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研究生: 張瑞顯
Chang, Jei-Hsien
論文名稱: 應用線性迴歸診斷法於液晶顯示器Mura缺陷自動化檢測之設計與實現
TFT-LCD Mura Defects Automatic Inspection system using Linear Regression Diagnostics Model
指導教授: 陳響亮
Chen, Shiang-Linang
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 製造工程研究所
Institute of Manufacturing Engineering
論文出版年: 2005
畢業學年度: 93
語文別: 中文
論文頁數: 147
中文關鍵詞: 液晶平面顯示器線性迴歸診斷法自動光學檢測Mura缺陷
外文關鍵詞: Mura defect, Automatic inspection, Regression diagnostics, TFT-LCD
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  •   TFT-LCD模組製程的面板點燈檢測除基礎的光電響應量測之外、還包括壽命(aging)及畫質缺陷檢測,如點、線、異物、Mura…等缺陷,然而在諸多的畫質檢測中,尤其以Mura缺陷之瑕疵最不易檢測出來,而易招致客戶抱怨,不為消費者所接受。目前產業界的Mura缺陷檢測判定,皆於成品階段以人工目視之方式進行全面檢測,人工檢測除了費時之外也容易造成漏檢、誤判等問題,因此建立自動化產品的檢測機制是絕對必要的。
      本研究深入探討TFT-LCD顯示原理,分析各種Mura缺陷的形成原因,依據缺陷之特徵進行分類,並蒐集相關文獻及學理,建立一套檢測程序。檢測方式分別以面掃描CCD攝影機模擬人工視覺檢測的情形,在約110公分的距離下,使用高解析度的鏡頭來檢測整塊面板的品質。並以自行撰寫的Mura缺陷檢測程式及建構檢測硬體之架構,完成Mura缺陷的自動化檢測系統。Mura檢測方法主要利用數位影像處理之技術,分別以線性迴歸診斷及預測偵測影像中異常值(Outliers)及影響點(Influential point),以Niblack's閥值切割進行Mura缺陷區域的分割,再進一步量化評價備選Mura,並以0.5的辨識臨界值判斷出每一個真實的Mura缺陷。
      本文實驗使用了13片17吋TFT-LCD面板產品,其中有10片panel經由人眼目視方式檢測出Mura缺陷(bad panel),另外有3片panel經由人工檢測判定無任何缺陷之正常品(good panel)。經自動化檢測結果顯示本研究使用的方法皆可有效正確地分類出良品(G品)與不良品(NG品)的TFT-LCD面板產品。

      The Liquid Crystal Display(LCD) nowadays will be the most important and promising technical product. The techniques of inspection of the LCD panel include aging, final display inspection , and final visual inspection. Line, poin , particle, and Mura etc. are those of the display defects of the LCD panel. However, the Mura defect on TFT-LCD is most difficult to inspect among all the known defects and thus it is prone to be complained by customer. Currently, most of TFT-LCD Mura defect inspection tasks are done by artificial inspecttion, which is time-consumption and low accuracy. Therefore it is essential to build up an automatic inspection scheme of the manufacture process and with the image processing techniques to attain a high accurate detection rate.

      The presented method of the TFT-LCD Mura defects inspection is mainly with digital image process, which consists of three phases. The first phase, we employ regression diagnostics method to detect outliers and influential points, and then to estimate background image region. The second phase, we segment candidate region Mura from TFT-LCD display image using Niblack's threshold. In the third phase, we quantify Mura level for each candidate, which is used to identify real muras while the mura level threshold was set to be 0.5.

      The experiment has been performed on 13 TFT-LCD panel samples consisting of 10 bad panels and 3 good panels. Each bad panel has at least one Mura defect. All Mura defects in our experiment were detected by human visual inspection in the field beforehand. Good panels are claimed to have no Mura defect. Finally, in the manner of the presented visual inspection technique of Mura defect in TFT-LCD, all Mura defects claimed by human inspection have been correctly detected and classify the good panels(pass) and the bad panels(fail) successfully.

    中文摘要 Ⅰ Abstract Ⅱ 誌謝 Ⅲ 目錄 Ⅳ 表目錄 Ⅶ 圖目錄 Ⅷ 第一章 緒論 1 1.1 前言 1 1.2 研究背景與動機 2 1.2.1 TFT-LCD製程程序 3 1.2.2 TFT-LCD檢測工程 5 1.2.3 模組製程瑕疵檢測項 6 1.2.4 研究動機 8 1.3 研究目的 8 1.4 研究範圍與限制 9 1.5 論文架構說明 11 第二章 Mura原理分析 13 2.1 Mura缺陷原理 13 2.1.1 Mura缺陷定義 13 2.1.2 Mura缺陷種類 14 2.1.3 Mura缺陷形成原因 17 2.2 Mura缺陷檢測之問題 19 2.2.1 人工檢測之問題 20 2.2.2 自動化檢測之問題 22 2.2.2.1 Mura取像量測之問題 22 2.2.2.2 影像處理技術之問題 25 2.2.2.3 Mura辨識之問題 27 2.3 結論 27 第三章 文獻探討 28 3.1 國內相關研究文獻回顧 28 3.2 國外相關研究文獻回顧 29 第四章 研究方法與Mura檢測理論探討 31 4.1 線性迴歸分析與預測 32 4.1.1 迴歸模型的特性 33 4.1.2 參數估計-最小平方法 34 4.1.3 線性迴歸分析分類 37 4.2 迴歸模型建構與分析 40 4.2.1 迴歸模式問題的定義 42 4.2.2 迴歸模式建立 43 4.2.3 迴歸模式適當性檢驗 45 4.2.4 迴歸模式分析與評估 46 4.3 迴歸診斷法 47 4.3.1 迴歸分析中的異常值與影響點 47 4.3.2 Outliers的診斷方式 49 4.4 Mura量測的評價方法與辨識法則 53 4.4.1 Weber法則 53 4.4.2 Mura量測的評價標準 56 第五章 Mura檢測方法與實作 59 5.1 自動化檢測流程 61 5.2 迴歸診斷及預測前級處理 64 5.2.1 配適二階多項式迴歸模型 66 5.2.2 線性迴歸診斷 67 5.2.3 配適四階多項式迴歸模型 70 5.2.4 影像相減法 71 5.3 影像分割中級處理 72 5.3.1 Niblack's閥值切割法 74 5.3.2 影像濾波-中值濾波法 75 5.3.3 型態學 77 5.4 Mura缺陷的量測方式與評價標準後級處理 81 5.4.1 Mura缺陷的影像量測方式 83 5.4.2 Mura缺陷的評價指標 85 第六章 實驗結果與分析 87 6.1 檢測系統架構 87 6.2 Mura檢測系統環境 93 6.3 Mura自動化檢測結果 95 6.4 Mura辨識閥值基準 108 6.5 Mura自動化檢測之驗證與績效評估 110 第七章 結論與未來展望 112 7.1 結論與貢獻 112 7.2 未來研究方向 114 參考文獻 118 附錄一 針對不同Mura缺陷樣本及不同色彩pattern的檢測結果 122 自述 147

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