近幾年來，由於微機電系統(Micro-electro-mechanical system, MEMS)技術的成熟，其可被廣泛地運用在不同的學問上，例如:光電、化學、生醫檢測、機械、航空等方面。微總體分析系統(Micro Total Analysis System)便是將生醫檢測上取樣、樣本傳輸、混合、分離及偵測等功能，利用微機電技術將分析儀器縮小並整合到一信用卡大小之生醫晶片上。
本研究主要是利用微機電的製程技術，於微管道中設計、製作與測試一被動式微流體閥門，並應用於實驗光碟晶片上。被動式閥門主要原理是利用管道的截面積突然增加而產生一毛細管壓力阻力停止表面張力的作用，再利用類似光碟機旋轉平台，產生離心力驅動流體而突破閥門，在本研究過程中為得到更精確微流體閥門之設計，發展三維界面模式分析來輔助被動式微流體閥門的設計，由實驗結果得知本實驗所發展之三維界面模式比目前其他方法更能準確分析出閥門設計參數。由此閥門，光碟生醫晶片上的微量筒計、分離器等功能便可實現於晶片上。

Due to the maturity of MEMS( Micro-Electro-Mechanical-System )technology recently, it can be broadly used in many different applications, for example. It can be applied in optelectronics, chemical, biochemical test, mechanical, and aerospace. All these applications, μ TAS( Micro Total Analysis System) using MEMS technology to minimize and integrate analytical equipments into a credit-card sized biochip which includes sampling, sample transport, reaction, separation and detection function is most promising.
This paper presents the design, fabrication and test of a MEMS-based micro capillary stop valve for Lab_On_A-CD applications. The passive valves stop the flow of liquid inside a microchannel using capillary pressure barrier that develops when the channel cross-section changes abruptly. In this study, a modified 3-D meniscus model was proposed. The experimental results show the modified 3-D meniscus model can better predict the pressure barrier of the micro capillary stops.

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