| 研究生: |
李溱錙 Li, Jhen-Zih |
|---|---|
| 論文名稱: |
以N型氮化鎵為模板利用電化學蝕刻形成奈米孔洞改善氮化鎵發光二極體之光萃取效率 Improved Light Extraction Efficiency of GaN-based Light-Emitting Diode by Electrochemical Etched Nanoporus in N-GaN Template |
| 指導教授: |
賴韋志
Lai, Wei-Jhih |
| 學位類別: |
碩士 Master |
| 系所名稱: |
理學院 - 光電科學與工程學系 Department of Photonics |
| 論文出版年: | 2012 |
| 畢業學年度: | 100 |
| 語文別: | 中文 |
| 論文頁數: | 87 |
| 中文關鍵詞: | 電化學 、氮化鎵 、奈米孔洞 、發光二極體 |
| 外文關鍵詞: | Electrochemical, GaN, Nanoporous, LED |
| 相關次數: | 點閱:87 下載:18 |
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本論文主要探討利用電化學蝕刻處理,形成奈米孔洞(Nanoporous)隨機分佈於n型氮化鎵(n-GaN)模板,再成長(Regrowth)LED整體結構並與一般無結構基板(Normal substrate)Conventional LEDs比較其光電特性研究,期望可以藉由孔洞(Porous)形成類似像空氣洞 (Air void)的幫助使得出光路徑有多次機會出光,使得增加光在內部散射機率,進而提升光輸出功率。
實驗方面利用電化學技術改變偏壓(20、30、40及60 V)將n-GaN模板內部蝕刻形成不同型態的Nanoporous,推判Regrowth LEDs 使原本樹枝狀Nanoporous因n-GaN再結晶形成橢圓形狀的Porous。最後分析Conventional LEDs、n-GaN模板經過E.C. 20、30、40及60 V in Conventional LEDs 五種試片的光電特性。於電流20mA 注入下,順向導通電壓(Forward Voltage, Vf)分別為2.84 V、2.85 V、2.86 V 、2.87 V與 2.87 V,相較於Conventional LEDs 增加0.01 ~ 0.03 V;而光輸出功率分別分別 8.7 mW、12.15 mW、12.34 mW 、12.97 mW 與9.92 mW,相較於Conventional LEDs約增加14.02 ~ 49.1 %。
In this study, we discussed the formation of nanoporous randomly distributed in the n-type gallium nitride (n-GaN) template by electrochemical etching process, and then investigated the photoelectric characteristics of regrown complete LEDs. We expected to see enhanced light output power efficiency due to increase in light scattering by porous-like air void.
In this experiment, we changed the bias (20, 30, 40 and 60 V) of the electrochemical etching process to form different types of nanoporous, and conjectured original arborization nanoporous to form oval shape of the porous by recrystallization of n-GaN after regrowth. Finally, we analyzed the optoelectronic characteristics of conventional LED and the LED n-GaN template after E.C. 20, 30, 40, 60 V.
Under 20-mA current injection, the forward voltages (Vf)were 2.84 V, 2.85 V, 2.86 V, 2.87 V and 2.87 V, respectively. Compared with the conventional LED, it was found that the bias was slightly higher by 0.01 ~ 0.03 V; light output power @20mA were 8.7 mW, 12.15 mW, 12.34 mW, 12.97 mW and 9.92 mW, respectively. Compared with conventional structure, we achieved an enhancement of approximately 14.02 ~ 49.1 %.
第一章
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第二章
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[8] 鄭治華,“利用陽極氧化鋁及氫化物氣相磊晶技術成長氮化鎵厚膜之 研究”國立交通大學電子物理學系,碩士論文(2008)
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第三章
[1] 蕭楠騰,“利用偏壓輔助光電化學氧化法成長P型氮化鎵金氧半場效電晶體閘極介電層之製作與研究"國立成功大學微電子工程研究所,碩士論文(2009)
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第四章
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