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研究生： 陳瑞鴻
Chen, Jui-Hung
論文名稱： 使用粒子群演算法優化基於亞波長波導結構之SOI偏振分光器
Particle Swarm Optimized Silicon Polarization Beam Splitter based on Subwavelength Grating Waveguide
指導教授： 曾碩彥
Tseng, Shuo-Yen
學位類別： 碩士
Master
系所名稱： 理學院 - 光電科學與工程學系
Department of Photonics
論文出版年： 2023
畢業學年度： 111
語文別： 英文
論文頁數： 77
中文關鍵詞： 偏振分光器 、亞波長光柵耦合器 、定向耦合器 、絕緣層覆矽 、粒子群演算法
外文關鍵詞： Polarization Beam Splitter (PBS), Subwavelength Grating (SWG), Directional Coupler (DC), Particle Swarm Optimization (PSO), Silicon-on-insulator (SOI)
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    • 近年來絕緣層上覆矽(SOI)光波導廣泛地運用在光子積體電路中，然而SOI光波導因存在高折射率差的特性，會造成偏振相關的問題。而其偏振的特性會侷限光學系統的運作，因此需要偏振分光器(Polarization Beam Splitter, PBS)與偏振旋轉器(Polarization Splitter Rotator, PSR)所組成的偏振集成系統來改進偏振態所造成的影響。

    在我們的研究中，設計出一個長度僅有10 μm並基於亞波長光柵(Subwavelength Grating Waveguide, SWG)結構的偏振分光器，並利用粒子群最佳化(Particle Swarm Optimization, PSO)演算法優化TE與TM模態的消光比(Extinction Ratio)。而優化過後的結果顯示在1550 nm波長下TE與TM模態可分別實現40 dB與28 dB的消光比和小於1 dB的插入損耗，以及高達90 nm的工作帶寬(>20 dB)。模擬的結果還顯示出偏振分光器具備良好的製程容忍度，這有利於其在矽光子學中的實際應用。

    In this work, we propose a polarization beam splitter (PBS) based on a Subwavelength Grating (SWG) structure with a compact length of only 10.3 μm and the perfect phase matching condition can be achieved in the TM mode, while a significant phase mismatch is observed in the TE mode.

    The optimization of the PBS is performed using Particle Swarm Optimization (PSO) to enhance the Extinction Ratio (ER) of both TE and TM modes. The optimized results demonstrate an extinction ratio of 40 dB for TE mode and 28 dB for TM mode at a wavelength of 1550 nm, along with a wide operating bandwidth of up to 90 nm. Furthermore, the proposed PBS exhibits excellent process tolerance, which is advantageous for its practical application in silicon photonics.

    中文摘要 i Abstract ii Acknowledgements iii Table of Contents iv List of Figures v List of Tables viii Chapter 1 Introduction 1 1.1 Motivation 1 1.2 Waveguide types 2 1.3 Silicon on Insulator (SOI) 3 1.4 Waveguide Modes 3 1.5 Polarization Beam Splitter 6 1.6 Scope of this thesis 11 Chapter 2 Theoretical Background 12 2.1 Subwavelength Grating 12 2.2 Effective Index Method 15 2.3 Coupled Mode Theory 16 2.4 Supermode Theory 22 2.5 Polarization Beam Splitter based on Three Guide Optical Couplers 24 2.6 Profiling of Polarization Beam Splitter 29 2.7 FDTD Simulation 30 2.8 Particle Swarm Optimization 35 Chapter 3 Simulation Results and Discussion 38 3.1 Initial PBS Design 38 3.2 Initial PBS Simulation 44 3.3 Optimizing the PBS Device based on PSO – Case 1 47 3.4 Optimizing the PBS Device based on PSO – Case 2 51 3.5 Optimizing the PBS Device based on PSO – Case 3 55 3.6 Fabrication Tolerance Analysis 59 3.7 Discussion 61 Chapter 4 Conclusion 65 4.1 Conclusion 65 4.2 Future Work 65 Chapter 5 Reference 67 Appendix 75

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