| 研究生: |
戴婉如 Dai, Wan-Ru |
|---|---|
| 論文名稱: |
利用陽極氧化鋁模板製備CuInSe2核殼結構元件之研究 Study of Core-Shell CuInSe2 Nanowires with AAO template |
| 指導教授: |
洪茂峰
Houng, Mau-Phon |
| 學位類別: |
碩士 Master |
| 系所名稱: |
電機資訊學院 - 微電子工程研究所 Institute of Microelectronics |
| 論文出版年: | 2017 |
| 畢業學年度: | 105 |
| 語文別: | 中文 |
| 論文頁數: | 95 |
| 中文關鍵詞: | 陽極氧化鋁模板 、銅銦硒奈米柱 、氧化銦錫 、核殼結構 |
| 外文關鍵詞: | AAO template, CuInSe2, ITO, core-shell |
| 相關次數: | 點閱:122 下載:0 |
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本研究利用陽極氧化鋁模板(AAO)輔助製備一維單晶二硒化銅銦(CIS)奈米柱陣列並搭配氧化銦錫(ITO)漿料形成核殼結構,應用於太陽能電池元件的吸收層,和以往平面結構的吸收層相比,奈米柱擁有更加突出的光電特性,期望可以有效提升元件整體的光電轉換效率。
本研究利用鋁片經陽極氧化製備AAO模板,再將CIS藉由電鍍沉積形成奈米柱結構。透過模板移除得到完整CIS奈米柱,並疊上ITO漿料,形成ITO/CIS核殼結構。本研究利用退火處理來改善CIS奈米柱結晶品質,使CIS晶相轉為理想CIS(112)晶相。由XRD量測得到CIS(112)之FWHM為0.3307,晶粒大小為24.72 nm,得到CIS之當量比≈ 1 : 1 : 2。吾人以氧化銦錫與DMSO有機溶劑混合後,氧化銦錫與奈米柱之間的接觸角由原本的15.31°降低至6.08°,消除ITO疏水性問題,亦有蕭特基二極體之特性。
CuInSe2 nanowire photovoltaic has been the subject of research with a view to enhancing the photo absorption efficiency and reducing the material consumption compared with bulkand thin-film PV. However, its surface recombination is a problem. Therefore, we use the core-shell structure to solve the problem. In this study, we successfully fabricated ternary CuInSe2 nanowire arrays in a high temperature electrolyte using pulse electrodeposition techniques with the assistance of an anodized aluminum oxide (AAO) template. We tune the concentration of InCl3 and the pH value of solution to improve the crystallization of CIS nanowire. In I-V measurement, we obtained leakage current Io near 16.3 nA. Then, we fabricated core-shell structure with ITO/CIS material to reduce the defects near the surface of nanowire.
參考文獻
【1】 Carol,“綠色能源的最大潛力股-太陽能“,股感知識庫 ,2016。
【2】 楊德仁,“太陽能電池材料“,五南圖書出版股份有限公司, 2008。
【3】 粘群、粘金重,“薄膜太陽能電池研究進展簡介“,崇越科技股份有限公司,2009。
【4】 W. Eisele, A. Ennaoui, P. Schubert-Bischoff, M. Giersig, C. Peltenkofet , J. Krausd, M. Lux-Steiner, T. Riedle, N. Esse, S. Zweigart, F. Karg, "New cadmium-free buffer layers as heterojunction partners on Cu (In, Ga)(S, Se) 2 thin film solar cells." Photovoltaic Specialists Conference, 2000. Conference Record of the Twenty-Eighth IEEE. IEEE, (2000).
【5】 Ghosh, B., D. P. Chakraborty, and M. J. Carter. "A novel back-contacting technology for thin films." Semiconductor science and technology 11.9 (1996): 1358.
【6】 Tambo, H., and H. Asahi. "Control of GaN nanorod diameter by changing growth temperature during molecular-beam epitaxy." Journal of Crystal Growth383 (2013): 57-62.
【7】 Ishizawa, Shunsuke, Akihiko Kikuchi, and Katsumi Kishino. "Selective growth of GaN nanocolumns on predeposited Al patterns by rf-plasma-assisted molecular-beam epitaxy " physica status solidi (c) 5.6 (2008): 1879-1882.
【8】 Shunfeng Li, Xue Wang, Sönke Fündling, Milena Erenburg, Johannes Ledig, Jiandong Wei, Hergo H. Wehmann , Andreas Waag, Werner Bergbauer, Martin Mandl, Martin Strassburg, Achim Trampert, Uwe Jahn, Henning Riechert, Holger Jönen, and Andreas Hangleiter, "Nitrogen-polar core-shell GaN light-emitting diodes grown by selective area metalorganic vapor phase epitaxy." Applied Physics Letters101.3 (2012): 032103.
