Wainwright, Studies in molecular dynamics. II. Behavior of a small number of elastic spheres, The Journal of Chemical Physics, 33(5), pp. 1439-1451, 1960.
[39]J.M. Burgers, Physics.—Some considerations on the fields of stress connected with dislocations in a regular crystal lattice. I, in Selected papers of JM Burgers. Netherlands: Springer, 1995, pp. 335-389.
[40]A. Stukowski and K. Albe, Extracting dislocations and non-dislocation crystal defects from atomistic simulation data, Modelling and Simulation in Materials Science and Engineering, 18(8), p. 085001, 2010.
[41]M. Gandais, A. Hihi, C. Willaime, and Y. Efelboin, Dislocation contrast by transmission electron microscopy A method for Burgers vector characterization if the invisibility criterion is not valid, Philosophical Magazine A, 45(3), pp. 387-400, 1982.
[42]S.J. Pennycook, Transmission Electron Microscopy: A Textbook for Materials Science, Williams David B and Carter C Barry. Springer. . New York: Oxford University Press, 2010.
[43]C.M. Fancher, M.J. Burch, S. Patala, and E.C. Dickey, Implications of gnomonic distortion on electron backscatter diffraction and transmission Kikuchi diffraction, Journal of Microscopy, 285(2), pp. 85-94, 2022.