由於網際網路的普及與資訊技術的發達，透過網際網路進行遠端診斷（Remote Diagnostics）已是工業界的重要應用，本論文乃針對近來相當熱門且重要的半導體製造業電子診斷（e-Diagnostics）問題進行研究。近年來，網路服務（Web Services）技術的興起，對於異質系統間資料的整合提供一個全新且優越的解決方案。本論文以分散式物件導向方法研發完成一個以網路服務技術為基礎之電子診斷資訊整合架構（Web-Services-based Diagnostics Framework, WSDF），本架構著眼於滿足SEMATECH對電子診斷所定義之能力需求，將可有效支援目前半導體業電子診斷所需的各項功能。
　　首先，我們針對電子診斷系統做深入分析與研究，藉以訂定電子診斷資訊整合之各項功能需求及進行系統架構之設計。接著，我們將電子診斷架構中各服務元件共同需要之功能（如SOAP通訊能力、UDDI服務註冊機制、資料安全機制、資料交換機制和存取區域資料庫等），設計成一個通用網服基元（Web-Service Agent），其它系統元件只要繼承此通用網服基元，即可具有這些功能，提昇了整體系統開發的效率。除此之外，通用的機台模型、統一的認證服務及安全的網路連線也一併設計於本架構中。我們所完成之電子診斷資訊整合架構，除可支援以人工方式進行遠端之機台診斷外，尚可透過各式的服務元件，自動地提供診斷資訊給不同的客戶端。在最後，我們建構一個電子診斷應用範例，同時提出其相配合之系統整合與測試步驟，以驗證本架構之效能。

　　Due to the ubiquity of Internet and the prosperity of information technologies, remote diagnostics through Internet has been an important application in industry. This thesis is aimed to study the e-Diagnostics problem, which is currently a hot and important topic in semiconductor manufacturing. In recent years, the rising Web-services technology has provided a new and excellent solution to the data integration among heterogeneous systems. In this thesis, we use the distributed object-oriented approach to develop a Web-Services-based diagnostics framework (WSDF) that is intended to satisfy the requirement of e-Diagnostics capability definitions of SEMATECH, and thus can effectively support a variety of e-diagnostics functions for semiconductor manufacturing.
　　First, we thoroughly investigate and analyze the e-diagnostics system to specify the necessary functionalities of information integration for e-diagnostics and to design the system framework. Then, we design a generic component, called Web-service Agent, which possesses several common functions, such as SOAP communication, UDDI registration, data security mechanism, data exchange mechanism, and local database access. Other system components can have these functions by just inheriting the Web-service Agent. Therefore, the overall system-development efficiency is increased. In addition, a generic equipment model, a unified authentication service, and a safe network connection are also designed in the framework. WSDF can not only support manual remote diagnoses of equipment but also automatically provide diagnostics information to different clients through service components. Finally, we construct an application paradigm of e-diagnostics and develop the associated procedures of system integration and testing to evaluate the effectiveness of the proposed WSDF.

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