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研究生: 李志中
Lee, Chih-Chung
論文名稱: 線上熱處理銅導線經放電結球前後之 微觀組織及拉伸性質探討
Effects of EFO Process on Microstructure and Tensile Properties of Copper Wire with Continuous Heat Tereatment
指導教授: 呂傳盛
Lui, Truan-Sheng
陳立輝
Chen, Li-Hui
學位類別: 碩士
Master
系所名稱: 工學院 - 材料科學及工程學系
Department of Materials Science and Engineering
論文出版年: 2006
畢業學年度: 94
語文別: 中文
論文頁數: 77
中文關鍵詞: 銅線打線接合
外文關鍵詞: wire bonding, copper wire
相關次數: 點閱:131下載:1
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  • 銅線應用於打線接合上相較於金線有成本低、強度高、導電性及導熱性佳等優勢,但氧化問題及延展性的不足使得銅線於銲線製程上的可靠度下降。而深抽後之銅線經不同溫度線上熱處理過程,欲了解在如此高的熱處理溫度及快速的加熱時間下,對線材組織的分佈情形及影響之後之結球特性,因此本研究針對ψ=25μm之純銅線,以改變線材之熱處理溫度﹙300℃~550℃,加熱時間約為0.4sec﹚,來探討線上熱處理之銅線經放電結球前後之微觀組織與機械性質變化,並以二者之抗拉強度進行可靠度分析。
    實驗結果顯示,線材隨著熱處理溫度的提高,微硬度值及拉伸強度下降且延性上升,在溫度450℃以上可達到完全再結晶進而晶粒成長;由線材微硬度值顯示出變動範圍大,意味著再結晶後之組織分佈不均勻,但由拉伸數據顯示出數據集中度較高,巨觀而言對拉伸性質影響較小。
    各條件之線材經EFO放電結球過程後,其結球端為柱狀晶組織,在頸部熱影響區之晶粒因受熱影響而產生再結晶及組織粗大的現象。根據文獻上指出及由本研究之微硬度值、拉伸測試顯示熱影響區強度較弱,由結球微硬度值顯示熱影響區微硬度值偏低的範圍距離球端約為200μm;由拉伸破斷外觀型態顯示出斷裂位置發生於距離球端約為50μm~200μm之間,亦為微硬度值偏低的範圍之內。
    韋伯分析結果顯示,在線材方面皆有不錯的可靠度,而結球抗拉強度之可靠度雖然較線材低,但皆屬於m>4之磨耗破壞型且為右偏型,其中又以溫度450℃熱處理條件之線材表現最佳。

    The advantages of copper wire for wire bonding are lower cost﹐higher strength﹐higher electrical and thermal conductivity in comparison with gold wire. Oxidation and insufficient ductility of copper wire result in lowering reliability in the wire bonding process. In order to realize the microstructure and FAB characteristic of the drawn copper wire after the continuous heat treatment process﹐in this study﹐copper wire ﹙ψ=25μm﹚of different heat treatment processes ﹙300℃~550℃﹐heating time about 0.4sec﹚ were discussed the effects of EFO ﹙Electric Flame Off﹚ process on microstructure and mechanical properties. Then the UTS data of the copper wire and FAB were discussed by Weibull′s reliability analysis.
    The experiments showed the higher heat treatment temperature﹐the lower microhardness﹙Hv﹚﹐tensile strength and higher elongation of the wire. The wire could be obtained fully recrystallized and grain growth above 450℃ of heat treatment temperature. From the results of microhardness and tensile test﹐the former data fluctuation was larger than the latter data fluctuation. It could be seen that the distribution of microstructure was non-uniform after recrystalliztion.
    The wire tip was melted by EFO process to form a spherical ball which displayed column-like grain growth. And the wire near the ball﹐the heat affect zone ﹙HAZ﹚﹐showed coarse grain by recrystalliztion and grain growth. According to the literature and this study﹐the HAZ had weaker strength and the weakest hardness in the HAZ was about no more than 200μm away from the ball and the distance was same as the fracture position of tensile test.
    From the Weibull analysis﹐the Weibull modulus under all condition of wire and FAB tensile test were greater than 4 and they were wear-out failure mode. Though the Weibull modulus of FAB were lower than that of wire under the same condition. And 450℃ was the best condition of continuous heat treatment.

    總目錄 中文摘要……………………………………………………………… Ⅰ 英文摘要……………………………………………………………… Ⅱ 誌謝………………………………………………………………….... Ⅳ 總目錄………………………………………………………………… Ⅴ 表目錄………………………………………………………………… Ⅷ 圖目錄………………………………………………………………… Ⅸ 第一章 前言................................................. 1 第二章 文獻回顧…………………………………………………….. 2 2-1 打線接合技術…………………………………………………. 2 2-2 銅銲線製程……………………………………………………. 4 2-3 可靠度工程……………………………………………………. 4 2-3-1 可靠度之統計意義………………………………………. 4 2-3-2韋伯分佈函數﹙Weibull Distribution Function﹚ 6 2-3-3 韋伯三參數之物理意義………………………………..... 6 2-3-4 韋伯三參數之求法………………………………………. 7 2-3-5 相關係數r與決定係數r2……………………………….... 10 第三章 實驗步驟與方法…………………………………………...... 19 3-1 實驗材料………………………………………………...........19 3-2 線上熱處理……………………………………………………. 19 3-3 放電結球………………………………………………………. 19 3-4 組織特性觀察……………………………………….............19 3-4-1 微觀組織觀察……………………………………………. 19 3-4-2 微硬度測試………………………………………. 20 3-5 拉伸試驗與可靠度分析………………………………………. 20 3-5-1 拉伸測試…………………………………………………. 20 3-5-2 拉伸測試之可靠度分析…………………………………. 21 第四章 實驗結果…………………………………………………...... 27 4-1 微觀組織特徵觀察與微硬度測試……………………………. 27 4-1-1 不同溫度線上熱處理線材之微觀組織與微硬度...........27 4-1-2 結球微觀組織觀察與微硬度測試……………………… 28 4-2 熱處理對線材機械性質之影響………………………………. 28 4-2-1 線材拉伸測試結果………………………………………. 28 4-2-2 結球拉伸測試結果………………………………………. 29 4-3 可靠度分析…………………………………………………… 30 4-3-1 線材抗拉強度之可靠度分析……………………………. 30 4-3-1 結球抗拉強度之可靠度分析......................... 31 第五章 討論………………………………………………………….. 63 5-1 線上熱處理與退火熱處理對線材微觀組織與機械性質之比較...63 5-2 放電結球對微觀組織之影響…………………………………. 63 5-3 放電結球對機械性質之影響…………………………………. 64 5-4 線上熱處理對結球拉伸性質影響……………………………. 65 5-5 線材及結球抗拉強度之韋伯分析................... 66 第六章 結論………………………………………………………….. 73 第七章 參考文獻………………………………………………….... 74 附錄………………………………………………………………….... 76 附錄一 不同溫度線上熱處理線材之抗拉強度………………….. 76 附錄二 不同溫度線上熱處理線材經結球後之抗拉強度……….. 77

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