白光干涉量測技術具有非破壞性及奈米等級縱向解析度，有利於在精密量測的發展。本文利用Michelson白光干涉儀，並搭配自動對焦技術，發展出一套自動對焦Michelson白光干涉三維形貌表面輪廓儀。
　　
　　本研究首先是利用自動對焦技術尋找干涉場，再藉由分析干涉條紋找出亮度最大位置，建立被測物體3D輪廓。在自動對焦方面是利用被動式自動對焦技術；干涉條紋分析方法之中，本文利用了傅利葉轉換法、峰值判定法，以及相位移法。
　　
　　自動對焦搭配Michelson干涉儀之中，為了使PZT掃描整場干涉條紋，我們利用修正過後的路徑規則搜尋演算法，再分析擷取得到的干涉圖像，以獲得整場3D形貌。干涉條紋分析當中，在不同倍率量測情況下，我們發現相位移法精準度以及穩定性較佳;並發現在低倍率量測情況下，受到橫向解析度的影響，導致量測上的失真。

The white light interferometer which has characteristics of non-destruction and nanometer precision in vertical resolution is helpful for the development of precise nanometer measurement. This paper use Michelson white light interferometry and the technique of Auto-Focusing to develop a system of three dimensional surface measurement for Auto-focusing Michelson white light interferometry .
In order to set up the three-dimensional profile of the sample, we search the range of interference by auto-focusing first, then search the position of highest intensity of light by analyzing interference fringe .In the Auto-Focusing method, we adopt passive auto-focusing. Passive auto-focusing has two important parts: sharpness measures, and rule search algorithms. In the analysis of interference fringes, we introduce Fourier Transform method, Peak detection, and phase-shifting in this paper.
In the collocation of Michelson interferometer and the auto-focusing method, we use the corrected Rule-based algorithm to make PZT to scan the whole field interference fringes to obtain the three-dimensional profile. In the analysis of interference fringes, we found that the phase-shifting method has better accuracy and stability with different magnification. And we also found that with low different magnification, the limits of measurement is affected by the horizontal resolution.

1 . Ng Kuang Chern,Nathaniel , Poo Aun Neow , Marcelo
H.Ang Jr,“Practical Issues In Pinxel-Based
Autofocusing For Machine Vision,”Proceedings of the
2001 IEEE.
2 . E.P Krotkov ,“Active computer vision by cooperative
focus and stereo,”New York:Springer-Verlag,1989.
3 . K.Ooi , K.Izumi , M.Nozaki and I.Takeda,“An
advanced antofocus system for video camera using quasi
condition reasoning,”IEEE Transactions on Consumer
Electronics, vol.36,pp 820-827,1999.
4 . N.Kehtarnavaz and H.oh,“Development and real-time
implementation of a rule-based auto-focusalgorithm,”
J.of Real-time image,vol.9,pp.197-203,2003.
5 . Yi Yao,Besma Abidi , Narjes Doggaz ,and Mongi Abidi,
“Evaluation of Shaepness Measues and Search Algorithm
for the Auto-Focusing of High Magnification
Images,”Proceedings of the 2006 SPIE.
6 . Patrick Sandoz and Gilbert Tribillon,“Profilometry
by zero-order interference finge identification,”
Journal of Modern Optics,vol .40,NO.9,page 1691.
7 . 洪文明,“白光相移干涉術之三維表面量測,”國立交通大學光
電工程所碩士論文,2003.
8 . Mingzhou Li,Chenggen Quan , Cho Jui Tay ,
IvanReding ,Shihua Wang,“Measurement of transparemt
coating thickness by the use of white light
interferometry” Proceedings of the 2004 SPIE.
9 . 凌維成, “白光干涉於微型元件表面形貌量測之應用,”國立中
興大學機械所碩士論文,2004.
10. 李其聰, “白光干涉三維輪廓重建-前段處理技術,”私立元智
大學機械所碩士論文,2005.
11. 沈俊宏, “數位相機上的自動對焦與自動平衡演算法,”國立台
灣大學電信工程碩士論文,2006.
12 .陳舒泓,“利用景深於二維影像重建暨外型量測之研究,”國立
成功大學機械所碩士論文,2004.
13 .M.Kristan,and F.Pernus,“Entropy based measure of
camera of camera focus,”in Proc.of ERK2004.
14 .葉易霖,“白光干涉垂直掃描之研究,”國立台灣大學機械所碩
士論文,2003.
15 .黃奕棠,“高反射性表面形貌之光學量測研究,”國立成功大學
機械所碩士論文,2006.
16 .林淑芬,“銦錫氧化物透明導電鍍膜之成膜條件對液晶顯示器效
能之影響,”國立中正大學化學工程所,2005.
17 .繆紹剛“數位影像處理,”台灣培生教育出版股份有限公
司,ch3,pp100~147,2004.
18 .蕭子健,“Lab VIEW分析篇”台灣高立圖書有限公司,ch7,pp7-
29~pp7-35,2003.