【9】 Wang, Zhong L. "Characterizing the structure and properties of individual wire-like nanoentities." Advanced Materials 12.17 (2000): 1295-1298.
【10】 Hu, Jiangtao, Teri Wang Odom, and Charles M. Lieber. "Chemistry and physics in one dimension: synthesis and properties of nanowires and nanotubes."Accounts of chemical research 32.5 (1999): 435-445.
【11】 Wanger, R.S.,and W.C. Eills,"Vapor-liquid-soild mechanism of single crystal growth," Applied Physics Letters 4.5:89-90,1964.
【12】 Keller, F., M. S. Hunter, and D. L. Robinson, "Structural features of oxide coatings on aluminum," Journal of the Electrochemical Society 100.9:411-419,1953.
【13】 Po-Lin Chen, Jun-Kai Chang, Cheng-Tzu Kuo, Fu-Ming Pan, "Anodic aluminum oxide template assisted growth of vertically aligned carbon nanotube arrays by ECR-CVD." Diamond and related materials 13.11 (2004): 1949-1953.
【14】 Po-Lin Chen, Jun-Kai Chang, Fu-Ming Pan, Cheng-Tzu Kuo, Po-Lin Chen, Jun-Kai Chang, Fu-Ming Pan, Cheng-Tzu Kuo, "Tube number density control of carbon nanotubes on anodic aluminum oxide template." Diamond and related materials 14.3 (2005): 804-809.
【15】 Xin-Yi Zhang, Li-de Zhang, Guo-Wen Meng, Guang-Hai Li, Neng-Yun Jin-Phillipp, and Fritz Phillipp, "Synthesis of ordered single crystal silicon nanowire arrays." Advanced Materials 13.16 (2001): 1238.
【16】 Melissa S. Sander* and Le-Shon Tan,"Nanoparticle Arrays on Surfacesfabricated using anodic alumina films as templates." Advanced Functional Materials 13.5 (2003): 393-397.
【17】 Inoue, S., Chu, S. Z., Wada, K., Li, D., & Haneda, H.,"New roots to formation of nanostructures on glass surface through anodic oxidation of sputtered aluminum." Science and Technology of Advanced Materials 4.4 (2003): 269-276.
【18】 Fang, Z., Wang, Y., Peng, X., Liu, X., & Zhen, C., "Structural and optical properties of ZnO films grown on the AAO templates." Materials Letters 57.26 (2003): 4187-4190.
【19】 Sander, M. S., Prieto, A. L., Gronsky, R., Sands, T., & Stacy, A. M., "
Fabriacationof High-Density, High Aspect Ratio, Large-Area Bismuth
Telluride Nanowire Arrays by Electrodeposition into Porous Anodic Alumina Templates." Advanced Materials 14.9 (2002): 665-667.
【20】 Shin, S., Kim, B. S., Kim, K. M., Kong, B. H., Cho, H. K., & Cho, H. H., "Tuning the morphology of copper nanowires by controlling the growth processes in electrodeposition." Journal of Materials Chemistry 21.44 (2011): 17967-17971.
【21】 Spurgeon, Joshua M., Harry A. Atwater, and Nathan S. Lewis. "A comparison between the behavior of nanorod array and planar Cd (Se, Te) photoelectrodes."The Journal of PhysicalChemistry C 112.15 (2008): 6186-6193.
【22】 Li, A. P., Müller, F., Birner, A., Nielsch, K., & Gösele, U., "Hexagonal pore arrays with a 50–420 nm interpore distance formed by self-organization in anodic alumina." Journal of applied physics 84.11 (1998): 6023-6026.
【23】 Yang, Y., Chen, H., Mei, Y., Chen, J., Wu, X., & Bao, X., "CdS nanocrystallites prepared by chemical and physical templates." Acta materialia 50.20 (2002): 5085-5090.
【24】 Masuda, Hideki, and Kenji Fukuda. "Ordered metal nanohole arrays made by a two-step replication of honeycomb structures of anodic alumina." science268.5216 (1995): 1466-1468.
【25】 陳亮羽,“藉由模板輔助法生成奈米陣列之研究”,國立清華大學化學工程研究所碩士論文,(2004)。
【26】 Delendik, K., Emeliantchik, I., Litomin, A., Rumyantsev, V., & Voitik, O., "Aluminium oxide microchannel plates." Nuclear Physics B-Proceedings Supplements 125 (2003): 394-399.
【27】 劉志毅,“長程有序氧化鋁奈米孔洞陣列之製造與機制”,國立台灣大學物理研究所博士論文,(2003)。
【28】 Thompson, G. E. "Porous anodic alumina: fabrication, characterization and applications." Thin solid films 297.1 (1997): 192-201.
