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研究生: 李國誌
Lee, Kuo-Chih
論文名稱: 應用數位影像關係法於微試件變形之量測
Use of Digital-Image-Correlation Method to Measure the Deformation of Microsample
指導教授: 陳元方
Chen, Terry Yuan-Fang
學位類別: 碩士
Master
系所名稱: 工學院 - 機械工程學系
Department of Mechanical Engineering
論文出版年: 2002
畢業學年度: 90
語文別: 中文
論文頁數: 64
中文關鍵詞: 牛頓法微試件相關性數位影像
外文關鍵詞: Newton-Raphson Method, Microsample, Correlation, Digital Image
相關次數: 點閱:70下載:6
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  • 隨著微系統科技的進展,微系統製作需有相當的可靠度及壽命,才能達到實用的目的。由於微結構的材料行為明顯的受到製程技術的影響,微結構的材料性質不能直接由大尺寸試件的結果依比例推算而來,因此,經由微小試件的直接測試,以了解其受力下之變形行為即成為一必須的步驟。
    本文利用數位影像相關法(DIC)建立一套軟體分析程式,配合CCD經由光學顯微鏡的取像,量測微試件表面的面內位移,將求得之資料點的位移量平滑化,可以求得試件表面的變形情況。進一步,配合已知之受力狀態(單軸向受力)及受力大小,即可獲得微結構的材料參數,如楊氏係數。將可應用於微製品可靠度及壽命的設計及預測。
    經由實驗的測試,驗證了本系統的可行性,並對於數位影像相關法的應用限制、誤差來源及誤差範圍等,亦有所討論。

    Because of the advancement of the micro-system technology, the manufacturing of the micro-system needs quite reliability and life to reach the practical goal. And the material behaviors of the microstructure are obviously influenced by the fabrication process, then the material properties can’t be figured out directly by the results of micro-scale sizes. So understanding the deforming behaviors by directly testing the micro samples becomes the absolute step.
    We use digital-image-correlation method to contribute a package of a soft analyzing program collocating CCD to measure the inner displacement of the micro samples surface by a photomicroscope. Then we smoothen the displacement from measured reference points to observe the variation of the surface. Further we can observe the material factors of the microstructure like Young’s modulus from the known force status and the magnitude of force. And we can apply it to the design and prediction to expand the product’s reliability and life.
    By the measuring results of the experiments we prove the feasibility of our system we set. And we provide some discussions about the limit of the application, the source of error and the error range of DIC methods.

    摘要…………………………………………Ⅰ 英文摘要……………………………………Ⅱ 誌謝…………………………………………Ⅲ 目錄…………………………………………Ⅳ 圖目錄………………………………………Ⅵ 表目錄………………………………………Ⅷ 符號說明……………………………………Ⅸ 第一章 緒論………………………………1 1.1 研究背景及目的……………………1 1.2 文獻回顧……………………………3 1.3 本文架構……………………………5 第二章 數位影像相關法原理……………6 2.1 變形前、後點的相對位置…………6 2.2 數位影像間的相關性………………8 2.2.1 數位影像簡介………………………8 2.2.2 數位影像間的相關性………………8 2.3 尋找參數向量P 的技巧……………12 2.3.1 Coarse-Fine Method………………12 2.3.2 Newton-Raphson Method…………14 2.4 影像重建(內插)…………………19 2.4.1 雙線性內插…………………………19 2.4.2 雙立方內插…………………………20 2.4.3 雙立方樣條內插(Bicubic Spline Interpolation)……21 2.5 曲面密合(最小平方法)…………24 第三章 巨觀實驗測試與結果……………27 3.1 影像還原和雜訊造成的誤差………29 3.2 位移量測及誤差分析………………30 3.3 旋轉角度量測………………………33 3.4 拉伸變形量測及誤差分析…………36 第四章 微觀實驗裝置與測試結果………41 4.1 實驗裝置……………………………42 4.1.1 顯微量測系統………………………44 4.1.2 拉伸裝置……………………………45 4.1.3 拉伸平台及試件……………………47 4.2 實驗結果……………………………49 4.2.1 影像還原和雜訊造成的誤差………49 4.2.2 位移量測……………………………51 4.2.3 面外位移造成之誤差量測…………53 4.2.4 拉伸變形量測………………………56 第五章 結論與建議………………………60 5.1 結論…………………………………60 5.2 建議…………………………………61 參考文獻……………………………………62

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