隨著掃描探針成像技術對於解析度以及精確度的要求提高，探針磨耗的議題漸漸受到關注。本研究分別針對刮痕速率、基板表面形貌、正向力、以及鍍層原子的主題進行分析及討論。
實驗中進行的三種刮痕速率測試結果顯示就摩擦力增加率本身而言，三種速率並無太大的分別，而主要影響摩擦與磨耗的因素為過程中的正向力。兩種基板表面形貌在探針原子磨耗現象上沒有太大的區別。正向力測試結果顯示相對大之正向力可造成較大的摩擦力與原子損耗率，然而此趨勢並不明顯。從實驗中鍍層的刮痕測試可發現，三種鍍層對於摩擦力與磨耗率皆有顯著之降低成效，而過強的鍍層原子鍵結則會導致摩擦力的增加。

While greater accuracy and finer resolution of microscopy techniques are imperatively needed, massive attention has been drawn to probe integrity studies. Silicon probe is chosen to be studied in this work. Various scratch tests are performed by molecular dynamics simulation. In this work, the effects of scratch speed, substrate surface pattern, normal force, and coating to friction and wear are discussed.
Friction and wear results of varied scratch speeds were found similar, only that the fluctuation in normal force was found affecting friction forces. Wear behaviors of two substrate surface patterns were almost the same, implying that difference of surface patterns was not sufficient to cause apparent behaviors. Two sets of normal forces were applied in scratch tests, indicating relatively heavier load can give rise to slightly larger friction force and wear rate. Three types of protective coatings were observed effective in reducing friction force and wear rate; however, extremely strong bonds of coating atoms can also cause excessive friction force.

[1] D. Dowson, History of tribology: Professional Engineering Publishing, 1998.
[2] G. Amontons, "De la résistance causée dans les machines," Mem. Acad. R. A, pp. 275-282, 1699.
[3] F. P. Bowden and D. Tabor, The Friction and Lubrication of Solids: Clarendon Press, 2001.
[4] M. H. Müser, "Rigorous Field-Theoretical Approach to the Contact Mechanics of Rough Elastic Solids," Physical Review Letters, vol. 100, p. 055504, 2008.
[5] B. N. J. Persson, "Theory of rubber friction and contact mechanics," The Journal of Chemical Physics, vol. 115, pp. 3840-3861, 2001.
[6] J. Greenwood and J. Williamson, "Contact of nominally flat surfaces," Proceedings of the Royal Society of London. Series A. Mathematical and Physical Sciences, vol. 295, pp. 300-319, 1966.
[7] Y. Mo, K. T. Turner, and I. Szlufarska, "Friction laws at the nanoscale," Nature, vol. 457, pp. 1116-1119, 2009.
[8] A. G. Khurshudov, K. Kato, and H. Koide, "Nano-wear of the diamond AFM probing tip under scratching of silicon, studied by AFM," Tribology Letters, vol. 2, pp. 345-354, 1996.
[9] K.-H. Chung and D.-E. Kim, "Wear characteristics of diamond-coated atomic force microscope probe," Ultramicroscopy, vol. 108, pp. 1-10, 2007.
[10] D. Marchetto, A. Rota, L. Calabri, G. C. Gazzadi, C. Menozzi, and S. Valeri, "AFM investigation of tribological properties of nano-patterned silicon surface," Wear, vol. 265, pp. 577-582, 2008.
[11] B. Haochih Liu and C.-H. Chen, "Direct deformation study of AFM probe tips modified by hydrophobic alkylsilane self-assembled monolayers," Ultramicroscopy, vol. 111, pp. 1124-1130, 2011.
[12] J. Yang and K. Komvopoulos, "A Molecular Dynamics Analysis of Surface Interference and Tip Shape and Size Effects on Atomic-Scale Friction," Journal of Tribology, vol. 127, pp. 513-521, 2005.
[13] I. H. Sung and D. E. Kim, "Molecular dynamics simulation study of the nano-wear characteristics of alkanethiol self-assembled monolayers," Applied Physics A: Materials Science & Processing, vol. 81, pp. 109-114, 2005.
[14] L. Verlet, "Computer "Experiments" on Classical Fluids. I. Thermodynamical Properties of Lennard-Jones Molecules," Physical Review, vol. 159, pp. 98-103, 1967.
[15] L. Verlet, "Computer "Experiments" on Classical Fluids. II. Equilibrium Correlation Functions," Physical Review, vol. 165, pp. 201-214, 1968.
[16] M. Amini, J. W. Eastwood, and R. W. Hockney, "Time integration in particle models," Computer Physics Communications, vol. 44, pp. 83-93, 1987.
[17] O. Buneman, "Time-reversible difference procedures," Journal of Computational Physics, vol. 1, pp. 517-535, 1967.
[18] R. W. Hockney, "POTENTIAL CALCULATION AND SOME APPLICATIONS," Journal Name: Methods Comput. Phys. 9: 135-211(1970).; Other Information: Orig. Receipt Date: 31-DEC-70, p. Medium: X, 1970.
[19] H. J. C. Berendsen, J. P. M. Postma, W. F. Van Gunsteren, A. DiNola, and J. Haak, "Molecular dynamics with coupling to an external bath," The Journal of Chemical Physics, vol. 81, p. 3684, 1984.
[20] A. J. Stone, The theory of intermolecular forces: Clarendon Press, 1996.
[21] R. J. Sadus, Molecular Simulation of Fluids: Elsevier, 2002.
[22] P. O. J. Scherer, Computational Physics: Simulation of Classical and Quantum Systems: Springer, 2010.
[23] J. Tersoff, "New empirical model for the structural properties of silicon," Physical Review Letters, vol. 56, pp. 632-635, 1986.
[24] J. Tersoff, "Empirical interatomic potential for silicon with improved elastic properties," Physical Review B, vol. 38, pp. 9902-9905, 1988.
[25] J. Tersoff, "New empirical approach for the structure and energy of covalent systems," Physical Review B, vol. 37, p. 6991, 1988.
[26] J. Tersoff, "Modeling solid-state chemistry: Interatomic potentials for multicomponent systems," Physical Review B, vol. 39, pp. 5566-5568, 1989.
[27] N. Roberts and R. J. Needs, "Total energy calculations of dimer reconstructions on the silicon (001) surface," Surface Science, vol. 236, pp. 112-121, 1990.