成功大學博碩士論文系統

簡易檢索 / 詳目顯示

回結果列表

研究生：	胡世國 Hu, Shih-Kuo
論文名稱：	發展多光束干涉儀於薄膜厚度與折射率之量測 Development of Multiple Beam Interferometry Apparatus to Measure Thin Film Thickness and Refractive Index
指導教授：	陳元方 Chen, Terry Yuan-Fang
學位類別：	碩士 Master
系所名稱：	工學院 - 機械工程學系 Department of Mechanical Engineering
論文出版年：	2006
畢業學年度：	94
語文別：	中文
論文頁數：	65
中文關鍵詞：	薄膜厚度、折射率、對稱式三層公式、多光束干涉、等色階條紋、多層膜矩陣法
外文關鍵詞：	Multiple Beam Interferometry, Multilayer Matrix Method, Refractive index, Thickness of thin film, Symmetrical three-layer formula, Fringe of Equal Chromatic Order
相關次數：	點閱：68 下載：2
分享至:	分享至facebook 分享至twitter

查詢本校圖書館目錄查詢臺灣博碩士論文知識加值系統勘誤回報

在奈米尺度下，材料將會展現出顯著不同的特性和現象。欲瞭解並有效掌控在奈米尺度下的材料特性，建立及運用精確的量測技術與系統，即成為不可或缺的一環。

表面力分析儀除了可用於微奈米級薄膜厚度與折射率的量測外，還可用於薄膜間的力學性質分析，例如：表面吸附力、摩擦力等，所以表面力分析儀可做為研究奈米科技的重要工具之一。

本文的主要目的是建構出表面力分析儀的雛型系統，用於薄膜厚度及折射率的量測。其計算方法主要是利用Israelachvili發表的對稱式三層公式來分析多光束干涉所產生的等色階條紋。本文將會利用多層膜矩陣法來模擬等色階條紋並與實驗圖做比較，以及探討影響等色階條紋清晰度的因素，進而幫助表面力分析儀的發展。

The material will show remarkable different characteristic and phenomenon in the nano scale. It has become unlackable to build and use precise measuring technology and system to understand and control the material characteristic.

The surface force apparatus not only be used in the measurement of thin film thickness and refractive index but also in the analysis of mechanics. For example: surface adsorbability ,friction.Therefore,the surface force apparatus can be used as one of the important tools to research nano science and technology.

In this article,the main purpose is to build model system of surface force apparatus that applied to measure the thickness and refractive index of thin film. The main method to analyze the Fringe of Equal Chromatic Order(FECO) produced from multiple beam interferometry is by using symmetrical three-layer formula from Israelachvili. In this article, I used multilayer matrix method to simulate FECO and comparing it with the FECO from the experiment. And I researched the factors that influencing the definition of FECO. Finally, let the results in this article to aid development in the surface force apparatus.

中文摘要.....................................................I
英文摘要....................................................II
目錄........................................................IV 
圖目錄.....................................................VII 
符號說明....................................................IX 

第一章 緒論.................................................1
1-1 研究目的與背景.........................................1
1-2 文獻回顧...............................................3
1-3 本文架構...............................................6

第二章 多光束干涉法之原理................................7
2-1 簡介...................................................7
2-2 對稱式三層干涉原理.....................................9
2-2-1 修正未考慮色散與相位改變的干涉公式................17
2-3 多層膜矩陣法（Multilayer Matrix Method）...................22

第三章 FECO條紋的模擬與薄膜厚度及折射率的決定.......26
3-1 FECO條紋的模擬.......................................26
3-2 應用對稱式三層公式決定薄膜厚度與折射率的........29
3-2-1 影像處理..........................................31
3-2-2 FECO條纹影像水平方向畫素位置對應波長之解析度的校
     正................................................32
3-2-3 條紋階數的決定....................................34
3-2-4解非線性聯立方程組且判斷其解的正確性...............35
3-2-5 整體處理程序流程..................................37

第四章 實驗裝置與方法..................................40
4-1 實驗系統介紹...................................40
  4-1-1光源照射系統.............................41
  4-1-2多光束干涉系統............................41
  4-1-3影像擷取系統.............................43
4-2實驗程序.............................45
  4-2-1雲母片製作..................................45
  4-2-2干涉系統之製作.............................47
  4-2-3干涉系統校正.............................49
第五章 實驗結果與討論................................51
5-1 雲母雙折射性質對FECO條紋清晰度的影響..................51
5-2 對稱式三層修正公式對於實驗圖的分析..............54

第六章 結論與未來展望.................................60

參考文獻...................................................61

                                    

