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研究生: 周家榮
Santos, Ian Daniell
論文名稱: 分析和優化用於石墨烯異質接面元件的聚氧二甲苯
Characterization and Optimization of Poly(Phenylene) Oxide Dielectric for Graphene-Based Heterojunction Devices
指導教授: 蘇彥勳
Su, Yen-Hsun
學位類別: 碩士
Master
系所名稱: 工學院 - 材料科學及工程學系
Department of Materials Science and Engineering
論文出版年: 2017
畢業學年度: 105
語文別: 英文
論文頁數: 71
中文關鍵詞: 石墨烯電聚合聚氧二甲苯異質接面
外文關鍵詞: Graphene, Electropolymerization, Poly(Phenylene Oxide), Heterojunction
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  • Graphene over the previous decade has proved to be a versatile material due to its high carrier mobility, flexibility and conductivity in applications in the nano- and the meso-scale. To translate these unique properties into applicable electronic devices a scalable, controllable, and powerful method for their fabrication has to be identified. Recently, the formation of a dielectric Poly(Propylene-Oxide) polymer through electrodeposition has yielded promising results for top-gated graphene Field-Effect Transistor (FET) such as high dielectric quality and low mobility degradation. However, the mechanism of dielectric formation and the limits of achievable performance have not been elucidated and questions about its applicability to scalable fabrication schemes remain.

    We here demonstrate the in-situ characterization of the PPO layer during electrochemical deposition. Field effect transistors were employed in a sensing configuration to measure the change in dielectric environment throughout the deposition process. By comparison with a reference system, the deposition speed and morphology of PPO on top of graphene could be identified. These parameters were found to sensitively depend on the potential drop across the graphene/electrolyte interface and a feedback scheme was developed that allows the self-limited deposition of dielectric layers with nanometer precision. Lastly, we determined the viability of the PPO dielectric as a gate dielectric by incorporating the electrodeposition process to fabricate a working graphene-based heterojunction device. We report that PPO is an effective dielectric barrier on graphene which allows the device to demonstrate on-off ratios at 102 and exhibit modulation of current.

    ABSTRACT I ACKNOWLEDGEMENT III TABLE OF CONTENTS IV LIST OF FIGURES VII CHAPTER ONE INTRODUCTION 10 1.1 Research Background 10 1.2 Field Effect Transistors 12 1.2.1 Structure and Principles of Operation 12 1.2.2 Graphene Field Effect Transistors and its Limitations 13 1.3 Graphene Heterojunction Devices 14 1.4 Role of Dielectric on Graphene 15 1.4.1. Complications with Graphene Based Heterojunction Devices 16 1.5 Proposal 17 CHAPTER TWO METHODOLOGY 19 2.1 Electrochemical Methods 19 2.1.1 Cyclic Voltammetry 19 2.1.2 Electrochemical Impedance Spectroscopy 21 2.2 Ellipsometer -– Fabrication of a simple Stokes vector Ellipsometer set-up 23 2.3 Electrical Characterization 27 CHAPTER THREE CHARACTERIZATION OF POLYPHENYLENE OXIDE AS DIELETRIC 30 3.1 Material and Methods 30 3.2 Cyclic Voltammetry 31 3.3 Electrochemical Impedance Spectroscopy (EIS) 33 3.4 Leakage Current 35 3.5 Ellipsometry 36 3.6 Atomic Force Microscopy 37 38 3.7 Summary 38 CHAPTER FOUR CHARACTERIZATION OF PPO USING A GRAPHENE-BASED SENSOR 39 4.1 Materials and Methods 39 4.2 Top and Bottom Gate Characterization 41 4.3 Thickness Measurement Optimization 44 4.4 Controlling Thickness Measurement 50 4.5 Summary 53 CHAPTER FIVE GRAPHENE BASED VERTICAL TRANSISTORS 56 5.1 Materials and Methods 56 5.2 Electrical Characterization – Semiconductor Layer 59 5.3 Electrical Characterization – Device Proper 60 5.4 Summary 64 CHAPTER SIX CONCLUSION 65 6.1 Outlook 66 REFERENCES 68

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