【29】 Haug, Franz-Josef., "Development of Cu (In, Ga) Se2 superstrate thin film solar cells. " Diss. Universität Ulm, (2001).
【30】 Sheppard, C.J., "Formation of CuIn(Se,S)2 and Cu(In,Ga)(Se,S)2 thin films by chalcogenization of sputtered metallic alloys. " PhD thesis, University of Johannesburg, Department of Physics, (2008).
【31】 Anderson, T., and B. J. Stanbery. "Processing of CuInSe2-based solar cells: characterization of deposition processes in terms of chemical reaction analyses." Subcontractor Report (1999): 01-61.
【32】 Müller, J., J. Nowoczin, and H. Schmitt. "Composition, structure and optical properties of sputtered thin films of CuInSe 2." Thin Solid Films 496.2 (2006): 364-370.
【33】 Terasako, T., Inoue, S., Kariya, T., & Shirakata, S., "Three-stage growth of Cu–In–Se polycrystalline thin films by chemical spray pyrolysis." Solar energy materials and solar cells91.12 (2007): 1152-1159.
【34】 Calixto, M. E., Dobson, K. D., McCandless, B. E., & Birkmire, R. W., "Controlling growth chemistry and morphology of single-bath electrodeposited Cu (In, Ga) Se2 thin films for photovoltaic application." Journal of The Electrochemical Society 153.6 (2006): G521-G528.
【35】 Guillén, C., and J. Herrero. "Structure, morphology and photoelectrochemical activity of CuInSe 2 thin films as determined by the characteristics of evaporated metallic precursors." Solar energy materials and solar cells 73.2 (2002): 141-149.
【36】 Green, M. A., & Emery, K. "Solar cell efficiency tables (version 36)." Progress in Photovoltaics: Research and Applications 18.5 (2010): 346-352.
【37】 Van Cuong, Nguyen. "Study on the mechanical properties of nickel coating electrodeposited in electrolyte mixed with supercritical carbon dioxide. " Diss. Ph. D, National Taipei University of Technology, Taiwan, (2012).
【38】 劉庭宇,f電流模式與介面活性劑對超臨界電鍍鎳鍍層之影響探討”,國立台北科技大學製造科技研究所,(2011)。
【39】 Chang, P. C., Fan, Z., Wang, D., Tseng, W. Y., Chiou, W. A., Hong, J., & Lu, J. G., "ZnO nanowires synthesized by vapor trapping CVD method." Chemistry of materials 16.24 (2004): 5133-5137.
【40】 Yoshida, H., Sone, M., Mizushima, A., Abe, K., Tao, X. T., Ichihara, S., & Miyata, S., Electroplating of Nanostructured Nickel in Emulsion of Supercritical Carbon Dioxide in Electrolyte Solution." Chemistry Letters 11 (2002): 1086-1087.
【41】 D. Pletcher, F.C. Walsh,"Industrial Electrochemistry(2nd edn.) ",Chapman and Hall, Paris (1990), p. 437
【42】 施敏、李明逵,“半導體元件物理與製作技術”,國立交通大學出版社,P469-P478, 2013年。
【43】 Cullity, Bernard Dennis., "Elements of X-ray Diffraction", Addison Wesley, Reading, Mass., (1978).
【44】 林麗君,“X 光繞射原理及其應用”,X光材料分析技術與應用專題,1994年。
【45】 Atkins, Peter W., and Loretta Jones, "Chemistry Principles: The Quest for Insight,":285-287,1999.
【46】 M.A.Martinez, J.Herrero, M.T.Gutierrez, "Deposition of transparent and conductive Al-doped ZnO thin films for photovoltaic solar cell", Sol.Energy Mater,Sol.Cells,vol.45,pp.75,1997.
【47】 中原•牟,徐子正,“物理化學實驗”,五南圖書出版股份有限公司,P149-150,1999。
【48】 Wei Lu, Caiwen Ou, Ping Huang, Pengfei Yan, and Biao Yan,"Effect of pH on the Structural Properties of Electrodeposited Nanocrystalline FeCo Films",Int.J.Electrochem.Sci.,vol.8,8218-8226,2013.
【49】 Tang, J., Huo, Z., Brittman, S., Gao, H., & Yang,P., "Solution-processed core-shell nanowires for efficient photovoltaic cells." Nature nanotechnology 6.9 (2011): 568-572.
【50】 Emil A. Hernandez-Pag an, Wei Wang, and Thomas E. Mallouk, vol.5,No.4,3237-3241,2011.
校內:2022-12-31公開