1. Tolanlnsky, S., Multiple-Beam Interferometry of Surfaces and Films, Oxford Univ. Press, London, 1949.
2. Israelachvili, J. N. and Adams, G. E., “Measurement of forces between two mica surfaces in aqueous potassium nitrate solutions”, J. Chem. Soc. Faraday Trans I, 74, 975, 1978.
3. Tolansky, S., An introduction to interferometry, London: Longmans, 174, 1960.
4. Heavens, OS., Optical properties of thin films, New York: Dover, 111, 1965.
5. Malacara, D., Optical shop testing, New York: Wiley, 222, 1992.
6. Tabor, D. and Winterton, R. H. S., “Surface forces: direct measurement of normal and retarded van der Waals forces”, Proc. R. SOC. A 312, 435, 1969.
7. Israelachvili, J. N., “Thin Film Studies Using Multiple- Beam Interferometry”, Colloid Interface Sci., 44, pp.259-271 , 1973.
8. Clarkson, M. T., “Multiple-Beam Interferometry with Thin Metal Films Unsymmetrical System”, J. Phys. D: Appl. Phys., 22, pp. 475-482, 1989.
9. Born, M. and Wolf, E., Principles of Optics：Electromagnetic Theory of Propagation, Interference and Diffraction of Light, 6th ed., Pergamon, Oxford, 1980.
10. Levins, J. M., and Vanderlick, T. K.,“Impact of Roughness of Reflective Films on the Application of Multiple Beam Interferometry”, J. Colloid Interface Sci., 158, pp.223-227, 1993.
11. Levins, J. M., and Vanderlick, T. K., “Extended Spectral Analsis of Multiple Beam Interferometry：A technique To Study Metallic Films in Surface Force Apparatus”, Langmuir, 10, pp.2389-2394, 1994.
12. Horn, R. G., Smith, D. T., and Haller, W., “Surface Forces and Viscosity of Water Measured Between Silica Sheets”, Chem. Phys. Lett., 162, pp.404-407, 1989.
13. Horn, R. G., Clarke, D. R., and Clarkson, M. T., “Direct Measurement of Surface Forces between Sapphire Crystals in Aqueous Solutions”, J. Mater. Res., 3, pp.413-416, 1988.
14. Heuberger, M.,“The extended surface forces apparatus. Part I. Fast Spectral Correlation Interferometry”, Rev. Sic. Instruments, Vol.72, No.3, pp.1700-1707, 2000.
15. Tadmor, R., Chen, N. and Israelachvili, J. N., “Thickness and refractive index measurements using multiple beam interference fringes（FECO）”, J. Colloid Interface Sci., 264, pp.548-553, 2003.
16. 林堯竣,“應用多光束干涉法決定薄膜之厚度與折射率”,國立成功大學機械工程研究所碩士論文, 2005

17. Farrel, B., Bailey, A. I., Chapman, D., “Experimental phase change at the mica-silver interface illustrate the experimental accuracy of the central film thickness in a symmetrical three-layer interferometer”, Appl. Optics, Vol.34, No.16, pp.2914-2920, 1995.
18. Bailey, A. I. and Kay, S. M., “Measurement of refractive index and dispersion of mica, employing multiple beam interference techniques”, Brit. J. Appl. Phys., 16, 39, 1965.
19. Eisner, E., “Phase change of light on reflection at a mica-silver interface”, Research, 4, 183, 1951.
20. Johnson, P. B., Christy, R. W., “Optical Constant of the Noble Metals”, Phy. Rev. B, 6, 4370, 1972.
21. User’s Manual for ANU Surface Force Apparatus Mark IV, Research School of Physical Science and Engineering the Australian National University, 21, 2004.
22. Gonzalez, R. C., Woods R. E., Digital Image Processing, 2nd ed., Prentice Hall, 2001.
23. LabView Help, 2003 ed., National Instruments, 2003.
24. 李龍正, 儀器總覽3 -光學量測儀器, 行政院國家科學委員會, 1998.
25. Willard, Hobart Hurd, Instrumental Methods of Analysis , ed., Van Nostrand, 1981.
26. 許東明、何東英, 光譜化學分析, 楊智文化事業, 1997.
27. 邱承美, 儀器分析原理, 科文出版社, 1983.
28. Peter Frantz , Miquel Salmeron, “Preparation of mica surfaces for enhanced resolution and cleanliness in the surface forces apparatus”, Tribology Letters 5, pp.151-153, 1998.
29. Mika M. Kohonen, Fiona C. Meldrum, “Particles on Melt-Cut Mica Sheets Are Platinum”, Langmuir, 19, pp.975-976, 2003.
30. Zhiqun Lin, Steve Granick,”Platinum Nanoparticles at Mica Surfaces”,Langmuir,19,pp.7061-7070,2003.

校內：2009-07-26公開
校外：2009-07-26公開

簡易檢索 / 詳目顯示

相關論文